|
Request a Catalog
Jobs at Thermionics
|
|
|
Our online catalog is being updated! Please contact us for current pricing.
High Capacity Single Crucible e-Guns
270° Beam Deflection
The High Capacity Series of e-Guns incorporates a proven 270°
electron beam deflection system. The filament is hidden below and out of the line-of-sight of
the crucible. This prevents ion erosion and provides maximum protection from
shorting caused by stray particles or condensate.
Long Life Emitter Assembly
The 270° electron beam deflection
design has been enhanced with a new and improved emitter assembly.
Easy Filament Replacement
The emitter assembly design makes removal or replacement of the filament fast
and easy. A filament alignment tool maintains
critical filament tolerances, allowing quick and
accurate filament replacement.
Permanent Magnet
Beam Positioning
Primary beam position is controlled by a permanent magnet. Electromagnets are
used for precise positioning and beam sweep.
UHV Compatible
Metal-sealed, fully UHV compatible,
measured base pressure: 2 x 10-11 Torr.
Specifications
| Maximum power | 10 kW |
| Emission voltage | -6 to -10 kV |
| Emission current | 0 to 1 A |
| Filament | 700 W |
| E-beam deflection | 270° |
| Beam spot size | .25" dia., tight beam |
| Evaporation rate | 1 gram/min @ 10 kW,
36,000 Å/min Al @
10" (250 mm) source
to substrate distance |
| X and Y sweep | Longitudinal and
lateral control up to
200 Hz when operated
with Thermionics sweep controller |
| Water | 3 gpm, 20°C, 50 psi
pressure differential |
| Crucible material | OFE copper |
| Bakeout temperature | 230°C (446°F) |
Mounting Configurations
Each e-Gun is available in three standard mounting configurations:
- e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
- e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
- e-Gun alone with no mounting flange
Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.
Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
Ordering Information
High Capacity e-Guns
| Model No. | Description | Price |
|---|
| HCF1007 | 7 cc single crucible | $4,565 |
| HCF1015 | 15 cc single crucible | $4,565 |
| HCF1025 | 25 cc single crucible | $4,565 |
| HCF1040 | 40 cc single crucible | $4,565 |
For further information also see:
• Power Supplies
• Controllers
• Accessories
• Crucible Liners
|
Option: Emitter Assembles
| Model No. | Description | Price |
|---|
| 112128-SD | Standard | $1,000 |
| 112128-HD | Heavy-duty | $1,200 |
| 112128-DE | Dual filament | $1,400 |
Option: Spare Parts Kit
| Model No. | Description | Price |
|---|
| HC/ERK-SD | Standard | $95 |
| HC/ERK-HD | Heavy-duty | $95 |
| HC/ERK-DE | Dual filament | $105 |
|
|
|
|
|