High Capacity Multiple Crucible Linear e-Guns™

The HCL series linear e-Gun™ is an all metal-sealed e-Gun. Available in 3, 4, 5 plus crucible versions, the source allows sequential deposition of up to 5 plus materials. Standard mounting is on a 12" O.D. CF flange and includes auto indexer and all mechanical and electrical connections. Mounting on a 10" O.D CF flange on 15cc and smaller.

HC-Linear overall-cleaned

UHV Compatible

  • Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.
  • 270° Beam Deflection
  • The filament is completely hidden to ensure maximum protection from shorting caused by stray particles.
  • Easy Filament Replacement
  • A filament alignment tool maintains critical filament tolerances during emitter assembly allowing quick and accurate filament replacement.
  • Permanent Magnet Beam Positioning
  • The primary beam position is controlled by a permanent magnet; electromagnets are used only for precise positioning and beam sweep.

Specifications

  • Maximum Power 15 kW
  • Emission Voltage -6 to -15 kV
  • Emission Current 0 to 1 A
  • Filament 700 W
  • E-Beam Deflection 270°
  • Beam Spot Size Approximately .25" diameter tight beam
  • Evaporation Rate 1 gram/min @ 10 kW, 36,000 Å/min Al @ 10" (250 mm) source-to-substrate distance
  • Water 3 gpm, 25 psi pressure differential
  • Crucible Material OFE copper
  • Bakeout Temperature 230°C

Crucible volume options:

  • 7cc, 15cc, 25cc, 40cc, and 75cc.
  • Custom HCL series crucible sizes and configurations available upon request.

Example models here:

Part Number Description
HCL-1025-3/XXX 10kW HC series three (3) pocket e-Gun™ 25 cc crucible
HCL-1025-4/XXX 10 kW HC series four (4) pocket e-Gun™ 25 cc crucible
HCL-1025-5/XXX 10kW HC series five (5) pocket e-Gun™ 25 cc crucible
HCL-1040-3/XXX 10kW HC series three (3) pocket e-Gun™ 40 cc crucible
HCL-1040-4/XXX 10kW HC series four (4) pocket e-Gun™ 40 cc crucible
HCL-1040-5/XXX 10kW HC series five (5) pocket e-Gun™ 40 cc crucible
HCL-1575-3/XXX 15kW HC series three (3) pocket e-Gun™ 75 cc crucible
HCL-1575-4/XXX 15kW HC series four (4) pocket e-Gun™ 75 cc crucible
HCL-1575-5/XXX 15kW HC series five (5) pocket e-Gun™ 75 cc crucible
CURRENT_HCL_e-GUN(TM)_25cc_40cc_75cc_4-POCKET_12.0_O.D._SOURCE_FLANGE_MOTORIZED

Call or email with your requirements and for current pricing.

800.962.2310 / sales@thermionics.com