RCRF Series 3 kW Rod-Fed e-Gun

The 3 kW RCRF Series rod-fed e-Gun uses evaporant source material in the form of a rod up to 3/8" in diameter, which is fed continuously into the crucible using an external linear feedthrough. Film thickness may be controlled using a rate monitor and are available mounted on various flanges.

ROD-FED_e-GUN(TM)_.25_O.D._ROD_WITH_MANUAL_SOURCE_SHUTTER

UHV Compatible

Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.

Mounting and Configurations

  • The 3 kW rod-fed e-Gun may be mounted and operated in any orientation, including upside down (which is material dependent)
  • The rod-fed e-Gun shown in the photo can fit through a 2.5" O.D. tube
  • An optional cryoshroud to surround the e-Gun is available
  • Multiple rod-fed e-Guns can be mounted side-by-side
  • Custom designs are available, please consult the factory

Knudsen Cell Replacement

e-Guns can evaporate difficult materials, ie.: carbon, niobium, and silicon.

A rod-fed e-Gun, complete with all the necessary utility and mechanical feedthroughs, installed on a 4.5" O.D. ConFlat mounting flange, is available as a direct replacement for existing Knudsen cell furnaces on Varian/Intevac, Perkin-Elmer, Riber, EPI and VG systems.

Please call to discuss your specific application requirements.

Specifications

 Feature  Specification
Operating Pressure Below 5 x 10-5 Torr is desirable for best operation; fully UHV compatible design
Beam Voltage 4,000 V
Beam Current 0–750 mA
continuously variable
Maximum Power 3 kW @ 4 kV
Cooling Water 1/2 gpm
Maximum Bakeout
Temperature
230°C (446°F)
Feedthrough
Requirements
Two 7 kV 50 A
Crucible Volume 1/4" or 3/8" diameter rod
e-Gun Size 2.25" diameter x 2.95" L

 

Mounting Configurations

Each e-Gun is available in three standard mounting configurations:

  • e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
  • e-Gun with a 1" diameter bolt-type mount, which mounts through a 1" diameter hole, and is sealed by a compression O-ring
  • e-Gun alone with no mounting flange

Please specify the mounting configuration at the time the order is placed; the costs may not include the bolt-type or flange-type mount.

Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.

Ordering Information

Model No. Description
RCRF0325 Rod-fed e-Gun only
RCRF0325/SK Rod-fed e-Gun with all utility, electrical and mechanical feedthroughs
 

Call or email with your requirements and for current pricing.

800.962.2310 / sales@thermionics.com