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EUV Reflectometer
| Thermionics
designed and built the EUV Reflectometer to measure the reflectivity of and
map the uniformity of large multilayer mirrors for optical applications in
astronomy and lithography.
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Reflectometer Details
Chamber Size
64 inches diameter
122 inches long
Weight (with goniometer)
14,400 lbs.
Pressure
10-10 Torr Range
Maximum Bakeout
150°C
Sample size
Up to 14” diameter, up to 6” thick
Sample weight
Up to 100 lbs.
Axes
of Motion
Goniometer: 6
Detector Arm: 2
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This spectrometer, designed for and installed at a national laboratory, features
a unique virtual axis goniometer that allows glancing angle studies of up
to 90° normal to sample plane. A large portion of the 14” diameter
x 6” thick mirror sample can be positioned as the sample pivot. A detector
arm employs two motions to follow and scan the surface of the mirror as it
moves in six directions.
Virtual Axis Goniometer
allows glancing angle studies.
Axes
of Motion
| Goniometer
Axis |
Range |
Resolution |
 1 |
±95° |
0.01° |
| 2 |
±30° |
0.01° |
| 3 |
±7” |
0.0003” |
| 4 |
±2” |
0.0004” |
| 5 |
360° |
0.01° |
| 6 |
0”
to 2” |
0.0004” |
| Detector
Arm |
Range |
Resolution |
 1 |
360° |
0.01° |
| 2 |
±30° |
0.18° |
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