Single Models--standard
Model No. 100-0010
Price: $3,850
Special Models
• 2 singles mounted on ConFlat® flange
• 3 singles mounted on 8” dia ConFlat® flange
UHV Compatible
Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.
For further information also see:
• Power Supplies
• Controllers
• Accessories
• Crucible Liners
Specifications
| Operating Pressure |
Below 5 x 10-5 Torr is desirable for best operation |
| Beam voltage |
4,000 V |
| Beam current |
0-750 mA
continuously variable |
| Maximum power |
3,000 W |
| Cooling water |
1/2 gpm |
Maximum bakeout
temperature |
230°C (446°F) |
Feedthrough
requirements |
Two 7 kV 50 A |
| Crucible volume |
2.24 cc |
| e-Gun size |
2.50” x 1.94” x 1.69” |
Mounting Configurations
Each e-Gun is available in three standard mounting configurations:
- e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
- e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
- e-Gun alone with no mounting flange
Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.
Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
3kW Evaporation Characteristics
| Material |
Rate—Å min |
| Aluminum |
1260 |
| Copper |
1220 |
| Gold |
1550 |
| Tantalum |
435 |
| Molybdenum |
2290 |
| Nickel |
2250 |
| Tungsten |
590 |
| Palladium |
750 |
| Silver |
3000 |
Rates shown represent the maximum stable rate for each material.
All measurements were taken at a substrate location 10" (25.4 cm) directly
above the cruicible. Rates are dependent upon many factors and the
above rates are listed for reference purposes only.
Varian e-Guns
Thermionics developed and was the private-label manufacturer of many of Varian Associates’ single and multiple position 2 and 3 kW e-guns and e-Gun power supplies.
We maintain a stock of replacement parts of these Varian e-Guns and power supplies. If you need parts, service, or assistance, please call us. We will be glad to help you.