Description

Hanks HM² e-Gun™

Our High-Efficiency Hanks HM² e-Guns™ provide patented and award winning modular magnet beam focusing system with enhanced beam collimation, eliminating beam curl.

HM² e-Guns™ are also 2/3 the size of standard e-Guns and 350% more efficient magnetically.

Features:

• Optimized emitter and sweep coil assemblies
• Eliminations of pole pieces – vertically mounted magnets results in less magnetic flux
• 0-200 Hz sweep, repeatable, uniform evaporation, no “tunneling” and source material eruptions
• Precise and stable evaporation rates as low as 1-2 A/sec
• 35% smaller than traditional evaporation sources with equivalent volume, evaporation rate and power capacity
•  Available in HV [2×10^-9 Torr] and UHV [2×10^-11 Torr]
• Ideal for sequential or co-evaporation
• Power Supplies, Crucible Liners and other Accessories available

Models:

• Single

   — 7 cc to 156 cc single crucible / 1 emitter – 6-20 kW

• Single Rotary

   — 7 cc to 25 cc – 4 crucible / 1 emitter – 6 & 10 kW

• Twin™

   — 10 cc, 15 cc, 40 cc – 2 crucible / 2 emitter – 10 & 15 kW

• Triad™ 

  — 10 cc, 15 cc, 40 cc – 3 crucible / 3 emitter – 6 & 10 kW

• Quadra

  — 10 cc, 15 cc, 40 cc – 4 crucible / 4 emitter – 6 & 10 kW

• Hydra-1™

   — Single array of 5 crucibles / 1-3 emitters (see Hydra description below for more details)

• Hydra-2™

   — Dual array of 5 crucibles / 1-3 emitters, totaling 10 crucibles / 2-6 emitters (see Hydra description below for more details)

Hanks HM² e-Guns are manufactured and protected under one or more of the following patents: 4,835,789; 4,891,821; 4,947,404

Hanks HM² Hydra e-Gun™

Our innovative Hanks HM² Hydra design consists of one (1) or two (2) compact array(s) of crucibles and emitters which translate linearly with respect to each other to provide for the co-deposition of up-to six different materials simultaneously.

The Hydra configuration’s efficient utilization of space allows for four (4) different combinations of six crucibles and up to forty-two permutations of two-metal combinations, are available for co-deposition in a single vacuum pumpdown.

The Hydra eliminates adjacent source interactions without complex beam directions and bulky field shunting components. Thus, the co-evaporation design allows close source proximity for uniform coating and material interaction. Additionally, individual water cooling for each source prevents steam build-up and the inclusion of separate sweep coils for each source and promotes the total independence of the operation parameters of each source from the adjacent source.

Hydra-1 & 2 Specifications

Power Supplies:

For 10 kW model: 6kW+ e-Gun™ Power Supply

For 15 kW model: 12kW e-Gun™ Power Supply

e-Guns™ Additional Details