Feedthroughs

Rotary Motion Feedthroughs

Thermionics Northwest manufactures a full line of metal sealed rotary motion feedthroughs. These feedthroughs are designed and manufactured to the highest standard of quality and care in the industry. Our design is conservative, utilizing the same principles as those of our precision feedthrough line. We use welded bellows and all ball bearing construction.

Custom shaft lengths and shaft extensions are available.

1/4″ Shaft Rotary Feedthroughs

FRM-133-25 Rotary Feedthrough
■ 1/4″ O.D. output shaft
■ Bellows sealed
■ Maximum bakeout temperature: 200°C
■ 1.33″ O.D. flange with position lock
■ Torque limit: 150 oz-in
■ Maximum speed: 300 rpm
■ Uses 7 ball bearings
■ 2° graduations. 0° to 360°

/MC Mechanical Counter Option
for FRM-133-25
■ 5 digit Veeder Root mechanical counter,
metal case
■ 3.6:1 spur gear drive
■ Adjustable counter orientation
■ 36 counts p er feedthrough rotation
■ Removable for bakeout
■ Retrofit kit allows mounting without breaking vacuum

FRMC-133-25 Rotary
Shutter Feedthrough
■ 1/4″ O.D output shaft
■ 1.33″ O.D mounting flange
■ Bellows sealed
■ Maximum bakeout temperature: 200°C
■ Mechanical torque limit: 150 oz-in
■ This is a coarse positioning device

FRM-133-25/MS Stepping or
/MY Synchronous Motorized
Rotary Feedthrough
■ 1/4″ O.D. output shaft
■ Bellows sealed
■ Maximum bakeout temperature: 200°c
■ Mechanical torque limit: 150 oz-in
■ Maximum speed: 300 rpm
■ With integral motor drive
■ 1.33″ O.D. mounting flange
■ /MS stepping or /MY synchronous motor – 50 oz-in holding torque (higher torque motors available)
■ Low inertia design
■ Manual knob
■ Without motor controller

FRM-133·25/MS/W or /MY/W
Motorized Rotary Feedthrough
■ 1/4″ O.D. output shaft
■ 1.33″ O.D. mounting flange
■ Bellows sealed
■ Manual knob
■ Maximum bakeout temperature: 200°c
■ Mechanical torque limit: i 50 oz-in
■ Maximum speed: 300 rpm
■ High speed worm drive – Self locking – /MS stepping or /MY synchronous motor – 50 oz-in holding torque (higher available)
■ Without motor controller

/MC Mechanical Counter Option
for FRM-133-25/MS or /MY
■ Mounts to rear of stepping or synchronous drive motors
■ Indicates step count. 200 counts/motor revolution – 100 counts on last digit wheel (100 divisions)
■ Maximum motor speed: 2,500 pps
■ 9,999,999 maximum count (50,000 motor revolutions)
■ 5 digit Veeder Root mechanical counter, metal case – 2: 1 ratio gear drive – Adjustable counter orientation – Removes with motor for bake

FRM-133-25/SCC Speed Controlled
Motorized Rotary Feedthrough
with Controller
■ 1/4″ O.D. output shaft
■ 1.33″ O.D. mounting flange
■ Bellows sealed
■ Low inertia design
■ Manual knob
■ Maximum bakeout temperature: 200°C
■ Mechanical torque limit: 150 oz-in
■ Maximum speed: 300 rpm
■ Speed control motor, with controller- 5-95 RPM with 50 oz-in torque standard

Options available:

■ Higher torque motors
■ Different speed ranges
■ Switchable direction

FRM-133-25/PNM Pneumatically
Operated Rotary Feedthrough

■ 1/4″ O.D. output shaft
■ 1.33″ O.D. flange
■ Bellows sealed
■ Torque limit: 150oz-in
■ 90° rotation
■ 180° or 270° rotations available
■ Adjustable stops available

/ACV-24 Air Control Valve Option
for FRM- 133-25/PNM
■ Mounted to feedthrough
■ Valve-to-rotary actuator plumbing
installed
■ Control voltage 24 VDC standard or
per customer requirements
■ With flow controls, both directions

FRM-133(275)-25
■ 2.75″ mounting flange replaces 1.33″
■ All other dimensions remain the same

/CL Custom Length Shaft

 

3/8″ Shaft Rotary Feedthroughs

FRM-275-38 Rotary Feedthrough
■ 3/8″ O.D. output
■ 2.75″ O.D. flange
■ Bellows sealed
■ Position lock
■ Angle dial
■ Uses 8 ball bearings
■ 2′ graduations, 0° to 360°
■ Maximum bakeout temperature: 200°C
■ Torque limit: 1,100 oz-in
■ Maximum speed: 300 rpm

/MC Mechanical Counter Option
for FRM-275-38
■ 5 digit Veeder Root mechanical counter, metal case
■ 3.6:1 spur gear drive
■ Adjustable counter orientation
■ 36 counts per feedthrough rotation
■ Removable for bakeout
■ Retrofit kit allows mounting without breaking vacuum

FRM-275-38/MS Stepping or
/MY Synchronous Motorized
Rotary Feedthrough
■ Direct drive
■ 3/8″ O.D. output shaft
■ 2.75″ O.D. flange
■ Bellows sealed
■ Uses 8 ball bearings
■ Manual knob
■ Maximum bakeout temperature: 200°c
■ Mechanical torque limit: 1,100 oz-in
■ Maximum speed: 300 rpm
■ With integral motor drive – /MS stepping or /MY synchronous motor – 100 oz-in holding torque (higher torque motors available) – Without motor controller – Low inertia design

/MC Mechanical Counter Option
for FRM-275-38/MS or /MY
■ Mounts to rear of stepping or synchronous drive motors
■ Read-out of step count, 200 counts/ motor revolution – 100 counts on last digit wheel (100 divisions)
■ Maximum motor speed: 2,500 pps
■ 9,999,999 maximum count (50,000 motor revolutions)
■ 5 digit Veeder Root mechanical counter, metal case – 2:1 ratio gear drive – Adjustable counter orientation – Removed with motor as an assembly for bakeout- Retrofit kit available

FRM-275-38/SCC Speed Controlled
Motorized Rotary Feedthrough
with Controller
■ 3/8″ O.D. output shaft
■ 2.75″ O.D. flange
■ Bellows sealed
■ Employs 8 ball bearings
■ Low inertia design
■ Maximum bakeout temperature: 200°C
■ Mechanical torque limit: 1,100 oz-in
■ Maximum speed: 300 rpm
■ Speed control motor, with controller – 5-95 rpm with 50 oz-in torque standard

Options available:

■ Higher torque motors
■ Different speed ranges
■ Switchable direction

FRM-275-38/MS/W or /MY/W
Motorized Rotary Feedthrough
■ 3/8″ O.D. output shaft
■ 2.75″ O.D. mounting flange
■ Bellows sealed
■ Manual knob
■ Maximum bakeout temperature: 200°C
■ Mechanical torque limit: 1,100 oz-in
■ Maximum speed: 300 rpm
■ Worm drive – Self locking – /MS stepping or /MY synchronous motor – 50 oz-in holding torque (higher available)
■ Without motor controller

/CL Custom Length Shaft Option
■ Up to 24″

 

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FRMRE Series Rare Earth Rotary Feedthroughs

The rare earth magnetic series single and dual rotary drives are designed to provide exceptional, long life performance. They are UHV compatible and are an excellent option to conventional bellows sealed and other rotary devices. They can be adapted to PLO target clocking and continuous rotation of targets and substrates, as well as applications which require small profiles and high performance.

There are no sliding seals or magnets in vacuum and stray magnetic fields are virtually nonexistent. The in-vacuum armature is made of paramagnetic materials with stainless steel and silicon nitride bearings and is capable of repeated bake-out to 200°C (with magnets removed). Out-of-vacuum bearings are accessible for lubrication and the magnet drive is easily removable.

FRMRE feedthroughs and FRRMRE motor drives are manufactured and protected under one or more of the following patents· 5,514,925

FRMRE-275-38 Rare Earth
Magnetic Rotary Feedthrough
■ 3/8″ 0 .0. rotating shaft
■ 2.75″ 0 .D. mounting flange
■ Manual drive knob with position lock
■ 4,000,000 revolutions before internal bearing service
■ 200°C bake-out (magnetic drive removed)
■ Mechanical torque limit: 150 oz-in
■ Maximum speed: 500 rpm
■ Removable neodymium iron boron magnetic drive for bake-out

/SCC Speed Controlled
Motor Drive with Controller
■ Speed control motor. with controller – 5-95 rpm with 50 oz-in torque standard
Options available:

■ Higher torque motors
■ Different speed ranges
■ Switchable direction

Higher torque drives available.
Stepping motor drive option available.

FRRMRE-275-. 75/.38/SCC
Dual Axis Speed Controlled
Motor Drive with Controller
■ Manual adjustment of 3/4″ diameter shaft
■ Ideal for PLO target gearboxes
■ Speed control motor, with controller for 3/8″ diameter shaft – 5-95 rpm with 50 oz-in torque standard

Options available:

■ Higher torque motors
■ Different speed ranges
■ Switchable direction

 

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Precision Rotary Motion Feedthroughs

Precision rotary feedthroughs are commonly used to define a polar axis for a sample or probe. They provide 360° continuous rotation and are mounted on top of XYZ manipulators and other stages to provide polar axis freedom. They are also used separately where precision angular orientation is needed.

All our precision rotary feedthroughs are all metal sealed, utilizing welded bellows. All ball bearings are stainless steel.

All units have 0.1° resolution minimum. Standard feedthroughs have 1° graduated dials. The fine adjust option utilizes a tangential screw and is calibrated to one minute with a Vernier scale. All have position locks. The maximum acceptable output shaft runout is 0.005″.

These feedthroughs are available with custom output shaft lengths for your specific application. Field-mountable shaft extensions are also available. All are available with optional anti-backlash stepping motor drive.

Motion Specifications
Angular resolution     <0.1 °
Shaft run-out                0.005″
Three seconds with Klinger stage

Readability Specifications
Standard scale          1° graduations
/FA with Vernier      1 minute

FPRM-133-25
Precision Rotary Feedthrough
■ 1/4″ O.D. shaft
■ 1.33″ O.D. mounting flange
■ 0.1° resolution, 1° graduations
■ Position lock
■ Maximum bakeout temperature: 200°C
■ For sample rotation

FPRM-275-38
Precision Rotary Feedthrough
■ 3/8″ O.D. shaft
■ 2.75″ O.D. mounting flange
■ 0.1° resolution, 1 ° graduations
■ Position lock
■ Maximum bakeout temperature: 200°c
■ For sample rotation

Options

/CL Custom Length Shaft
■ Up to 24″, tip-to-flange face

/FA Fine Adjust
■ Utilizes a precision Klinger stage for rotary actuation
■ Resolution <0.1 °
■ Three seconds on Klinger stage

FA/W Fine Adjust Worm Drive
■ Adds a precision worm gear to rotary feedthrough
■ FPRM-275-38 gear ratio 96:1 (standard}, 48:1 , 24: 1 optional gear ratios
■ FPRM-133-25 gear ratio 100: 1 (standard), 50: 1, 25: 1 optional gear ratios

/MS/W Stepping or
/MY/W Synchronous
Motor Drive with Worm Gear
■ Self-locking
■ 50 oz-in holding torque
■ Manual knob

/MS Stepping or /MY Synchronous Motor Drive

 

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Precision Dual Axis Motion Feedthroughs

FRLC-275-0.5 or FRLC-275-1
Precision Rotary Feedthrough
■ With coaxial linear-rotary shaft
■ 3/8″ O.D. outer shaft
■ 1/8″ O.D. inner shaft, micrometer adjust for 1/2″ or 1″ linear travel
■ 9″ shaft length standard
■ 0.1° resolution, 1° graduations
■ Position lock
■ Maximum bakeout temperature: 200°C

FRRC-275 Dual Precision
Rotary Feedthrough
■ With coaxial rotary-rotary shafts
■ 3/8″ O.D. outer shaft
■ 1/8″ O.D. inner rotary coax
■ 360° continuous rotation, both shafts, independent
■ 0.1° resolution, 1° graduations
■ Lockable as dependent or independent rotation
■ Maximum bakeout temperature: 200°C
■ Combines two FPRMs

Options
/FA Fine Adjust Option
■ Utilizes a precision Klinger stage for rotary actuation
■ 0.1° resolution
■ One minute Vernier reading

/CL Custom Length Shaft Option
■ Up to 24″, tip-to-flange face

/MS Stepping or /MY Synchronous Motor Drive

 

Retrofit Shaft Extensions

EXTS-FPRM-25 Shaft Extension
■ Precision 1/4″ O.D. stainless steel shaft
■ Split c lamp attachment to existing shaft
■ Shaft extension length 2″ to 24″, as per customer requirements
■ Simple field installation or removal
■ Mounts to 1/4″ O.D. shaft FPRM- 133, FRM-133-25, FRM-275-25 and others

EXTS-FPRM-38 Shaft Extension
■ Same as above with precision 3/8″ O.D. stainless steel shaft
■ Mounts to 3/8″ O.D. shaft FPRM-275, FRM-275-38 and others

EXTS-FRLC-0.5 Shaft Extension
■ Precision 3/8″ 0 .0. stainless steel tube
■ Includes 1/8″ O.D. center push rod extension with return spring
■ 1/2″ push rod range
■ Split clamp attachment to existing shaft
■ Shaft extension length 3″ to 24″, as per customer requirements
■ Simple field installation or removal
■ Mounts to 3/8″ O.D. shaft FRLC-275-0.5 and others

EXTS-FRLC-1 Shaft Extension
■ Same as above except for 1″ push rod range

EXTS-FRRC Shaft Extension
■ Precision 3/8″ O.D. stainless steel tube
■ Includes 1/8″ O.D. center rotational shaft with end guide bearing
■ Split clamp attachment to existing shaft
■ Shaft extension length 3″ to 24″, as per customer requirements
■ Simple field installation or removal
■ Mounts to 3/8″ O.D. shaft FRRC-275 and others

 

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WOA Series Precision Open Axis Rotary Feedthrough

The WOA rotary feedthrough is an all metal-sealed rotary feedthrough with unique features and exceptional performance.

Open Axis
The top flange does not rotate with the tube. The output tube rotates, but not the top flange.

The feedthrough is hollow through the entire shaft. The output shaft is a 3/4″ diameter tube with a 0.55″ bore clear diameter. The top of the rotary feedthrough has a 1.33″ O.D. flange (2.75″ O.D. optional).

This open axis feature allows a multi-axis feedthrough to be constructed by stacking multiple WOA feedthroughs atop each other and using smaller and smaller output tubes. Unlimited coaxial-linear travel is possible by simply adding the appropriate linear feedthrough to the top of this rotary feedthrough. Continuous coaxial-rotary drives are now simpler and more reliable.

Precision
The WOA feedthrough demonstrates unique rotary precision. Tests confirm resolution of better than 0.003° with a backlash of less than 0.005° for positioning (no torque load) applications.

Readability
Standard scale     1° graduations
/FA with Vernier  1 minute

WOA-550 Clear Axis
Rotary Feedthrough
■ 3/4″ O.D. stainless steel output tube
■ 0.55″ clear axis up through feedthrough

WOA-550-B Precision
Rotary Feedthrough
■ 3/4″ O.D. stainless steel output tube
■ Without clear axis

EXTS-WOA Shaft Extension
■ Precision 3/4″ O.D. stainless steel tube
■ Split clamp attachment to existing shaft
■ Shaft extension length 3″ to 24″, as per customer requirements
■ With end guide bearing, as required
■ Simple field installation or removal
■ Mounts to 3/4″ O.D. shaft WOA and others

Options
/TF-275 Top Flange
■ 2. 75″ O.D. top flange, replacing the 1.33″ O.D.

/FA FineAdjust
■ Utilizes a precision Klinger stage for rotary actuation
■ Three seconds on Klinger stage
■ One minute Vernier reading

/CL Custom Length Shaft
■ 3/4″ O.D.  stainless steel output tube
■ To 24″

/FA/W Fine Adjust Worm Drive
■ Adds a precision worm gear
■ 96:1 (standard), 48: 1, 24 : 1 optional gear ratios

/MS Stepping or /MY Synchronous Motor Drive

 

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Linear Feedthroughs

Thermionics manufactures a full line of metal-sealed linear motion feedthroughs. They are designed and manufactured to a high level of quality. They are all metal, using welded bellows and stainless-steel linear bearings. All manual units are bakeable to 200°C fully assembled. Higher bakeouts may be used with partial disassembly. These feedthroughs are available with a number of custom options. listed below.

Custom shaft lengths and shaft extensions are available.

FLML-133-25 Series
Linear Vacuum Feedthroughs
■ 1/4″ O.D. shaft
■ 1.33″ O.D. mounting flange
■ 1 “, 2″ or 3” stroke
■ Stainless steel bellows sealed
■ Coarse linear actuated
■ Stainless steel linear shaft bearing

Stroke	A	Model Number
1”	7.25”	FLML-133-25-1
2”	8.75”	FLML-133-25-2
3”	10.85”	FLML-133-25-3
Custom shaft length		FLML-133-25-XX

 

FLMR-133-25 Series
Linear Vacuum Feedthroughs
■ 1/4″ O.D. shaft
■ 1.33″ O.D. mounting flange
■ 1″, 2″ or 3″ stroke
■ Stainless steel bellows sealed
■ Rotary actuated. 28 turns/inch. all ball bearing drive
■ Stainless steel linear shaft bearing
■ Includes position indicator

Stroke	A	Model Number
1”	5.6”	FLMR-133-25-1
2”	7.1”	FLMR-133-25-2
3”	9.2”	FLMR-133-25-3
Custom shaft length		FLMR-133-25-XX

FLMM-133 Series
Linear Vacuum Feedthroughs
■ 1/4″ O.D. shaft
■ 1.33″ O.D. mounting flange
■ 1 ” or 2″ stroke
■ Stainless steel bellows sealed
■ Micrometer actuated, 40 turns/inch, preloaded coupling
■ 3″ minimum flange face to probe tip
■ Stainless steel linear shaft bearing

Stroke	A	Model Number
1”	8.69”	FLMM-133-1
2”	12.89”	FLMM-133-2

 

FLMR-133/MS Stepping or /MY
Synchronous Series Motorized
Linear Vacuum Feedthroughs
■ 1/4″ O.D. shaft
■ 1.33″ O.D. mounting flange
■ 1″, 2″ or 3″ stroke
■ Stainless steel bellows sealed
■ Stainless steel linear shaft bearing
■ Stepping motor actuated, 28 turns/inch
■ Integral motor drive

/MS stepping or /MY synchronous motor
100 oz-in holding torque (higher torque motors available)
Without motor controller
Low inertia design

■ Manual knob

Stroke	Model Number
1”	FLMR-133-1/MS or /MY
2”	FLMR-133-2/MS or /MY
3”	FLMR-133-3/MS or /MY

Other strokes available

FLML-133-25/PNM Series
Pneumatically Actuated
Linear Vacuum Feedthroughs
■ 1/4″ O.D. shaft
■ 1.33″ O.D. mounting flange
■ 1 “, 2″ or 3” stroke
■ Stainless steel bellows sealed
■ Stainless steel linear shaft bearing
■ Pneumatically actuated

3/4″ I.D. cylinder
50 to 150 psi air pressure
Stainless steel rod and cylinder with bumpers, both ends

■ Performance (with optional /ACV-24 valve
below): <180 msec from coil energize to
finish of 4″ travel with 80 psi on an
FLM-133-4/PNM with shutter

Stroke	Model Number
1”	FLML-133-25-1/PNM
2”	FLML-133-25-2/PNM
3”	FLML-133-25-3/PNM
As above, but mounted on a 2.75″ O.D. flange

/ACV-24 Air Control Valve Option
for FLM-133-25/PNM series feedthroughs
■ Mounted to feedthrough
■ Valve-to-actuator plumbing installed
■ Control voltage 24 VDC standard or per customer requirements
■ With flow controls, both directions

FLMLQA-133-25-3 FastActing
Linear Vacuum Feedthrough
■ 1/4″ O.D. shaft
■ 1.33″ O.D. mounting flange
■ 3″ stroke, 4 positions, 1″ apart
■ Excellent for sample positioning or indexing
■ Stainless steel bellows sealed
■ Stainless steel linear shaft bearing
■ Position lock
■ With fine adjust

Options
/CL Custom Length Shaft

SMC Stepping or YMC Synchronous Motor Controller

FLML-275-50 Series
Linear Vacuum Feedthroughs
■ 1/2″ O.D. main shaft
■ 2.75″ O.D. mounting flange
■ Up to 15″ stroke or more
■ Stainless steel bellows sealed
■ Push-pull actuated, with adjustable position stop
■ Position lock
■ Linear bushings

Stroke	A	B	Model Number
1”	6.26	1.40	FLML-275-50-1
2”	7.65	1.79	FLML-275-50-2
10”	20.77	4.91	FLML-275-50-10
As above, but mounted on a 2.75″ O.D. flange

NOTE: The probe ( 1/2″ dia.) supports itself beyond the mounting flange. In horizontal operation, depending on stroke, extension
and payload, some deflection may occur.

/FA Fine Adjust Option
■ Knob adjustment
■ 10 turns/inch linear travel
■ Ball bearing mount

 

FLMM-275-50 Series
Linear Vacuum Feedthroughs
■ 1/2″ O.D. main shaft
■ 2 75″ O.D  mounting flange
■ 1 ” or 2″ stroke
■ Stainless steel bellows sealed
■ Micrometer actuated, with pre-loaded micrometer-to-probe coupling
■ Linear bushings

FLMM-275-50 Series
Linear Vacuum Feedthroughs
■ 1/2″ O.D. main shaft
■ 2 75″ O.D. mounting flange
■ 1 ” or 2″ stroke
■ Stainless steel bellows sealed
■ Micrometer actuated, with pre-loaded micrometer-to-probe coupling
■ Linear bushings

Stroke	A	B	C	Model Number
1”	8.20	1.40	4.34	FLMM-275-50-1
2”	10.00	1.79	6.03	FLMM-275-50-2

FLMH-275-50 Series
Hollow Linear Feedthroughs
■ 1/2″ O.D. support tube

Open through unit
1.33″ O.D. flange

■ 2.75″ O.D. mounting flange
■ Up to 16″ linear travel
■ Push-pull linear (12 lb maximum force)
■ Position stop (adjustable) and lock

Stroke	Model No.
1”	FLMH-275-50-1
4”	FLMH-275-50-4
6”	FLMH-275-50-6

/R Reversed Flange Option
■ 1.33″ O.D. flange mounted on vacuum side
■ Liquid or gas feedthrough to mini-flange in vacuum

 

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FLLRE Series Magnetically Coupled Linear-Rotary Feedthroughs

The FLLRE modular magnetic linear-rotary feedthroughs offer exceptional coupling with a small magnetic driver package. The driver is only 2.75″ O.D. and 2″ Jong. It provides more than 150 oz-in of torque and four lbs of linear force. Because of their small size, two drivers can be added together ta double coupling strengths. Linear force can also be enhanced with the addition of the linear driver. The linear driver is a separate module that has been developed for its exceptional linear force.

The FLLRE stainless steel probe tube has a polished I.D. The inside traveler has no magnets, but it is made of magnetically permeable material. The design uses eight all stainless-steel bearings for long life even with repeated bakeout to 200°C (with magnets removed).

Four probe sizes are available- 1/4″, 3/8″, 1/2″ and 3/4″ O.D. The selection of the probe diameter will depend on the travel distance, mass of the sample, and physical constraints of the chamber and related equipment. Please call the factory to discuss your specific requirements.

FLLRE-275 Series
Linear-Rotary Feedthrough
■ 1/4″, 3/8″ and 1/2″ O.D. probe sizes
■ 2.75″ O.D. mounting flange
■ Up to 36′” stroke (1/2″ O.D. probe model)
■ Mechanical torque limit: 150 oz-in
■ Linear force: 4 lbs
■ Eight all stainless steel bearings
■ 200°c bakeout (magnetic drive removed)
■ Removable neodymium iron boron magnetic drive

FLLRE-450 Series
Linear-Rotary Feedthrough
■ 3/4″ O.D. probe size
■ 4.50″ O.D. mounting flange
■ Up to 48″ stroke (3/4″ 0.0, probe model)
■ Mechanical torque limit: 150 oz-in
■ Linear-force: 15 lbs
■ Eight all stainless steel bearings
■ 200°C bakeout (magnetic drive removed)
■ Removable neodymium iron boron magnetic drive

Probe Size	Standard Stroke	Max Stroke	Model Number
¼”	10”	24”	FLLRE-275-10/.25
3/8”	12”	30”	FLLR E-275-12/.38
½”	18”	36”	FLLR E-275-18/.50
¾”	24”	48”	FLLRE-450-24/.75

FLLRE linear-rotary feedthroughs are manufactured and protected under one or more of the following patents 5,514,925

 

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FLLRE Series Magnetically Coupled Linear-Rotary Feedthroughs

FLLRRE Dual
Linear-Rotary Feedthrough
■ Actuates jaws, pincers or other devices requiring dual rotational motion
■ May be used in place of expensive rack and pinion devices

Optional Force Package
Available on all units and recommended for high mass payloads and longer strokes

/LD Linear Magnet Driver
■ Adds a linear magnetic external driver
■ Adds a linear internal traveler
■ Torque: 150 oz-in

/REM Remote Rotary Operation
■ For use on any FLLRE
■ Linear and rotary actuation can be performed from several feet away
■ Allows practical single operator sample transfer

 

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RPLR Series Rack & Pinion Linear-Rotary Feedthroughs

The RPLR series of linear-rotary feedthroughs use a 3/4″ diameter probe. The probe is actuated by a rack and pinion positive drive (rotary bellows sealed feedthrough). The independent rotary actuation is achieved by a second rotary feedthrough. Only the 3/8″ diameter probe tip rotates, keyed with a ball bearing keyway. This allows mounting of jaw-type devices which are actuated by the rotary action. The standard mounting flange is a 2.75″ O.D. rotatable flange. The RPLR is an all position device with position locks on both rotary feedthroughs. All metal construction for bakeability.

This unit is also available as a linear feedthrough only (RPL series).

Rack and Pinion Actuated Linear-Rotary Feedthroughs

Stroke	Model No.
10”	RPLR-.75-10
20″	RPLR-.75-20
30”	RPLR-.75-30
40”	RPLR-.75-40
50”	RPLR-.75-50
60”	RPLR-.75-60

 

Rack and Pinion Actuated Linear Feedthroughs Without Rotary Action

Stroke	Model No.
10”	RPL-.75-10
20″	RPL-.75-20
30”	RPL-.75-30
40”	RPL-.75-40
50”	RPL-.75-50
60”	RPL-.75-60

 

Options

/MC Mechanical Counter – Manual Operation

■ 40 counts per feedthrough rotation (approximately 0.034″ linear travel per count on RPLR)

■ Removable for bakeout

■ Retrofit kit allows mounting without breaking vacuum

 

/MS Stepping or /MY Synchronous Motorized Rotary Feedthrough
for RPLR rotary drive

■ With integral motor drive

■ /MS stepping or /MY synchronous motor drive

■ 50 oz-in holding torque (higher torque
motors available)

■ Low inertia design

■ Manual knob

 

NOTE: The /MS or /MY motor option is suitable for the rotary actuation on an RPLR and the linear actuation when the operation is horizontal. When the linear travel is other than horizontal, the /MS/W option should be used.
We strongly recommend the use of limit switches on this or any other motor drive being used to actuate the linear drive on the RPLR. The limit switch actuator assembly specified below ( or one similar) should be used to protect the RPLR from being overdriven.

 

/MS/W Stepping or /MY/W Synchronous Motorized Rotating Feedthrough

for RPL or RPLR linear drive

■ High speed worm drive

■ Self locking

■ /MS stepping or /MY synchronous motor drive

Supplied with motor

Without controller

■ Capable of driving up to 16″/min minimum at 1,000 pps

■ May be field-mounted without breaking vacuum, or returned to the factory for installation

 

NOTE: This motor drive is self-locking. This is necessary to protect the probe and associated equipment from spinning down if the power is removed from the motor. Because of the self-locking design, the drive can generate significant torque at the FRM, and thus do damage if overdriven.

/RLS-40/MS Rotary Limit Switch Actuator Assembly

SMC Stepping or YMC Synchronous Motor Controller

 

/MC Mechanical Counter – Motorized Operation

■ Mounts to rear of stepping or synchronous drive motors

■ Read-out of step count, 200 counts/motor revolution

100 counts on last digit wheel (100 divisions)

■ Maximum motor speed: 2,500 pps

■ 9,999,999 maximum count (50,000 motor revolutions)

■ 5-digit Veeder Root mechanical counter, metal case

2: 1 ratio gear drive

Adjustable counter orientation

Removes with motor for bakeout

Retrofit kit available

 

/SCC Speed Controlled Motorized Rotary Feedthrough with Controller

■ With integral motor drive

■ Speed control motor, with controller

5-95 rpm with 50 oz-in torque standard

Options available:

Higher torque motors

Different speed ranges (300 rpm max.)

Switchable direction

 

/RRO Remote Rotary Operation

■ For use on long stroke RPLRs

■ Locates a rotary actuator knob near the linear actuator feedthrough

■ Position lock

 

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FLAM Series Push-Pull Linear-Rotary Feedthroughs

The FLRM series of linear-rotary feedthroughs are based on the FLM series push-pull linear feedthroughs. The FLAM mounts on a standard 2.75″ O.D. flange. Other size flange mounts are available. The body length has been increased to provide greater spacing between the linear bearings, and the 1/2″ 0.D. rod replaced with a 1/2″ O.D. tube. An FRM-133-25 rotary feedthrough is mounted on the axis of the 1/2″ tube, providing rotary motion at the probe tip. Linear motion is push-pull against the pressure differential (12 lbs maximum). This unit is an all position device with position locks on both feedthroughs. Strokes of up to 36″ are feasible, dependent upon payload, orientation and acceptable deflection. All metal construction for bakeability.

 

Push-Pull Linear-Rotary Feedthroughs

Stroke	Dimensions		Model Number
	A	B
2”	3.3”	13.3”	FLRM-275-2
4”	4.1”	15.3”	FLRM-275-4
6”	4.9”	17.3”	FLRM-275-6
8”	5.7”	19.3”	FLRM-275-8
10”	6.5”	21.3”	FLRM-275-10

 

Options

ROTARY OPTIONS

/MS Stepping or /MY Synchronous Motorized Rotary Feedthrough

■ With integral motor drive

■ /MS stepping or /MY synchronous motor 50 oz-in holding torque (higher torque motors available)

■ Low inertia design

■ Manual knob

 

/MC Mechanical Counter Option

for /MS or /MY Motorized Rotary Feedthrough

■ Digital read-out of motor drive location

■ Mounts to rear of stepping or synchronous drive motors

■ Read-out of step count, 200 counts/ motor revolution

100 counts on last digit wheel

(100 divisions)

■ Maximum motor speed: 2,500 pps

■ 999,999 maximum count (5,000 motor revolutions)

■ 5-digit Veeder Root mechanical counter. metal case

2:1 ratio gear drive

Adjustable counter orientation

Removes with motor for bakeout

Retrofit kit available

/SCC Speed Controlled Motorized Rotary Feedthrough with Controller

■ With integral motor drive

■ Speed control motor, with controller

5-95 rpm

50 oz-in torque minimum

Options available:

Higher torque motors

Different speed ranges

Switchable direction

/MC Mechanical Counter Option

for /SCC Motorized Rotary Feedthrough

■ Digital read-out of motor drive location

■ 5-digit Veeder Root mechanical counter, metal case

■ 4.1 ratio bevel gear drive

■ Adjustable gear lash

■ Adjustable counter orientation

■ 40 counts per feedthrough rotation

■ Removable for bakeout

 

LINEAR OPTIONS

/LFA Fine Adjust

■ 10 threads/inch

■ Ball bearing support

■ Suitable for use up to 6″

Requires longer housing on longer travels

 

/LFA/MS/W Stepping or /LFA/MY/W Synchronous Motorized Fine Adjust

■ /MS stepping or /MY synchronous motor

■ Worm drive

■ Ball bearing support

■ With manual knob

■ Suitable for use up to 6″

Requires longer housing on longer travels

 

FLLM-275-2F-1 Linear/Linear Coaxial Feedthrough

1st LINEAR

■ 2″ linear travel

■ Linear travel via thread/collar adjust

■ Position lock

■ 1/2″ 0 .D. support tube, bearing/bushing mount

■ Adjustable travel limit

2nd LINEAR

■ 1″ linear travel

■ Rotary adjust

■ Linear ball bearing nose support

■ Eight lb force maximum

■ Uses FRM-133-25 rotary feedthrough

■ Position lock

■ Custom shaft lengths on both linear probes

 

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Wobble Sticks

PNS series wobble stick probes supply a combination of Z axis, polar rotation, and polar axis tilt to allow tip positioning inside the vacuum chamber. They can be fitted with clamp jaws, hooks, or forks to attach and release samples. The user can specify the required Z travel.

 

FWS-15-275-1 Wobble Stick

■ 3/8″ O.D. shaft

■ 2.75″ O.D. mounting flange

■ ±7.5°angular range

■ 1″ linear travel (on axis)

■ Without fork

 

FWS-44-275-1 Wobble Stick

■ ±22° angular range

■ 1″ Z stroke

■ Independent bellows for Z and θ

■ Special spherical bearing mount

■ Z travel position lock

■ Includes tip fitted with hook, per customer requirements

 

FWS-44R-275-2 Wobble Stick

■ ±22° angular range

■ 2″ Z stroke

■ Independent bellows for Z and θ

■ Special spherical bearing mount

■ Z travel position lock

■ 360° probe rotation via FRM-133-25

Removable unit

■ Includes tip fitted with hook, per customer requirements

 

FWS-44R-275-2/P Wobble Stick

■ ± 22° angular range

■ 2″ Z stroke

■ Independent bellows for Z and 8

■ Special spherical bearing mount

■ Z travel position lock

■ 360° probe rotation

■ Includes push knob with 0.20″ of linear actuation

■ Order pincer below

 

Pincer Options

Thermionics Northwest offers a variety of pincers for your application. Custom pincers can be supplied on request.

/PW Standard Single Jaw Pincer

■ Single jaw action

■ Suitable for thin wafers

/PDME DME Single Jaw Pincer

■ Single jaw action

■ Handles DME rectangular platens

/PO Omicron Single Jaw Pincer

■ Single jaw action

■ Handles Omicron brand platens

/POE Omicron Double Jaw Pincer

■ Handles Omicron brand platens

■ Edge grip double jaw action

/PS Special Pincer

 

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BPLR Baseplate Linear-Rotary Motion Feedthroughs

BPLR Linear-Rotary Baseplate Feedthrough

■ Differentially pumped Viton O-ring sealed linear-rotary action

■ Linear travels to 24″

■ 1/4″ o.o. shaft

With clamp type stop collar

Hand knob

■ Baseplate mount

For 1″ I.D. hole

Maximum baseplate thickness: 1″

■ Stainless steel construction

■ Teflon body insert

 

High Vacuum Push-Pull Linear-Rotary Feedthroughs

Elastomer-sealed

Stroke	A	Model Number
10”	15”	BPLR-10
14”	19”	BPLR-14
20”	25”	BPLR-20
24”	29”	BPLR-24

 

High Vacuum Push-Pull Linear-Rotary Feedthroughs

Elastomer-sealed 2.75″ 0 .0. mounting flange with VCR-type differential pumping port

Stroke	A	Model Number
10”	15.2”	BPLR-275-10
14”	19.2”	BPLR-275-14
20”	25.2”	BPLR-275-20
24”	29.2”	BPLR-275-24

 

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SLJ Series Locking Jaw Systems

The SLJ series systems allow for sample handling by simply gripping the sample or sample carrier with a jaw. The jaw has a capacity of over 1/2″ thick and has a 1/2″ deep throat. The jaw can easily generate over 20 lbs of clamping force. The jaw opens and closes under positive control, maintaining a constant centerline. This allows samples of various sizes and shapes to be handled with one gripper.

Gentle jaw assemblies for specific sample systems also available.

Features

■ Handles various sample shapes and sizes

■ Easily adapts to magazine multiple loading

■ Grips with clamping force

 

Transfer Requirements for Actuation

Transfer probe requirements are a nonrotating probe with respect to a rotary-coaxial shaft. This action is supplied by:

■ RPLR series rack and pinion linear-rotary feedthroughs

■ FLRM series push-pull linear-rotary feedthroughs

■ EMT series translators with rotary feedthroughs

Transfers of up to 80″ can be obtained without intermediate support.

All the above systems can use a quick access door load lock chamber and tilt stages for precise alignment.

 

SLJ-0.75 Sample Jaw

■ Up to 3/4″ thick sample

■ Jaw depth: 3/4″

■ Minimum gripping force: 25 lbs

■ With swivel jaw pads

■ Requires RPLR or similar linear-rotary feedthrough to operate

■ Stainless steel construction

■ Will pass through a 1.39″ I.D. tube

 

SLJ-0.25 Sample Jaw

■ Up to 1/4″ thick sample

■ Jaw depth: 3/4″

■ Minimum gripping force: 4 lbs

■ With swivel jaw pads

■ Spring g rip/cam release

■ Requires RPLR or similar linear-rotary feedthrough to operate

■ Stainless steel construction

■ Will pass through a 1.39″ 1.0. tube

 

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Sample Mounting

Thermionics sample mounts provide platen-based support for customer samples. They interface with the supporting structure (rod, gearbox, etc.) and provide mechanical support for the sample. All standard sample mounts provide the following:

■ Removable platen

■ Clip sample restraint

■ Electrically-isolated platen

A wide variety of options or modifications are available for the sample mount to obtain the customers· exact requirements. They include:

■ Sample Heating

Resistive

Standard

Nude filament

PBN

Quartz lamp

e-Beam

■ Sample Cooling

Direct LN

Indirect LN

Water

■ Sample transfer

■ Sample bias, RF

 

SMRSERIES

SMR-1 Sample Mount

■ 3/8″ shaft or gearbox mounting

■ “0” sample face offset to 4″ offset. Per customer requirements

■ Sample orientation per customer requirements

■ 1″ diameter sample area, 1.4″ diameter sample plate

■ Clip sample mount

■ Removable sample plate, electrically isolated

 

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UHV Environment Heater Options

The following heating options may be mounted to the SMR sample mounts.

/HR-1 Radiant Resistive Heater

■ Maintains electrical isolation

■ Moly sample plate with three sample clips

■ With all necessary feedthroughs. atmosphere side connectors, internal wiring, temperature thermocouple, and spare filaments

■ Temperatures up to 1,000°c depending upon application

/HRN-1 Nude Filament Radiant Resistive Heater

■ Maintains electrical isolation

■ Moly sample plate with three sample clips

■ With all necessary feedthroughs, atmosphere side connectors, internal wiring, temperature thermocouples, and spare filaments

■ Temperatures up to 1.200°C depending upon application

/HRD Intrinsic Resistive Heater

■ Modifies STLC platen for direct heating

■ Moly sample plate with two power supply clips

■ Sapphire sample electrical isolation

■ With all necessary feedthroughs, atmosphere side connectors, internal wiring, and STLC moly platen

/ERH-0.6-1200 Electron Beam Enhanced Resistive Heater

■ 0.6″ O.D. sample size

■ 1,200°C maximum temperature

■ Low power filament (approx. 40 watts)

■ Suitable for 500 VDC biasing

■ With all necessary atmosphere side connectors, internal wiring, temperature thermocouples and spare filaments

■ Tungsten, moly, tantalum, alumina and stainless-steel construction

/HEB Electron Beam Heater

■ Moly sample plate with three sample clips

■ Electrically-grounded sample plate

■ With all necessary feedthroughs, atmosphere side connectors. internal wiring, temperature thermocouples and spare filaments

■ Temperatures up to 2,000°C depending upon application

 

NOTE: The performance ratings are for specific applications, generally without sample cooling or sample transfer Depending on parameters such as sample size, temperature requirements, and motions involved. coaling of the substrate or heater framework may be required. Please consult factory for your specific application.

 

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Oxygen or Chemical Vapor Environment Heater Options

The following heating options may be mounted to the SMR sample mounts.

/SHQ-2 Radiant Quartz Lamp Heater*

■ For 2” O.D. (standard) maximum sample size (optional sizes to 5″ O.D.)

■ Electrically-isolated sample

■ Haynes alloy sample plate with three sample clips

■ Best temperature uniformity: 1″ O.D.

■ Maximum temperature: 700°C continuous 1,000°C peak

■ Utility requirements

Thermionics model SPS-232/M or SPS-232/A

0 to 110 VAC, 8A variable power supply

Requires 0.5 gallons per minute water cooling

■ Maintains electrical isolation

■ Comes mounted to 2.75″ O.D. and support shaft up to 24″ long , per customer requirements, dual bakeable electrical feedthroughs, re-entrant metal seal dual cooling feedthrough and all necessary atmosphere side connectors

■ Supplied without thermocouples

/GS Gas Shower Ring Option

■ For chemical vapor (CV) applications

■ Extends thermal shield above sample plane

■ Single gas shower ring, stainless steel construction

■ Gas ring clamped to heat shield

/SA Shutter Assembly Option

■ For evaporation or sputter applications

/PBN-1 Radiant Resistive Pyrolytic Boron Nitride Heater *

■ Heating to 1,200°C in UHV

■ Heating to 800°C in oxygen environment without heater degradation

■ Maintains electrical isolation

■ Includes all necessary feedthroughs, atmosphere side connectors, and internal wiring

■ Heater outgassing above 1,100°C

 

*Warning

Operations involving enriched oxygen environments can be hazardous, including explosive Many materials commonly considered non-hazardous become dangerous in such environments. Simple mechanical pumps using oil can explode. putting both personnel and equipment at great risk. Many other common materials will react violently to oxygen. The SHQ series heater has not been tested in enriched oxygen environments and is not intended for that use We recommend systems utilizing enriched oxygen environments be undertaken only by those properly skilled to perform such operations in a safe and cautious manner.

 

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Heating and Cooling Accessories

ACS-CR Copper Rope

■ Approximately 1/8″ O.D.

■ OFE copper

■ Suitable for UHV cooling transfer

■ Available in custom lengths

ACS-TS Tantalum Screws

■ Manufactured from tantalum/rhenium

■ 0-80 screw size

■ 3/16″ tip to head base

■ Filister head

Other sizes available. Contact us.

ACS-Ag Silver Plated Screws

■ 300 series stainless steel screws

■ Plated with silver

■ Resists galling

■ Improves heat transfer

■ Available in all standard screw sizes and head types

■ Vented or unvented

ACS-SVS Slot Vented Screws

■ 300 series stainless steel screws

■ Vent cut through screw threads and base of head

■ Allows pumpout of each thread

■ Available in all standard screw sizes and head types

SMRHR-HS Heater Spares Kit

■ Two replacement tungsten filaments

■ Replacement ceramic insulators

 

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LN₂ Sample Cooling Options

The following cooling options may be added to the SMR sample mounts.

LN₂ Sample Cooling

There are two basic methods of cooling samples using LN₂ for vacuum application, direct cooling and indirect cooling.

In most cases direct contact of the LN₂ Dewar with the sample achieves the highest rate of heat transfer and the most rapid cooling to the lowest temperature. If the sample is mounted to a goniometer head or precision gearbox. the plumbing of the LN₂ to the Dewar can restrict the motion. In such cases a clamping Dewar may be considered.

A clamping Dewar can allow certain degrees of freedom. such as continuous rotation, and still achieve maximum cooling. A heated rotating sample can be cooled by stopping the motion and activating a Dewar that clamps to the sample platen.

The indirect cooling method cools the sample by conduction through a flexible copper rope to a remote LN₂ Dewar. The copper rope can be an effective means of cooling. Sample motion and temperature are restricted by the length and number of copper ropes used to achieve the desired level of cooling.

The ability of a cooling system to cool the sample to its lowest temperature is limited by many factors: Direct versus indirect cooling, size of sample, sample heating attachments, limitations required by goniometer, number of copper ropes used. sample transfer requirements, electrical isolation requirements of the sample. and the ability to use a clamping Dewar.

 

Time-Temperature Test ■ SMR-1 sample mount ■ Resistive heating ■ Direct cooling ■ Screw platen attachment	Time-Temperature Test ■ STLP-1 sample transfer ■ Molybdenum platen ■ Indirect cooling 2” x 6″ copper rope Copper Dewar 8″ x 1/8″ feed lines

 

Dewar Materials

Dewars are fabricated from composite. explosively-bonded OFE copper to stainless steel. This material is formed in an explosive process that creates a high quality metallurgical bond . A high explosive charge compresses the copper and stainless plate material at supersonic speeds and at extreme pressures forming a plasma at the contact point. The plasma scours the surfaces to molten conditions as the plates collide and instantaneously cool. The resulting knitted mechanical bond of copper-to-stainless has excellent mechanical and thermal properties for UHV LN₂ Dewar applications.

Dewars fabricated of this composite material allow LN₂ to flow in contact with high thermal transfer capacity copper, with stainless steel plumbing (TIG welded) to the stainless steel side of the bonded Dewar. No brazing is required reducing the possibility of contamination and virtual leaks.

 

Dewar Design

Dewars have an internal phase separator that maximizes thermal transfer. The liquid LN₂ contacts the copper and is allowed to boil. releasing nitrogen gas that is separated and allowed to escape. This technique maximizes contact of the copper with the liquid and keeps boiled-off nitrogen gas (a poor thermal transfer medium) away from the copper heat transfer surfaces. This dramatically lowers the temperature of the Dewar and increases its capacity for thermal transfer.

True OFE copper rope is clamped to the copper side of the Dewar tor indirect cooling to the sample.

A 1.33″ CF re-entrant seal, with plumbing made to length, may be used to connect the Dewar to the atmosphere side of the LN source. The welded plumbing connected to the re-entrant seal eliminates the need for in-vacuum fittings and possible leaks. All Dewars are helium leak-tested at LN₂ temperatures prior to shipping.