Thermionics research capacity series, 3 kW single and multiple-crucible linear e-Guns provide enhanced beam stability and efficient XY sweep with full crucible coverage.  The plug-in emitter and sweep coil assemblies make the e-Gun source easier to service.  Automatic positioning available with the auto-indexer, sold separately.

RC Series 3kW Single Crucible e-Guns™

Thermionics research capacity series single crucible e-Gun provides enhanced beam stability and efficient XY sweep with full crucible coverage. The included plug-in emitter and sweep coil assemblies make the e-Gun source easier to service.

RC Series 3 kW Multiple Crucible Linear e-Guns™

Thermionics research capacity series, 3 kW multiple-crucible linear e-Guns, provides enhanced beam stability and efficient XY sweep with full crucible coverage and are available with automatic positioning with the auto-indexer, sold separately.

RC Series 3 kW Multiple Crucible Rotary e-Guns™

The new Thermionics research capacity series, 3 kW multiple-crucible rotary e-Guns™, provides enhanced beam stability and efficient XY sweep with full crucible coverage with automatic positioning available with the auto-indexer, sold separately.

3 kW Rod-Fed e-Guns™

The 3 kW rod-fed e-Gun uses evaporant source material in the form of a rod up to 3/8" in diameter, which is fed continuously into the crucible using an external linear feedthrough. Film thickness may be controlled using a rate monitor and are available mounted on various flanges.

3 kW Compact Source e-Gun™

Our compact source protects the emitter from damage and shorting during installation and service. The H2O cooling system enhances heat transfer, thus increases rate stability and prevents damage to the e-beam source. This compact source is designed for easy installation.