3kW Rod-Fed e-Gun (shown with feedthroughs)
The operation of the 3 kW rod-fed e-Gun is unique. The evaporant source
material, in the form of a rod up to 3/8” in diameter, is fed continuously
into the crucible using an external linear feedthrough. Film thickness may
be controlled using a rate monitor.
The e-guns are available mounted on various flanges.
UHV Compatible
Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11
Torr.
Mounting and Configurations
- The 3kW rod-fed e-Gun may be mounted and operated in any
orientation, including upside down (which is material dependent)
- The rod-fed e-Gun shown in the photo on the right can fit
through a 2.5” O.D. tube
- An optional cryoshroud to surround the e-Gun is available
- Multiple rod-fed e-Guns can be mounted side-by-side
- Custom designs are available, please consult the factory
Knudsen Cell Replacement
e-Guns can evaporate difficult materials, ie.: carbon, niobium, and silicon.
A rod-fed e-Gun, complete with all the necessary utility and mechanical
feedthroughs, installed on a 4.5” O.D. ConFlat® mounting
flange, is available as a direct replacement for existing Knudsen Cell
furnaces on Varian/Intevac, Perkin-Elmer, Riber, EPI and VG systems.
Please call to discuss your specific application requirements.
Mounting Configurations
Each e-Gun is available in three standard mounting configurations:
- e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
- e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
- e-Gun alone with no mounting flange
Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.
Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
Ordering Information
| Model No. | Description | Price |
|---|
| RCRF0325 | Rod-fed e-Gun only | $4,200* |
| RCRF0325/SK | Rod-fed e-Gun with all utility, electrical and mechanical feedthroughs | $9,500* |
*Please note: The price shown is an estimate
provided for budgetary purposes. Actual price may be lower or higher, and
is dependent upon mounting configurations, system geometry, and utility requirements.
Please contact the factory for further information.
For further information also see:
• Power Supplies
• Controllers
• Accessories
• Crucible Liners