Our online catalog is being updated! Please contact us for current pricing. 3-Axis Ultra High Vacuum Precision Manipulators -- EC Series Description The EC series manipulators provide high precision positioning at minimum cost. They feature precision preloaded cross-roller stage control with preloaded micrometer-to-stage coupling. The XY guide system is made of hardened steel. Features Bakeable to 200°C fully assembled; no castings used in construction Hardened steel X and Y cross-roller guides Dual 0.75" O. D. hardened stainless steel Z guide rods Aluminum stage construction Stainless steel only material exposed to vacuum All position operation EC-1.39-2, standard model EC-1.39-2, with optional 6.0" base flange with 5 mini-ports Specifications Motion Specifications X axis Resolution:     <0.0001" (0.0025 mm) readability with optional large micrometers (only) Repeatability     <0.00015" (0.0038 mm) Backlash     <0.00015" (0.0038 mm) Y axis Resolution:     <0.0001" (0.0025 mm) readability with optional large micrometers (only) Repeatability:     <0.00015" (0.0038 mm) Backlash:     <0.00015" (0.0038 mm) Z axis Resolution:     <0.0005" (0.013 mm) Repeatability:     <0.0005" (0.013 mm) Backlash:     <0.0007" (0.018 mm) Rigidity:     <0.001"    5 lb. load change (1.39" I. D. bellows only) Bellows 1.39" or 1.87" I. D. bellows X & Y Axes ±0.5" X and Y travel, circular pattern, preloaded micrometer-to-stage coupling, 0.001" micrometer divisions Micrometers bakeable to 200°C Z Axis 2", 4" and 6" Acme Z travel, 0.100"/turn knob adjust Traveling Flange 2.75" O. D. traveling flange, tapped Ordering Information 3-Axis Ultra High Vacuum Precision Manipulators Base Flange O. D. Bellows I. D. Z Travel Model No. Price 2.75" 1.39" 2" EC-1.39-2 $3,500. 1.39" 4" EC-1.39-4 $3,940. 1.39" 6" EC-1.39-6 $4,350. 4.5" 1.87" 2" EC-1.87-2 $3,950 1.87" 4" EC-1.87-4 $4,350 1.87" 6" EC-1.87-6 $4,850 Options Option: 6" Base Flange Model No: /B-6 additional $85 Change base flange to 6.0" O.D. This option may be ordered with any model. Option: 6" Base Flange with 5 mini-ports Model No: /B-6M additional $385 Change base flange to 6.0" O.D. with 5 mini-ports. This option may only be ordered with the 1.39" I. D. bellows. Option: XY Micrometers, ±0.5" travel Model No: /LM Consult Factory for Pricing Large micrometers with 0.0001" divisions. Set of two. Option: Stepping Motor Drive Model No: /SMC   See our Motor Controllers page. Option: Motorization Model No: /MS Stepping or /MY Synchronous Motor Drive See our Motor Drives page. Other Options Available     Polar rotation Rotary seals Rotary feedthroughs Reducer feedthrough hats Tilts Sample motion Mounting Heating Cooling Contact factory for more information on these options.