Precision Parts Cleaning

We specialize in decontaminating, refurbishing, and cleaning OEM process tool components for the following applications:

  • Physical Vapor Deposition (PVD)
  • Chemical Vapor Deposition (CVD)
  • Etch
  • Ion Implant
  • Thin Film
  • Metrology
  • Photo Lithography

TMPI's reputation for excellence rests on over 50 years of Ultra High Vacuum expertise. 


Processes meeting or exceeding the most stringent industry requirements

  • Class 100 Clean Room
  • In-House Laboratory
  • Surface Analysis
  • ISO 9001:2008

Refurbishment Services (outsourcing certain services)

  • CO2 Cleaning 
  • Twin Wire Arc Spray (TWAS)
  • De-burring
  • Decontamination
  • Fabrication and Spares

Analytical Services

  • Liquid Particle Count
  • Non-Volatile Residue
  • SEM

On Site Laboratory

  • Trace Metals
  • Ionic Testing
  • Surface Analysis
TMPI 3 Pics

Quality Policy

It is the policy of TMPI to meet or exceed our customers' requirements and expectations of performance, quality, service, satisfaction, and delivery.

We promote within and are committed to adhering to the requirements of ISO 9001:2008 through the establishment, maintenance, and continual improvement of our Quality Management System.


3118 Depot Road
Hayward, CA 94545
Phone: 510-786-0680
Fax: 510-786-0178


Thermionics Metal Processing, Inc.