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High Capacity Multiple Crucible Linear e-Guns
High Capacity Multiple Crucible Linear e-Guns
The HC Series Linear e-Gun is an all metal-sealed
e-Gun. Available in 4 and 5 crucible
versions, the source allows sequential deposition of
up to 5 materials. Standard mounting is on a
12" O.D. Conflat-type flange and includes
auto indexer and all mechanical and electrical connections.
UHV Compatible
Metal-sealed, fully UHV compatible,
measured base pressure: 2 x 10-11 Torr.
270° Beam Deflection
The filament is completely hidden to ensure maximum protection from
shorting caused by stray particles.
Easy Filament Replacement
A filament alignment tool maintains
critical filament tolerances during emitter
assembly allowing quick and accurate filament replacement.
Permanent Magnet Beam Positioning
The primary beam position is controlled by a permanent magnet; electromagnets
are used only for precise positioning and beam sweep.
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Features
• 4- and 5-crucible models
• 12" O.D. CF mounting flange
• Includes all electrical and utility feedthroughs
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Specifications
| Maximum power | 10 kW |
| Emission voltage | -6 to -10 kV |
| Emission current | 0 to 1 A |
| Filament | 700W |
| E-beam deflection | 270° |
| Beam spot size | Approx. .25" dia. tight beam |
| Evaporation rate | 1 gram/min @ 10 kW, 36,000 Å/min Al @ 10" (250 mm) source to substrate distance |
| Water | 3 gpm, 25 psi pressure differential |
| Crucible material | OFE copper |
| Bakeout temperature | 230°C |
Mounting Configurations
Each e-Gun is available in three standard mounting configurations:
- e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
- e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
- e-Gun alone with no mounting flange
Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.
Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
Ordering Information
HC Series Linear e-Guns
| Power | Crucible Size (cm3) | No. of Crucibles | Model No. | Price |
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| 6 kW |
7 |
4 |
HCL0607-4 |
$19,430 |
| 7 |
5 |
HCL0607-5 |
$21,430 |
| 15 |
4 |
HCL0615-4 |
$19,430 |
| 15 |
5 |
HCL0615-5 |
$21,430 |
| 25 |
4 |
HCL0625-4 |
$19,430 |
| 10 kW |
40 |
4 |
HCL1040-4 |
$19,430 |
| 40 |
5 |
HCL1040-5 |
$21,430 |
| 15 kW |
75 |
4 |
HCL1575-4 |
$19,430 |
| 75 |
5 |
HCL1575-5 |
$19,430 |
Option: Emitter Assembles
| Model No. | Description | Price |
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| 112128-SD | Standard | $1,000 |
| 112128-HD | Heavy-duty | $1,200 |
| 112128-DE | Dual filament | $1,400 |
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Option: Spare Parts Kit
| Model No. | Description | Price |
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| HC/ERK-SD | Standard | $95 |
| HC/ERK-HD | Heavy-duty | $95 |
| HC/ERK-DE | Dual filament | $105 |
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For further information also see:
• Power Supplies
• Controllers
• Accessories
• Crucible Liners
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