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Vacuum Evaporators
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Model
No.
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Description
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Price
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Vacuum
evaporator. Turbomolecular pumped system with automatic operation. 12"
x 18" bell jar with 1kVA resistive power supply, baseplate feedthroughs
and digital low vacuum instrumentation.
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$33,300.
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Vacuum
evaporator. Turbomolecular pumped system with automatic operation. 12"
x 18" bell jar mounted on 12" collar feedthrough with an electron beam
gun evaporation source. All pressure and gun instrumentation mounted in
cabinet.
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$61,000.
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Vacuum
evaporator. Turbomolecular pumped system with automatic operation. 24"
x 24" bell jar mounted to 24" collar feedthrough with up to
three electron beam gun or sputter evaporation sources. All pressure gauge
and source instrumentation mounted in cabinet.
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$175,000
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Model VE-90
The model VE-90 vacuum evaporator is
the perfect answer to a requirement for vacuum evaporation or coating. Its
simple controls and rapid cycle time facilitate uncomplicated productivity.
Reliable coating chores are accomplished in an oil-free, high vacuum environment
that is available in 10 minutes from atmosphere with the touch of a button.
Greater control and more predictable film parameters are available, almost
as fast as the material can be loaded. Additional options are available
to give the user some flexibility in customizing the system to a particular
application. Consult factory for available options.
Price $33,300.
Vacuum System
- Bell Jar: Pyrex, Viton® sealed, 12" x 18"
- High Vacuum Pump: 260 l/sec turbomolecular pump
- Roughing Pump: 3.8 cfm 2-stage, direct drive rotary
Pressure Instrumentation
- High Vacuum: Digital ionization gauge
- Low Vacuum Digital convection gauge
Evaporation System
- Source: Resistive
- Power: 1kVA, nominal 75 A (optional 2 kVA, 200 A)
- Positions: 2 switch selectable pairs of baseplate feedthroughs
(filament holders and carbon evaporation kit are optional)
- Metering: Digital ammeter (100A FS)
Utilities
- Electrical: 115/220 VAC at 20 A
- Water: None
- Air: None
Hardware
- Cabinet: Tubular steel frame with casters, side panels, and
Formica top
- Dimensions: 30" L x 20" W x 42" H
- Hoist: Optional
Model VE-100
The model VE-100 extends the technology of the VE-90 by the addition of a 3 kW
e-Gun evaporation source while retaining a philosophy of simple, uncomplicated
operation. Unlike larger systems, the VE-100's purpose is not overstated:
It simply provides thin film coating--of virtually any materials--
quickly, cleanly and efficiently in a compact, dedicated system. With the
additional technology of the source, a slightly larger bell jar and a collar,
the optional flexibility of this system is almost boundless. To list just
a few examples, many users add additional crucibles to assist in uninterrupted
multi-coating operations, and the addition of a bell jar collar allows the
user to introduce manipulators, additional electrical or water feedthroughs,
and thin film instrumentation. Consult factory for available options.
Price $61,000.
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Specifications
Vacuum System
- Bell Jar: Pyrex, Viton® sealed, 12" x 18" (optional stainless steel)
- High Vacuum Pump: 520 l/sec turbomolecular pump
- Roughing Pump: 10.6 cfm 2-stage, direct drive rotary
- Control Automatic pumpdown, interlocks to protect source and instrumentation
- Cycle Time Typically 10 min to pumpdown
Pressure Instrumentation
- High Vacuum: Ionization gauge with digital controller
- Low Vacuum Digital convection gauge
Evaporation System
- Source: Electron beam gun
- Power: 3 kW
- Positions: 1 pocket (multiple pocket guns optional)
- Metering: Analog metering on handheld power controller
Utilities
- Electrical: 208/220 VAC at 20 A
- Water: .5 gpm
- Air: None
Hardware
- Cabinet: Tubular steel frame with casters, side panels, and
Formica top
- Dimensions: 36" L x 20" W x 54" H
- Weight: Approx. 350 lbs.
- Hoist: Standard
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The
model VE-240 vacuum evaporator offers the most flexibility of all the
VE evaporators. It has the largest bell jar in the VE series and the feedthrough
collar accommodates up to 3 evaporation sources. It comes with a 1000
l/s turbomolecular pump; maintaining the VE’s reputation for quick
pump down. Options abound for this evaporator system. Consult factory
for more information.
Price $175,500
Specifications
Vacuum System
- Bell Jar: Stainless Steel 24" dia (optional height)
- High Vacuum Pump: 1,000 l/sec turbomolecular pump
- Roughing Pump: 14.6 cfm 2-stage, direct drive rotary
Pressure Instrumentation
- High Vacuum: Digital ionization gauge
- Low Vacuum Digital convection gauge
Evaporation System
- Source: Rotary four pocket HCR e-Gun 7cc crucibles
- Power: 6KW Switch mode power supply
- Positions:XY beam sweep controller
- Monitoring: Inficon XTC3 rate cntroller with quartz crystal head
- Source Shutter: Pneumatically actuated and controlled by XTC
Utilities
- Electrical: Consult Factory
- Water:
Consult Factory
- Air:
Consult Factory
Hardware
- Cabinet: Tubular steel frame with casters, side panels, and
Formica top
- Dimensions: 60" x 40"
- Hoist: Standard
VE Options:
Dry scroll pump upgrade
For VE-90, 100, and 180 add $6,500
For VE-240 add $10,000
Source Upgrades
Thermal Evaporation:
- 1kVA dual switch selectable sources Add: $4,560
- 2kVA dual switch selectable sources Add: $5,150
- 2” Sputter source with 500W DC sputter supply with single channel gas flow controller. Add: $14,500
- 2” Sputter source with 600W RF supply and autotune matching network with single channel gas flow controller. Add: $20,500
Substrate Fixturing
- Single holder, Static. Holds 4 each 1"x2" glass slides or one 4" OD substrate. Add: $1,500
- Water cooled single static holder. Holds 4 each 1"x2" glass slides or one 4" OD substate Add: $1,950
- Rotating single sample holder Holds 4 each 1"x2" glass slides or one 4" OD substrate, includes motorized feedthrough with controller and quick release coupling. Add: $2,800
- Rotating single sample holder with heating. Holds 4 each 1” x 2” glass slides or one 4” OD substrate. Includes motorized feedthrough, heater, and LPS series heater power supply/controller. Sample heating to 800o C. $41,000
Controls Option
PLC based menu driven controller to control system and deposition process. Add: $37,500
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