RC Series 3 kW Compact Source e-Gun™

Evaporation Source
Series: RC

2.24cc or 3.31cc compact source e-Gun™ mounted on 6″ O.D. CF flange with all feedthroughs needed for operation, including source shutter.

Evaporation Source
Series: RC

3 kW Compact Source e-Gun™

Thermionics introduces a redesigned 3 kW Compact e-Gun for better coating performance. The new design protects the emitter from damage and shorting during installation and service. The improved water-cooling system enhances heat transfer, which increases rate stability and prevents damage to the e-beam source. The Compact e-Gun is designed for easy installation into MBEsystems.

Features 3kW e-Gun source:

  • Fits into a 4.5 CF type port
  • 2.24cc or 3.31cc crucible
  • Fully UHV compatible