Thermionics Vacuum Products

MicroPositioning Stages

Introducing a new line of in-vacuum positioning stages with sub-micron resolution and vibration-free motion. This new line of manipulation provides accurate positioning for SEM, TEM, PEEM and other high-resolution applications.

Thermionics offers several configurations of the MicroPositioning stage. Here are three examples:

• Three-axis
• Five-axis
• Custom four-axis

Contact an Applications Engineer to discuss your specific requirements.

Up to 6 axes of linear and/or rotary motion are produced by combining precise positioning stages activated by compact piezoelectric motors. These non-magnetic in-vacuum motors are UHV compatible down to 10^-10 Torr. The stages may also be integrated with conventional out-of-vacuum motion devices.

The linear encoder scale is attached directly to the moving stage eliminating all drive train induced translation errors.

Features

0.1 µm design resolution

0.2 µm minimum incremental motion

Velocity up to 250 mm/s

Unlimited travel

Up to 6 axes of motion

Bakeable to 120°C

Vibration-free motion

Integrated motion controller

1-year guarantee

Options

Reduced magnetic permeability
Non-magnetic titanium stage construction
In-vacuum sample transfer
Hand-held terminal for controller

Applications

PEEM, SEM, SIMS, TEM
Microscopy
Thin film deposition
Surface treatment
E-beam and ion beam applications

Example Configurations

Three-axis Micropositioning Stage
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Three-axis MicroPositioning stage.

Manipulator Axes (resolution)
	X motion	±0.25" (≤ 1.0 µm)
	Y motion	±0.50" (≤ 1.0 µm)
	Z motion	±0.25" (≤ 1.0 µm)

Sample Characteristics
	Sample Size	1 cm x 1 cm
	Bakeout Temperature	120°C
	Reduced Magnetic Permeability	< 0.1 Gauss within 1.25" of sample

Motorization
Non-magnetic, in-vacuum piezo-electric motors with encoders. The integrated package includes a computer programmable motion controller for all five axes.
Computer Interface: RS-232/485 or ethernet

Five-axis Micropositioning Stage
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Five-axis MicroPositioning stage.

Manipulator Axes (resolution)
	X motion	±0.5" (≤ 1.0 µm)
	Y motion	3.0" (≤ 1.0 µm)
	Z motion	±0.3" (≤ 1.0 µm)
	Sample polar rotation	+5°, -95° (≤ 0.01°)
	Sample flip	±5° (≤ 0.01°)

Sample Characteristics
	Sample Size	1 cm x 1 cm
	Bakeout Temperature	120°C

Motorization
Non-magnetic, in-vacuum piezo-electric motors with encoders. The integrated package includes a computer programmable motion controller for all three axes.
Computer Interface RS-232/485 or ethernet

Custom Four-axis Micropositioning Stage
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Custom Four-axis MicroPositioning stage.

Manipulator Axes (resolution)
	X motion	3.0" (≤ 1.0 µm) at 8 mm/sec
	Y motion	3.0" (≤ 1.0 µm)
	Polar rotation	±180° (≤ 0.01°)
	Flip	±5°, -95° (≤ 0.1°)

Sample Characteristics
	Sample Size	2" dia.
	Bakeout Temperature	120°C

Motorization
X and Y motion: Non-magnetic, in-vacuum piezo-electric motors with encoders
Polar and Flip: Standard out-of-vacuum stepper motors.
The integrated package includes a computer programmable motion controller for all four axes.
Computer Interface RS-232/485 or ethernet