HCF Series 6 kW+ e-Guns™
The HCF series e-Gun™ is a single crucible all metal-sealed high-capacity e-Gun. Available in three standard mounting configurations: PyraFlat or CF type flanges, a 1" diameter bolt-type mount, or with no mounting flange.
270° Beam Deflection
The high capacity series of e-Guns incorporates a proven 270° electron beam deflection system. The filament is hidden below and out of the line-of-sight of the crucible. This prevents ion erosion and provides maximum protection from shorting caused by stray particles or condensate.
Long Life Emitter Assembly
The 270° electron beam deflection design has been enhanced with a new and improved emitter assembly.
Easy Filament Replacement
The emitter assembly design makes removal or replacement of the filament fast and easy. A filament alignment tool maintains critical filament tolerances, allowing quick and accurate filament replacement.
Permanent Magnet Beam Positioning
Primary beam position is controlled by a permanent magnet. Electromagnets are used for precise positioning and beam sweep.
Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.
|Maximum Power||10 kW|
|Emission Voltage||-6 to -10 kV|
|Emission Current||0 to 1 A|
|Beam Spot Size||.25" diameter, tight beam|
|Evaporation Rate||1 gram/min @ 10 kW, 36,000 Å/min Al @ 10" (250 mm) source-to-substrate distance|
|X and Y Sweep||Longitudinal and lateral control up to 200 Hz when operated with Thermionics sweep controller|
|Water||3 gpm, 20°C, 50 psi pressure differential|
|Crucible Material||OFE copper|
|Bakeout Temperature||230°C (446°F)|
Each e-Gun is available in three standard mounting configurations:
- e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
- e-Gun with a 1" diameter bolt-type mount, which mounts through a 1" diameter hole, and is sealed by a compression O-ring
- e-Gun alone with no mounting flange
Please specify the mounting configuration at the time the order is placed; the costs may not include the bolt-type or flange-type mount.
Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
|HCF1007||7 cc single crucible|
|HCF1015||15 cc single crucible|
|HCF1025||25 cc single crucible|
|HCF1040||40 cc single crucible|
SPARE PARTS KIT
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