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Precision XYZ Manipulator
EMX Series
Description
The EMX Series XYZ manipulator is a new addition to Thermionics' manipulator line. This manipulator provides large I.D. bellows for clear-bore access into your UHV chamber.
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| EMX Manipulator (shown with custom bellows, optional Large Micrometers, and RNN™) |
Features
- 2.0", 2.5" and 3.0" I.D. bellows
- Hardened X & Y cross roller guides
- 0.75" O.D. hardened stainless steel Z guide rods
- Hardened stainless steel linear bearings
- All stainless steel XYZ guide system
- X micrometer location interchangeable
- Aluminum stage construction
- Stainless steel only material exposed to vacuum
- Maximum bakeout temperature: 200°C
- 5 year guarantee
Specifications
X & Y Axes
- ± 0.5" or ± 1.0" X & Y travel, circular pattern, pre-loaded micrometer to stage coupling, 0.001" micrometer divisions, small micrometers standard (large drum dial micrometers optional)
Z Axis
- 2" - 36" Z travel, 4:1 worm acme gearbox, 0.050"/turn, 20 turns/inch, 0.001" divisions, position lock
Base Flange
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4.50" O.D., clearance (4.62" base flange standard on 3.00" I.D. bellows)
- Optional sizes: 6.00" and 8.00"
Traveling Flange
- 4.50" O.D, tapped (4.62" traveling flange standard on 3.00" I.D. bellows)
- Optional size: 2.75"
Ordering Information
with 2" Z Travel
| Bellows I.D. | X&Y Travel | Model No. | Price | Addl. Z Travel
Per Inch* |
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| 2.0 | ± 0.5" | EMX-2.0-1-1-2 | $ 4,950 | $ 280 |
| 2.5 | ± 0.5" | EMX-2.5-1-1-2 | $ 5,375 | $ 300 |
| ± 1.0" | EMX-2.5-2-2-2 | $ 6,850 | $ 300 |
| 3.0 | ± 0.5" | EMX-3.0-1-1-2 | $ 7,325 | $ 390 |
| ± 1.0" | EMX-3.0-2-2-2 | $ 8,900 | $ 390 |
* Available in 2 inch increments
Options
| Option: 6" Base Flange |
Model No: /B-6 |
additional $85 |
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Change base flange to 6.0" O.D. This option may be ordered with any model.
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| Option: 6" Base Flange with 5 mini-ports |
Model No: /B-6M |
additional $385 |
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Change base flange to 6.0" O.D. with 5 mini-ports. This option may only be ordered with the 1.39" I. D. bellows.
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| Option: 8.0" O.D. Base Flange |
Model No: /B-8 |
additional $225 |
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Change base flange to 8.0" O.D.
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| Option: XY Micrometers, ±0.5" travel |
Model No: /LM |
Consult Factory for Pricing |
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Large micrometers with 0.0001" divisions. Set of two.
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| Option: XY Micrometers, ±1.0" travel |
Model No: /LM |
Consult Factory for Pricing |
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Large micrometers with 0.0001" divisions. Set of two.
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| Option: Custom Support Tube |
Model No: /ST-.75 |
additional $450 |
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- 0.75" O.D.
- End bearing support for rotary shaft
- Length specified by customer
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| Option: Motorization |
Model No: /MS Stepping or /MY Synchronous Motor Drive |
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See our Motor
Drives page.
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