Operation
The operating principle of the multiple crucible e-Gun is identical to the single crucible source with the following advantages:

• Large supply of evaporant--When every crucible is filled with the same source material, an increased volume of evaporant can be evaporated in a single vacuum cycle.
• Deposition of up to eight different materials in one vacuum cycle--A different material can be put in each crucible and deposited in any sequence during a single vacuum cycle. The deposition rates are the same as those of the single crucible model. Only one crucible is heated at a time. The single filament remains stationary and the crucible head is indexed into position by the drive handle. Therefore, the evaporation always originates from exactly the same position in the vacuum chamber. The inactive crucibles are shielded from the heated crucibles by the magnetic pole pieces, thereby eliminating contamination between crucibles.

High Vacuum Compatible
Metal and elastomer seals, measured base pressure: 2 x 10^-9 Torr.

Interchangeable Crucibles
The main crucible wheel can be removed from the top of the source without total source disassembly. This flexibility allows field upgrades.

Specials
All multiple crucible e-Guns can be mounted on larger diameter ConFlat or rectangular PyraFlat flanges, single or back-to-back.

Specifications

Operating pressure	Below 5 x 10-5 Torr is desirable for best operation
Beam voltage	4,000 V
Beam current	0-750 mA continuously variable
Maximum power	3,000 W
Cooling water	1.5 gpm
Maximum bakeout temperature	120°C (150°F)
Crucible volume	2.24 cc x 4, 6, or 8 crucibles

Mounting Configurations

Each e-Gun is available in three standard mounting configurations:

1. e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
2. e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
3. e-Gun alone with no mounting flange

Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.

Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.

Base Schematics