Description

XY Stages

Thermionics XY stages provide precise 2-axis positioning.  They can be combined with Z, ZB and ZC series linear translators for complete dual bellows XYZ manipulation.

Features

• Precision cross-roller bearings
• X micrometer location interchangeable
• Aluminum stage construction
• Stainless steel only material exposed to vacuum
• All position operation
• Maximum bakeout temperature: 200°C

OPERATION NOTE: Some models require a horizontal-mounting package, sold separately.

Specifications

Bellows I.D.

• 1.39″–6.3″ I.D. bellows available

X & Y Axes

• ±0.5″ or ±1.0″ X & Y travel, circular pattern
  • Preloaded micrometer to stage coupling, 0.001″ micrometer divisions, small micrometers (on 1.39″ bellows I.D. models)
  • Preloaded micrometer to stage coupling, 0.0001″ micrometer divisions, large drum dial micrometers (on 2.00″ through 4.00″ bellows I.D. models)

Base Flange

• Standard base flange is clearance, tapped is optional except on large bore XY models where tapped is required.

Traveling Flange

• Standard traveling flange is tapped, clearance is optional except for large bore XY models.

Ordering Information

Dimensions in inches

Options

XY Micrometers, ±0.5″ Travel

• Large micrometers with 0.0001″ divisions
• Set of two

XY Micrometers, ±1.0″ Travel

• Large micrometers with 0.0001″ divisions

Horizontal Mounting Package

• Larger base flange, as required
• Oversized guide rods, as required
• Modified travel limit
• Two force spring assemblies, custom force level based on customer payload