EMX Series

EMX series XYZ manipulators accommodate 2.53" and 4.00" I.D. bellows, up-to 36" stroke and up to 65 pounds of payload capacity.

emx450-thumb

Features

  • Hardened X & Y cross roller guides
  • 0.500" O.D. hardened stainless steel Z guide rods
  • Hardened stainless steel linear bearings
  • X micrometer location interchangeable
  • Aluminum stage construction
  • Stainless steel only material exposed to vacuum
  • Maximum bakeout temperature: 200°C

Specifications

Base Flange O.D. Bellows
I. D.
Travel
Flange
Z Travel Model No. (2" Z example)
4.5" 2.5" 2.75" 2-36" EMX-B450C-T275T-2.5-1-1-2
4.5" 2.5" 4.5" 2-36" EMX-B450C-T450T-2.5-1-1-2
4.5" 3.0" 2.75" 2-36" EMX-B450C-T275T-3.0-1-1-2
4.5" 3.0" 4.5" 2-36" EMX-B450C-T450T-3.0-1-1-2
6" 2.5" 2.75" 2-36" EMX-B600C-T275T-2.5-1-1-2
6" 2.5" 4.5" 2-36" EMX-B600C-T450T-2.5-1-1-2
6" 3.0" 2.75" 2-36" EMX-B600C-T275T-3.0-1-1-2
6" 3.0" 4.5" 2-36" EMX-B600C-T450T-3.0-1-1-2
8" 2.5" 2.75" 2-36" EMX-B800C-T275T-2.5-1-1-2
8" 2.5" 4.5" 2-36" EMX-B800C-T450T-2.5-1-1-2
8" 3.0" 2.75" 2-36" EMX-B800C-T275T-3.0-1-1-2
8" 3.0" 4.5" 2-36" EMX-B800C-T450T-3.0-1-1-2
 
 
Precision
Axis Micrometer
Graduation
Resolution Repeatability Backlash Adjustment
X-Y 0.001" <0.001" <0.00015" <0.00015" Standard
Micrometer
Z 0.0005" <0.0005" 0.0005" 0.0007" Knob Adjust
X-Y 0.0001" <0.0001" <0.00015" <0.00015" Optional
Large Micrometer
 
X & Y Axes
  • ±0.5" X and Y travel, circular pattern, preloaded micrometer-to-stage coupling, 0.001" micrometer divisions
  • ±0.5" X and Y travel - Large micrometers with 0.0001" divisions optional
  • ±1" X and Y travel available as an optional in standard and large micrometer sizes
  • Micrometers bakeable to 200°C

Z Axis

  • 2" -36" acme Z travel, 0.100"/turn knob adjust
Options
 

6" Base Flange with 5 Mini-Ports Model No: -B600MC

  • Change base flange to 6.0" O.D. with 5 mini-ports
  • This option may only be ordered with the 1.39" I.D. bellows

Motorization

  • Stepping or Synchronous Motor Drive options available

Call or email with your requirements and for current pricing.

800.962.2310 / sales@thermionics.com