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High Capacity Multiple Crucible Rotary e-Guns
High Capacity Multiple Crucible Rotary e-Guns
The HC Series Rotary e-Gun evaporation source delivers superior results in demanding production coating applications. The large crucible volume permits long, uninterrupted evaporation runs. Easy, quick disassembly and assembly reduce maintenance time. HCR e-Guns are designed to provide maximum service life.
Features
270° beam deflection
Multiple crucibles, rotary design
Interchangeable crucible assemblies
Long life emitter assembly
Easy filament replacement
Permanent magnet beam positioning
Integral sweep coils
Available with bottom or side drive
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270° Beam Deflection
The High Capacity Series of e-Guns incorporates a proven 270° electron beam deflection system. The filament is located to provide maximum protection from shorting caused by stray particles or condensate.
Long Life Emitter Assembly
The 270° electron beam deflection design has been enhanced with a new and improved emitter assembly.
Easy Filament Replacement
The emitter assembly design makes removal or replacement of the filament fast and easy. A filament alignment tool maintains critical filament tolerances during emitter assembly, allowing quick and accurate filament replacement and installation.
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Permanent Magnet Beam Positioning
The primary beam position is controlled by a permanent magnet. Electromagnets are used for precise positioning and beam sweep.
Interchangeable Crucibles
The e-Gun offers interchangeable crucible blocks, available in a variety of volumes and geometries. Five standard crucible arrangements are available, offering the flexibility necessary for a wide variety of source materials, applications, and processes.
Crucible Removal
The rotary crucible block assemblies can be easily and quickly removed from the top of the e-Gun, for cleaning, replacement, and/or changing the crucible block assembly.
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Specifications
| Maximum power | 10 kW |
| Emission voltage | -6 to -10 kV |
| Emission current | 0 to 1 A |
| Filament | 700 W |
| E-beam deflection | 270° |
| Beam spot size | .25" dia., tight beam |
| Evaporation rate | 1 gram/min @ 10 kW
36,000 Å/min Al @10" (250 mm) source to substrate distance |
| X and Y sweep | Longitudinal and lateral control up to 200 Hz when operated with Thermionics sweep controller |
| Water | 3 gpm, 20°C, 50 psi pressure differential |
| Crucible material | OFE copper |
| Bakeout temperature | 120°C (250°F) |
Mounting Configurations
Each e-Gun is available in three standard mounting configurations:
- e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
- e-Gun with a 1" diameter bolt-type mount, which mount through a 1" diameter hole, and is sealed by a compression O-ring
- e-Gun alone with no mounting flange
Please specify the mounting configuration at the time the order is placed; the prices listed may not include the bolt-type or flange-type mount.
Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
Ordering Information
HC Series Rotary e-Guns
| Description | Crucible Size in
Cubic Centimeters | No. of Crucibles | Model No. | Price |
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| 4 crucible, side drive | 7 | 4 | HCR0607-4-SD | $8,000 |
| 4 crucible, bottom drive | 7 | 4 | HCR0607-4-BD | $8,000 |
| 4 crucible, side drive | 15 | 4 | HCR1015-4-SD | $8,000 |
| 4 crucible, bottom drive | 15 | 4 | HCR1015-4-BD | $8,000 |
| 4 crucible, side drive | 25 | 4 | HCR1025-4-SD | $8,500 |
| 4 crucible, bottom drive | 25 | 4 | HCR1025-4-BD | $8,500 |
| 4 crucible, side drive | 40 | 4 | HCR1040-4-SD | $8,500 |
| 4 crucible, bottom drive | 40 | 4 | HCR1040-4-BD | $8,500 |
| 6 crucible, side drive | 7 | 6 | HCR0607-6-SD | $8,750 |
| 6 crucible, bottom drive | 7 | 6 | HCR0607-6-BD | $8,750 |
| 6 crucible, side drive | 15 | 6 | HCR1015-6-SD | $8,750 |
| 6 crucible, bottom drive | 15 | 6 | HCR1015-6-BD | $8,750 |
| 6 crucible, side drive | 25 | 6 | HCR1025-6-SD | $8,750 |
| 6 crucible, bottom drive | 25 | 6 | HCR1025-6-BD | $8,750 |
| 8 crucible, side drive | 7 | 8 | HCR1007-8-SD | $8,995 |
| 8 crucible, bottom drive | 7 | 8 | HCR1007-8-BD | $8,995 |
| 8 crucible, side drive | 10 | 8 | HCR1010-8-SD | $8,995 |
| 8 crucible, bottom drive | 10 | 8 | HCR1010-8-BD | $8,995 |
| Rotary carousel, continuous trough crucible, side drive | 320 | 360° trough | HCRC320-1-SD | $8,500 |
| Rotary carousel, continuous trough crucible, bottom drive | 320 | 360° trough | HCRC320-1-BD | $8,500 |
| Rotary pan-type carousel, side drive | 360 | 360° pan | HCRP360-1-SD | $8,500 |
| Rotary pan-type carousel, bottom drive | 360 | 360° pan | HCRP360-1-BD | $8,500 |
Option: Emitter Assembles
| Model No. | Description | Price |
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| 112128-SD | Standard | $1,000 |
| 112128-HD | Heavy-duty | $1,200 |
| 112128-DE | Dual filament | $1,400 |
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Option: Spare Parts Kit
| Model No. | Description | Price |
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| HC/ERK-SD | Standard | $95 |
| HC/ERK-HD | Heavy-duty | $95 |
| HC/ERK-DE | Dual filament | $105 |
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For further information also see:
• Power Supplies
• Controllers
• Accessories
• Crucible Liners
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