Thermionics Vacuum Products 1-800-962-2310
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October 2008


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Tilt Systems

Tilt stages allow a precise angle alignment to be established (and repeated) between two flanges. When the base flange of a tilt stage is attached to the chamber flange (or traveling stage of positioning device) and a probe is attached to the tilting flange, probe angle and tip position can be changed.

Tilts can also be used as an inexpensive method to align docking systems and actuate sample transfers. The TLT series was designed for that purpose and is constructed for cantilever (horizontal) loads. TLT tilt stages are available in single and dual axis units.

GBLM-1.5 Precision Tilt Stage

  • Dual micrometer adjust
  • 1.5" I.D.
  • 2.75" O.D. base flange, clearance holes
  • 2.75" O.D. tilting flange, tapped
  • Demountable with independent, formed, stainless steel bellows
  • Stainless steel ball bearing pivots
  • Bakeable to 200°C fully assembled
  • Dual angle lock
  • Up to ±7° tilt range

  • (NOTE: When used with an XYZ manipulator, actual angular range available for the tilt stage is limited by manipulator bellows I.D., axial probe O.D., and the flange-to-flange distance of Z range position)
    Price      $1,380. 

TLT-1.5-1 Single Axis Tilt Stage

  • 1.5" I.D. formed bellows
  • 2.75" O.D. flanges, tapped
  • Knob adjust on one axis
  • ±5° tilt range
  • Roller bearing pivots suitable for horizontal mounting (cantilever) of payloads
  • Maximum bakeout temperature: 200°C

  • Price      $865. 

TLT-1.5-2 Dual Axis Tilt Stage

  • 1.5" I.D. formed bellows
  • 2.75" O.D. flanges, tapped
  • Knob adjust on two axes
  • ±5° tilt range
  • Roller bearing pivots suitable for horizontal mounting (cantilever) of payloads such as FLLRE and RPLR transfer units (consult factory for application)
  • Maximum bakeout temperature: 200°C

  • Price      $1,320. 

TLTM-4.0-1 Single Axis Tilt Stage

  • Micrometer adjust, bakeable
  • 4.0" I.D. formed bellows
  • 6" O.D. flange faces, tapped, 8" flange
  • ±5° tilt range
  • Roller bearing pivots
  • Maximum bakeout temperature: 200°C

  • Other bellows I.D., dual axis and angle range available 
    Price      $3,550.

TLTW-1.5-2 Dual Axis Tilt Stage

  • Wrench adjust on two axes (3-point adjustment)
  • 1.5" I.D. formed bellows
  • 2.75" O.D. flanges, tapped
  • ±4° tilt range
  • Suitable for horizontal mounting (cantilever) of payloads
  • Maximum bakeout temperature: 200°C

  • Price      $720.

OPTIONS

Option Name Description Price
Base Flange /B For all TLT series

Replaces 2.75" O.D. base with 6" O.D.

Allows throughhole mounting

$135.
Horizontal Mounting Package /HMPT Adds counter spring to tilt

Relieves load on micrometers

Consult factory
Micrometer Adjust /MA   Consult Factory for Pricing


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