Thermionics Northwest manufactures the broadest line of UHV positioning equipment currently available. Our goal is to provide researchers with the high-quality equipment needed in their endeavors by incorporating the greatest functional value at the lowest cost.
Thermionics’ Commitment – PRODUCT WARRANTY
Design Philosophy
Our equipment is designed with a modular framework. This permits the user to select the needed functional devices and have them work well together. This way, custom equipment, matching the requirements of the application, can be assembled efficiently. Changes in capability can also be made during the functional fife of the equipment.
Equipment Selection
We routinely manufacture several series of equipment that perform the same basic task. Each series has its own characteristics with different performance levels. This is true for XYZ manipulators, translators, linear-rotary feedthroughs. etc. If in doubt. please contact us to discuss your particular application. Perhaps we can suggest a successful and more cost-effective way to obtain the desired result. In most manipulator applications, the sample size, degrees, and range of freedom, and need of accuracy and rigidity determine the exact specifications of the equipment required. Increasing levels of versatility tend to increase the needed bellows size and thus the required superstructure. This can escalate into larger equipment and greater cost. Careful establishment of the needed requirements will minimize the cost of the equipment and assure performance consistent with your expectations.
Layout Drawings
Layout drawings are available for all our standard products. These provide the dimensions required to ensure the equipment will fit in or on your system. Many of these drawings are shown in this catalog. All our media (models, .STEP files, pictures, manuals and more) can be found here: PRODUCT MEDIA
Manipulator Terminology (FB Manipulator shown)
Terminology
We have adopted the following functional definitions when used in reference to our equipment.
Manipulator (X, Y, Z)
A manipulator is a 3- axis (X. Y, Z) positioning device. For most applications, the instrument hardware is mounted outside the vacuum chamber. with a welded bellows providing a flexible vacuum curtain. The X axis passes in front of the vertical, mechanical structure, or “backframe,” with the Y axis moving to and away from the backframe. The Z axis is perpendicular to the X and Y axes and moves up and down directly against the vacuum pressure differential. The polar axis is the same as the Z axis. The polar axis is also referred to as theta (θ).
The limit of X and Y travel is normally a circular pattern. The range is indicated as a vector sum. This means a± 1/2″ range of X and Y allows the polar axis to be moved anywhere inside a 1″ diameter circle. The sum of the X and Y vectors is limited to .5″. Square pattern XY stages are available as options on some models.
Translator (Z)
A translator is a single axis positioning device, utilizing a bellows as a vacuum seal. They are also referred to as a “Z only” stage. This axis is normally perpendicular to the chamber. This causes the Z axis to work directly against the force from the pressure differential.
XY Stage
The XY stage provides the X and Y axes only. No Z motion is available.
Polar Rotation (θ)
The polar axis is the same as the Z axis, above. Rotation about the polar axis is commonly achieved by mounting rotary feedthrough at the center of the traveling flange of a manipulator or translator. This degree of freedom can also be achieved with a differentially pumped rotary seal.
Azimuthal Axis (α)
The azimuthal axis (α) is perpendicular to the polar axis (θ). Sample azimuthal rotation refers to rotation of the sample about an axis normal to the sample face and perpendicular to the polar axis.
Flip (β)
Flip motion is the changing of an axis normal to the sample face from parallel (or coaxial) to the polar axis to coaxial with the azimuthal axis. The range of this change of axis may be 90°, 180° or full 360°.
Tilt (γ)
Tilt refers to changing the polar axis with respect to the X, Y and Z axes. This is usually done at the traveling flange of a 3-axis manipulator (or other exterior mounting stages). Tilt range is often limited by the bellows I. D. and the O.D. of the probe passing through the bellows. The maximum angle practical is about ± 7°. When used in this manner, translation in X, Y and (slightly) Z will occur with adjustment of the tilt angle. Tilt stages are available in single or dual-axis units.
Bolt Pattern Orientation
Our equipment is manufactured with the primary axis straddling adjacent bolt holes on the mounting flange (American Standard). Most equipment can be supplied with the axis passing through a bolt hole axis (European Standard) on request. Some equipment is field adjustable.
Custom or Modified Equipment
Our goal is to provide researchers with the high-quality equipment needed in their endeavor. Our modular design philosophy allows us to tailor standard instruments to a particular application at a minimum cost. Often, fully meeting a customer’s equipment requirements means making a modification to existing instrument design. It may mean designing a new unit to the customer specifications. We accept this challenge as being part and parcel of our commitment to assist the researcher. Indeed, many of our new equipment designs are outgrowths of responding to specific customer needs. We have even interfaced with our equipment and sample handling with that of many other manufacturers.
We strive to supply this design and manufacturing service as efficiently as possible, both in terms of price and delivery. We encourage you to contact us so we can communicate your equipment needs. We are comfortable bidding to your specifications. Our standard policy is the customer reviews and approves the design drawings before custom equipment is manufactured.
EC Series Precision Manipulators
The EC series manipulators provide high precision positioning at a minimum cost. They feature precision pre-loaded cross-roller stage control with pre-loaded micrometer-to-stage coupling. The XY guide system is made of hardened carbon steel.
EC Series Specifications
Bellows
- 1.39″. 2″ or 2.5″ I.D. bellows
X & Y Axes
- ±0.5″ X and Y travel, circular pattern, preloaded micrometer-to-stage coupling, 0.001″ (or 0.0001″) micrometer divisions
- Micrometers bakeable to 200°C
Z Axis
- 2″ micrometer drive Z travel, 0.025″/turn, 0.001″ divisions, 2″ diameter drive knob (1.39″ I.D. only)
- 2″, 4″ and 6″ Acme Z travel, 0.100″/turn knob adjust
Traveling Flange
- 2.75″ O.D. traveling flange, tapped
Features
- Bakeable to 200°C fully assembled; no castings used In construction
- Hardened steel X and Y cross-roller guides
- Dual 0.75″ O.D. hardened stainless steel Z guide rods
- Aluminum stage construction
- All position operation
- Stainless steel only material exposed to vacuum
3-Axis Ultra High Vacuum Precision Manipulators
| Base Flange O.D | Bellows I.D. | Z Travel | Model Number |
| 2.75” | 1.39” | 2” | EC-1.39-2* |
| 1.39” | 4” | EC-1.39-4 | |
| 1.39” | 6” | EC-1.39-6 | |
| 4.5” | 1.87” | 2” | EC-1.87-2 |
| 1.87” | 4” | EC-1.87-4 | |
| 1.87” | 6” | EC-1.87-6 | |
| 2.0” | 2” | EC-2.0-2 | |
| 2.0” | 4” | EC-2.0-4 | |
| 2.0” | 6” | EC-2.0-6 | |
| 2.5” | 2” | EC-2.5-2 | |
| 2.5” | 4” | EC-2.5-4 | |
| 2.5” | 6” | EC-2.5-6 |
Motion Specification
X axis resolution <0.0001″ (0.0025mm)
repeatability < 0.00015″ (0.0038 mm)
backlash < 0.00015″ (0.0038 mm)
Y axis resolution < 0.0001″ (0.0025 mm)
repeatability < 0.00015″ (0.0038 mm)
backlash < 0.00015″ (0.0038 mm)
2″ Z range micrometer drive
resolution < 0.0001″ (0.0025 mm)
repeatability < 0.00015″ (0.0038 mm)
backlash < 0.0001 5″ (0.0038 mm)
rigidity (1.39″ 1.0. bellows only) < 0.001″ change with 20 lb load change
2″ to 6” Z range Acme drive
resolution < 0.0005″ (0.013 mm)
repeatability < 0.0005″ (0.013 mm)
backlash < 0.0007″ (0.018 mm)
rigidity (1.39″ 1.0. bellows only) < 0.001″ change with 5 lb load change
Options
Base Flange
/B-6 6” O.D. base flange (all models)
/B-6M 6” O.D. base flange with 5 mini-ports (1.39” I.D. bellows only)
/LM XY Micrometers
- Large micrometers with 0.0001” divisions
- Set of two
/SSB Stainless Steel Bearings
- Replaces carbon steel cross roller bearings
/FCL Traveling Flange Modification
- Supplies traveling flange with clearance holes
- Modifies traveling stage to allow screw heads
- Allows direct mounting of tapped flange to traveling stage (e.g., RNN- 150)
NOTE: Traveling flange bolt pattern changed to “on axis”
/MSA Axial Stepping Motor Drive
- Low cost drive for X and/or Y axes
- Direct Acme screw drive
- Axial drive stepping motors
- No manual adjust on motors
/SMC Stepping Motor Controllers
SEE HERE BUTTON
Other Options
Polar rotation
Rotary seals (LINK)
Rotary feedthroughs (LINK)
Reducer feedthrough hats (LINK)
Tilts (LINK)
Sample motion (LINK)
Mounting (LINK)
Heating (LINK)
Cooling (LINK)
EC-1.39-2/B-6M
EM-200 Series Precision Manipulators
The EM-200 series is the basic workhorse of our manipulator line. It can be easily and efficiently customized to meet a broad range of applications. The EM units have ± 0.5” of travel in X and Y, with Z travel of 2″ standard. The EM series may be supplied with Z travels of up to 36″ or more. They are available with 1.39″ I.D. or 1.87″ I.D. bellows. They are supplied with 2.75″, 4.5″, 6″ or 8″ O.D. base flanges.
EM Series Specifications
Bellows
- 1.39″ or 1.87″ I.D. bellows
X & Y Axes
- ± 0.5″ X and Y travel, circular pattern, preloaded micrometer-to-stage coupling, 0.0001″ micrometer divisions, large drum dial micrometers (metric micrometers optional)
Z Axis
- 2″ to 36+” Z travel, gearbox Acme drive, 0.100″/turn, 10 turns/inch, 0.00 1″ divisions, position lock
Base Flange
- 6″ O.D. (standard), 2. 75″, 4.5″ and 8″ optional
- 5 mini-ports on a 6″ or 8″ O.D. base flange (6 mini-ports with 1.39″ I.D. bellows available on special request)
Traveling Flange
- 2.75″ 0 .0. traveling flange
Features
- 0.375″ O.D. hardened stainless steel X and Y guide rods
- 0.500″ 0 .0. hardened stainless steel Z guide rods
- All linear bearings hardened stainless steel
- Bakeable to 200°c fully assembled
- X micrometer can be ordered with either left or right-side mount
- Stainless steel only material exposed to vacuum
|
Bellows I.D. |
Dimensions |
Model Number |
|
|
A |
C min* |
||
|
1.39” |
11.4” |
6.3” |
EM-201.39-1-1-2 |
|
1.87” |
11.8” |
6.7” |
EM-201.87-1-1-2 |
*Note: This equipment has the shortest possible minimum flange-to-flange “C min” dimensions. This distance can be changed by a large number of possible options. The C min dimensions shown is only for the exact model listed. Please contact us for more information.
Motion Specifications
X axis resolution < 0.0001″ (0.0025mm)
repeatability < 0.0001″ (0.0025mm)
backlash < 0.00015″ (0.0038 mm)
Y axis resolution < 0.0001″ (0.0025 mm)
repeatability < 0.0001″ (0.0025mm)
backlash < 0.00015″ (0.0038 mm)
Z axis resolution < 0.0005″ (0.0127 mm)
repeatability < 0.0005″ (0.0127 mm)
backlash < 0.0007″ (0.0178 mm)
Options
EM series manipulators can be customized to meet your exact requirements. The following options can be incorporated at the time of manufacture. Some can be field retrofitted after delivery. Please contact us for further information.
Base Flange
Change from 6” O.D. to:
/B-2.75 2.75” O.D. no mini-flanges
/B-4.5 4.5” O.D. no mini-flanges
/B-8 8” O.D. 5 mini-flanges
/SQ Square Pattern XY
- Provides 1” square pattern of X and Y motion for 3/8” O.D. probe
- Requires a 1.87” I.D. bellows
/FCL Traveling Flange Modification
- Supplies traveling flange with clearance holes
- Extends traveling flange nipple and backframe
- Allows direct mounting of tapped flange to traveling stage (e.g. RNN-150)
/ST-.75 Support Tube
- Support tube, 0.75” O.D., end bearing support
- Requires 1.87” I.D. bellows
/MZD Micrometer Z Drive
- Available on 2” travel, 1.39” I.D. bellows only
- 2” diameter dial
- 0.0001” divisions
/SM Small Micrometers with 0.001” Divisions
- Set of two
- ±0.5” travel
/MS Stepping or /MY Synchronous Motor Drive
SEE MORE INFO HERE
All stainless steel construction is available. Please contact us if this is your preference.
Other Options
Polar rotation
Rotary seals (LINK)
Rotary feedthroughs (LINK)
Reducer feedthrough hats (LINK)
Tilts (LINK)
Sample motion (LINK)
Mounting (LINK)
Heating (LINK)
Cooling (LINK)
TPM Series Precision Manipulators
The TPM precision manipulator series offers large I.D. bellows (2″, 2.5″ or 3″ I.D.) with a small footprint. The stage guide bearing system has pre-loaded hardened stainless-steel cross-rollers. The Z axis guides are stainless steel, and the Z drive is a precision 4:1 ratio. This facilitates 200°C bakeouts fully assembled. The TPM unit optionally provides a ring of 6 mini-ports at the top of the bellows assembly for utility feedthroughs. In this manner, the utility lines move with the traveling stage.
TPM Series Specifications
Bellows
- 2″, 2.5″ or 3″ I.D. bellows
X & Y Axes
- ±0.5” or± 1″ X and Y travel, circular pattern, standard, pre-loaded micrometer-to-stage coupling, 0.0001″ micrometer divisions, large drum micrometers (metric micrometers optional)
- System bakeable to 200°C
- Easy removal of micrometers
Z Axis
- 2″ to 36″ Z travel, 4: 1 worm Acme gearbox drive, 0.001″ divisions, 0.050″/turn, 20 turns/inch
Base Flange
- 6″ O.D. UHV base flange
Traveling Flange
- 2.75″ OD. traveling flange
Features
- Precision operation of Z drive
- All stainless-steel Z guide bearing system
- Hardened stainless steel XY cross-roller guide system, pre-loaded bearings
- Stainless steel Z back support bars
|
Bellows I.D. |
X & Y Travel |
Dimensions |
Model Number |
||
|
A |
B |
C min* |
|||
|
2” |
±0.5” |
15.8” |
8.7” |
11.51” |
TPM-202-1-1-2 |
|
2.5” |
±0.5” |
15.9” |
8.7” |
11.61” |
TPM-202.5-1-1-2 |
|
|
±1” |
16.6” |
10.3” |
12.32” |
TPM-202.5-2-2-2 |
|
3” |
±0.5” |
16.2” |
8.7” |
11.94” |
TPM-203-1-1-2 |
|
|
±1” |
17.1” |
10.3” |
12.8” |
TPM-203-2-2-2 |
*Note: This equipment has the shortest possible minimum flange-to-flange “C min” dimensions. This distance can be changed by a large number of possible options. The C min dimensions shown is only for the exact model listed. Please contact us for more information.
Motion Specifications
X axis resolution < 0.0001″ (0.0025mm)
repeatability < 0.0001″ (0.0025mm)
backlash < 0.00015″ (0.0038 mm)
Y axis resolution < 0.0001″ (0.0025 mm)
repeatability < 0.0001″ (0.0025mm)
backlash < 0.00015″ (0.0038 mm)
Z axis resolution < 0.0002″ (0.0050 mm)
repeatability < 0.0003″ (0.0076 mm)
backlash < 0.0006″ (0.0150 mm)
Options
TPM series manipulators can be customized to meet your exact requirements. The following options can be incorporated at the time of manufacture. Some can be field retrofitted after delivery. Please contact us for further information.
/ST-.75 Support Tube
- Support tube
- 0.75″, 1”or 1.5″O.D.
- End bearing support for rotary shaft
/FTR Access Mini-Port Ring
- 6 mini-ports on a feedthrough collar atop the bellows
/FCL Traveling Flange Modification
- Supplies traveling flange with clearance holes
- Extends traveling flange nipple and backframe
- Allows direct mounting of tapped flange to traveling stage (e.g ., RNN-150 )
Other Options
Polar rotation
Rotary seals (LINK)
Rotary feedthroughs (LINK)
Reducer feedthrough hats (LINK)
Tilts (LINK)
Sample motion (LINK)
Mounting (LINK)
Heating (LINK)
Cooling (LINK)
TPM Layout
FM Series Compound Precision Manipulators
The FM series compound precision manipulator combines the XY stage from the FB manipulator series with the Z stage from the EMT precision translators. This combination works well vertically or horizontally. The FM series is available with horizontal mounting packages with custom-rated counterbalance springs to maintain “instrument”‘ positioning. The Z stage can be separated from the XY stage.
The FM series compound precision manipulators are XYZ units utilizing two bellows. A large I.D. short bellows located at the base of the unit is used to provide the XY operating range. A smaller I.D. bellows supplies the Z axis travel. XY bellows I.D.’s of 2″, 2.5″, 3″ and 4″ are standard, with inside diameters to 6.3″ I.D. possible. These units are available with ±0.5″ or± 1″ of X and Y travel. They can be supplied with Z travel of up to 36″ or more, with Z bellows I.D.’s of 1.04 “, 1.39″ and 1.87″ standard. This approach provides considerable savings over the single large I.D. bellows systems, where a clear bore is not required, and significant Z travel is needed.
A non-rotating tubular probe can also be provided with a stabilizing linear bearing at the base of the Z stage. This results in a more stable probe assembly, with a shorter effective “lever arm.”
This probe option provides a centerless, ground, hollow. stainless steel tube extending through the center of the manipulator bellows. This probe is mounted to the traveling flange with a double-sided flange and can be easily removed for equipment installation. This tube is stabilized by a stainless-steel linear bearing mounted at the base of the Z travel system. This bearing dramatically improves the stability of the probe.
In addition, differentially pumped rotary seals can be fitted to these manipulators. They provide an additional degree of rotary freedom for the customers’ equipment. The probe bearing can be modified to allow probe polar rotation as well as polar axis linear travel. This system provides an –excellent method of utility delivery without utility line motion in a vacuum.
FM Series Specifications
X & Y Axes
- ±0.5” or± 1″ X and Y travel, circular pattern, pre-loaded micrometer-to-stage coupling, 0.0001″ micrometer divisions, large drum dial micrometers standard (metric micrometers optional)
Z Axis
- 2″ to 36+” Z travel, gearbox Acme drive. 0.100″/turn (10 turns/inch), 0.001″ divisions, pre-loaded lead screw and worm shaft. position lock; comes with extended backframe
Base Flange
- 4.5″. 6″ (standard, tapped), B” or 10″ 0 .0. base flange
Traveling Flange
- 2.75″ (standard, tapped), 3.38″ and 4.5″ O.D traveling flange
Features
- /EB (standard) extended backframe
- Hardened stainless steel bearings and guide rods throughout
- All XY bearings adjustable
- Maximum bakeout temperature: 200°c
Motion Specifications
X axis resolution < 0.0001″ (0.0025mm)
repeatability < 0.0001″ (0.0025mm)
backlash < 0.00015″ (0.0038 mm)
Y axis resolution < 0.0001″ (0.0025mm)
repeatability < 0.0001″ (0.0025mm)
backlash < 0 00015″ (0.0038 mm)
Z axis resolution <: 0.0005″ (0.0127 mm)
repeatability < 0.0005″ (0.0127 mm)
backlash < 0.0007″ (0.0178 mm)
Options
FM series compound precision manipulators can be customized to meet your exact requirements. The following options can be incorporated at the time of manufacture. Some can be field retrofitted after delivery. Please contact us for further information.
Base Flange
■ 6″ O.D. (standard) base flange, tapped (clearance available, without additional charge)
■ /B-8T 8″ O.D. base flange, tapped
■ /B-10T 10″ O.D. base flange, tapped
Traveling Flange
■ /T-3.3T 3.38″ O.D. traveling flange, tapped
■ /T-4.ST 4.5″ O.D. traveling flange, tapped
/HMP Horizontal Mounting Package
(Suitable for most FM models, up to 6″ Z travel)
■ Base flanges modified as required
■ Oversized guide rods
■ Two force spring assemblies, custom force level based on customer payload
/ST-. 75 Custom Support Tube, 0.75″ to 3″ O.D.
■ End bearing support for rotary shaft
■ Length specified by the customer
/SM Small Micrometers with 0.001″ Divisions
Set of two
■ ±0.5″ travel
■ ±1″ travel
/MS Stepping or /MY Synchronous Motor Drive
/LP Lifting Package
■ Stainless steel lifting eyes
■ Custom sling assembly
■ Suitable for up to 200 lb systems
/LH Lifting Handles
■ Stainless steel lifting handles
■ Consult factory for application
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FM Layout
|
XY |
Z |
X & Y |
Dimensions |
Model Number |
|||
|
A |
B |
C min* |
D |
||||
|
2” |
1.04” |
±0.5” |
11.0” |
10.0” |
6.50” |
15.4” |
FM-102-1.04-1-1-2 |
|
2.5” |
1.04” |
±0.5” |
11.0” |
10.0” |
6.58” |
15.5” |
FM-102.5-1.04-1-1-2 |
|
|
|
±1” |
13.5” |
10.0” |
7.29” |
16.4” |
FM· 102.5-1,04-2·2-2 |
|
|
1.39”*** |
±0.5” |
11.0” |
10.0” |
6.58” |
15.5” |
FM-102.5-1.39-1-1-2 |
|
3” |
1.04” |
±0.5” |
11.0” |
10.0” |
6.79″ |
15.7” |
FM-103-1.04-1-1-2 |
|
|
|
±1” |
13.5” |
10.0” |
7.67″ |
16.6″ |
FM-103-1.04-2-2-2 |
|
|
1.39”*** |
±0.5” |
11.0” |
10.0” |
6.79″ |
15.7″ |
FM-103-1.39-1-1-2 |
|
|
|
±1” |
13.5” |
10.0” |
7.67″ |
16.6″ |
FM-103-1 .39-2-2-2 |
|
|
1.87” |
±0.5” |
11.0” |
10.0” |
6.58″ |
15.5″ |
FM-103-1.87-1-1-2 |
|
|
|
±1” |
13.5” |
10.0” |
7.29″ |
16.4″ |
FM-103-1.87-2-2·2 |
|
|
2.25” |
±0.5” |
11.0” |
10.0” |
6.79″ |
16.6″ |
FM-103-2.25-1-1-2 |
|
|
|
±1” |
13.5” |
10.0” |
7.29″ |
17.4″ |
FM-103-2.25-2-2-2 |
|
4” |
1.04” |
±0.5” |
11.0” |
10.0” |
7.38″ |
16.3″ |
FM-104-1.04-1-1-2 |
|
|
|
±1” |
13.8” |
10.3” |
8.47″ |
17.4″ |
FM-104-1 .04-2-2-2 |
|
|
1.39”*** |
±0.5” |
11.0” |
10.0” |
7.38″ |
16.3″ |
FM-104-1.39-1-1-2 |
|
|
|
±1” |
13.8” |
10.3” |
8.47” |
17.4″ |
FM-104-1.39-2-2·2 |
|
|
1.87” |
±0.5” |
11.0” |
10.0” |
6.79″ |
15.7″ |
FM-104-1 .87-1-2 |
|
|
|
±1” |
13.8” |
10.3” |
8.47″ |
17.4″ |
FM-104-1.87-2-2-2 |
|
|
2.25” |
±0.5” |
11.0” |
10.0” |
6.79″ |
15. 7″ |
FM-104-2.25-1-1-2 |
|
|
|
±1” |
13.8” |
10.3” |
8.47″ |
17.4″ |
FM-104-2.25-2-2-2 |
Larger diameters upon request.
* NOTE This equipment has the shortest possible minimum flange-to-flange “C min”‘ dimension.
This distance can be changed by a large number of possible options. The C min dimension
shown is only for the exact model listed. Please consult the factory for further information.
** Additional Z travel is available 111 2″ increments.
*** When Z stroke exceeds 12″ this model is changed to a 1 53 bellows i.D. at no additional charge.
/PL Probe Support Option
Adds linear all stainless-steel bearing at base of Z stage
| Tube O.D. | Add to “C” Dimension | Model No. |
| 0.75” | 2.50” | /PL-.75 |
| 1.00” | 2.65” | /PL-1 |
| 1.50” | 2.25” | /PL-1 .5* |
| 2.00” | 2.50” | /PL-2 |
/PLR or /PTF Probe Support Option
Adds linear-rotary all stainless steel or Teflon bearing
Commonly used with RNN series rotary platform and rotating support tube
| Tube O.D. | Add to “C” Dimension | Model No. | Teflon Model No. |
| 0.75” | 2.50” | /PLR-.75 | /PTF-.75 |
| 1.00” | 3.30” | /PLR-1 | /PTF-1 |
| 1.50” | 2.63” | /PLR-1 .5* | /PTF-1 .5* |
| 2.00” | 2.50” | /PLR-2 | /PTF-2 |
* NOTE. 1 87″ bellows recommended tor 1.5″ probes
FB Series Precision Manipulators
FB series manipulators provide large I.D. bellows and the mechanical strength required for significant payloads. Bellows I.D.s of 2″, 2.5″, 3″ and 4″ are standard. with inside diameters to 6.3″ I.D. possible. These manipulators are available with ±0.5″ or ± 1″ X and Y travel. 2″ Z travel is standard. Travels of up to 36″ or more can be supplied.
The FB series can be ordered in the standard cantilever model or with the 3-lead screw option. The cantilever model has an 80 lb payload rating in the vertical orientation, and the 3-lead screw model has a 200 lb payload rating.
The FB series is available with horizontal mounting packages with custom-rated counterbalance springs to maintain “instrument” positioning.
Differentially pumped rotary seals provide an additional degree of rotary freedom for customers’ equipment at full bellows I.D.
FB Series Specifications
X & Y Axes
■ ± 0.5” or± 1″ X and Y travel, circular pattern, pre-loaded micrometer-to-stage coupling, 0.0001″ micrometer divisions, large drum dial micrometers standard (metric micrometers optional)
Z Axis
■ 2″ to 36+” Z travel, 4: 1 worm Acme gearbox drive, 0.050″/turn (20 turns/inch), 0.001″ divisions, pre-loaded lead screw and worm shaft. position lock
Base Flange
■ 4.5”, 6” (standard), 8″ or 10″ O.D. base flange
Traveling Flange
■ 4.5″, 6″ (standard), or 8″ O.D. traveling flange
Features
■ Super rigid 5-sided box construction
■ Hardened stainless steel bearings and guide rods throughout
■ All bearings adjustable
■ Wide spacing (7″ to 9 “) on all guide rods
■ Wide spacing (6”) of bearings on rods
■ Maximum bakeout temperature: 200°C with micrometers attached
Motion Specifications
X axis resolution < 0.0001″ (0.0025 mm)
repeatability < 0.0001″ (0.0025mm)
backlash < 0.00015″ (0.0038 mm}
Y axis resolution < 0.0001″ (0.0025mm)
repeatability < 0.0001″ (0.0025mm)
backlash < 0.00015″ (0.0038 mm)
Z axis resolution < 0 .0002″ (0.0051 mm)
repeatability < 0 .0003″ (0.0076mm)
backlash < 0.0006″ (00152mm)
Ordering Information-3-Axis Ultra High Vacuum Precision Manipulators
with 2″ of Z travel
|
Bellows I.D. |
X & Y Travel |
Dimensions |
Model Number |
||
|
A |
B |
C min* |
|||
|
2” |
±0.5” |
11.0” |
10.0” |
4.66” |
FB-102-1-1-2 |
|
2.5” |
±0.5” |
11.0” |
10.0” |
4.66” |
FB-102.5-1-1-2 |
|
|
±1” |
13.5” |
10.0” |
5.08” |
FB-102.5-2-2-2 |
|
3” |
±0.5” |
11.0” |
10.0” |
4.69” |
FB-103-1-1-2 |
|
|
±1” |
13.5” |
10.0” |
5.57” |
FB-103-2-2-2 |
|
4” |
±0.5” |
11.0” |
10.0” |
5.30” |
FB-104-1-1-2 |
|
|
±1” |
13.8” |
10.3” |
6.39” |
FB-104-2-2-2 |
Larger diameter bellows available upon request
*NOTE This equipment has the shortest possible minimum flange-to-flange “C min” dimension.
This distance can be changed by a large number of possible options. The c min dimension
shown is only for the exact model listed. Please consult the factory for further information.
Options
Base Flange
■ 6″ O.D. (standard) base flange, tapped (clearance available. without additional charge)
■ /B-BT B” O.D. base flange, tapped
■ /B-10T 10″ O.D. base flange, tapped
Traveling Flange
■ /T-4.ST 4.5″ O.D. traveling flange, tapped
■ /T-BT 8″ O.D. traveling flange, tapped
/ST-. 75 Custom Support Tube, 0.75″ to 3″ O.D.
■ End bearing support for rotary shaft
■ Length specified by the customer
/3LS 3-Lead Screw
■ 3 Acme screw support to traveling flange
■ Minimizes traveling flange deflection
■ Used for increased payload requirements
■ Used for long Z stroke application
■ Required when mounting an RNN-400/FA to the traveling flange
Z drive anti-backlash coupling available on al/ drives
/TLT-4-2-FB Integral Tilt Stage
■ Provides ±5″ tilt in two axes
■ Uncalibrated adjusting screws
■ Provides full manipulator bellows I.D.
/HMP Horizontal Mounting Package
(Suitable for most FB models, up to 6″ Z travel)
■ Base flanges modified as required
■ Oversized guide rods
■ Two force spring assemblies, custom force level based on customer payload
/FB-160
Long Stroke Horizontal Mounting Package
■ XY stage 1s mounted on the traveling flange
■ Suitable for horizontal mounting of long stroke, wide bore manipulators
■ All items in /HMP package above, except only one spring assembly, as required
■ Stationary Z back, allowing simple additional support
■ Traveling X & Y stages, with a maximum throat diameter of 2.87″ I .D.
/SM Small Micrometers with
0.001″ Divisions
Set of two
■ ± 0.5″ travel
■ ± 1″ travel
/LP Lifting Package
■ Stainless steel lifting eyes
■ Custom sling assembly
■ Suitable for up to 200 lb systems
/LH Lifting Handles
• Stainless steel lifting handles
/MS Stepping or /MY Synchronous Motor Drive
See page 2-79
FB-104
EMT Series Precision Translators
EMT series translators provide a single axis (Z only) motion. These translators are based on the EM-200 series manipulator Z drive. They are calibrated in 0.001″ increments with 0.100″ travel per turn with a coarse side scale. They are available with four different bellows I.D.s. The standard base (stationary) flange is 2.75″ 0 .0., with larger O.0.s optional (required on longer travel units). The traveling flange is 2.75″ 0 .0. Both flanges are supplied tapped as standard, but we can supply clearance holes with appropriate neck assemblies to accommodate those applications which require it.
Assemblies are available with or without axis tube probe/bearing assembly.
The 2.75″ and 4.5″ 0 .0. flanges are rigidly attached to the traveling and base structure in a special way. The “Super Grip System” holds the flange about its perimeter by means of a tongue and groove, providing positive, rigid attachment with the greatest lever arm possible. The flange (and thus the bolt pattern) is adjustable to any orientation.
The EMTX Series translator is available for applications where longer strokes and/or larger payloads are required.
EMT Series Specifications
■ 1.04″, 1.39″, 1.87″, 2.25″ or 2.5″ 1.0. bellows
■ 2″ to 36+” Z travel, gearbox Acme drive, 0.100″/turn, 10 turns/inch, 0.001 ” divisions, position lock
Base Flange
■ 2.75″ (standard), 4 .5″, 6″ or 8″ 0.0. base flange tapped (except 2.5″ 1.0. bellows which have 4.5″ O.D. flanges standard)
Traveling Flange
■ 2.75″ (standard), 3 .3″ or 4.5″ O.D. traveling flange, tapped
Features
■ Hardened stainless steel Z guide rods
■ All linear bearings hardened stainless steel
■ Bakeable to 200°C fully assembled
■ Stainless steel only material exposed to vacuum
■ Basic unit (includes 2″ Z travel)
■ Additional Z travel available in 2″ increments
Motion Specifications
Z axis resolution < 0.0005″ (0.013 mm)
repeatability < 0.0005″ (0.013 mm)
backlash < 0.0007″ (0.018mm)
EMT Layout
Ordering Information – Single-Axis Ultra High Vacuum Precision Translators
with 2″ of Z travel
|
Z I.D. |
Dimensions |
Model Number |
|
|
A |
C min* |
||
|
1.04″ |
9.5′” |
2.83″ |
EMT-1.04-2 |
|
1.39″**** |
9.5′” |
2.83″ |
EMT-1.39-2 |
|
1.87″ |
9.5″ |
2.83″ |
EMT-1.87-2 |
|
2.25″ |
10.5″ |
2.83″ |
EMT-2.25-2 |
|
2.5″ |
10.5″ |
2.83″ |
EMT-2.5-2 |
* NOTE- This equipment has the shortest possible minimum flange-to-flange “C min” dimension.
This distance can be changed by a large number of possible options. The C min dimension
shown is only for the exact model listed (both flanges tapped). Please consult the factory
for further information.
** Additional Z travel is available in 2″ increments
*** With 4.5″ OD. base and traveling flange, and up to 6″ stroke, maximum
**** When Z stroke exceeds 12″ this model 1s changed to a 1 53″ JD. bellows at no additional charge
EMTX Extended Stroke Series
For longer strokes or increased payload
■ OPN linear bearings on traveling stage
■ Intermittent support for guide rods
■ Longer bearing spacing on the traveling stage
■ Double Acme nut arrangement
Ordering Information – EMTX Single-Axis Ultra High Vacuum Precision Translators
with 2″ of Z travel
|
Z I.D. |
Dimensions |
Model Number |
|
|
A |
C min* |
||
|
1.04″ |
Contact Us |
EMTX-1.04-2 |
|
|
1.39″ |
Contact Us |
EMTX-1.39-2 |
|
|
1.87″ |
Contact Us |
EMTX-1.87-2 |
|
|
2.25″ |
Contact Us |
EMTX-2.25-2 |
|
|
2.5″ |
Contact Us |
EMTX-2.5-2 |
|
* Additional Z travel is a variable in 2″ increments
Base Flange
|
O.D. |
Dimensions |
||
|
B |
E |
F |
|
|
2.75″ |
3.50″ |
1.73″ |
5.00″ |
|
4.50″ |
3.50″ |
2.76″ |
7.18″ |
|
6.00″ |
3.50″ |
3.00″ |
6.78″ |
|
8.00″ |
5.00″ |
4 00″ |
8.78″ |
/PL Probe Support Option
Adds linear all stainless steel bearing at the base of Z stage
| Tube O.D. | Add to “C” Dimension | Model Number |
| 0.75” | 2.50” | /PL-.75 |
| 1.00” | 2.65” | /PL-1 |
| 1.50” | 2.25” | /PL-1.5* |
| 2.00” | 2.50” | /PL-2 |
* NOTE: 1.5″probe requires 1.87″ bellows
PLR or/PTF Probe Support Option
Adds linear-rotary all stainless steel or Teflon bearing
Commonly used with RNN series rotary platform and rotating support tube
| Tube O.D. | Add to “C” Dimension | Model Number | Teflon Model Number |
| 0.75” | 2.50” | /PL-.75 | /PTF-.75 |
| 1.00” | 2.65” | /PL-1 | /PTF-1 |
| 1.50” | 2.25” | /PL-1.5* | /PTF-1.5* |
| 2.00” | 2.50” | /PL-2 | /PTF-2 |
Options
/MZD Micrometer Z Drive
■ Available on 2″ Z travel, 1 39″ I.D. bellows only
■ 2″ diameter drum dial
■ 0.0001 ” divisions
/EB Extended Backframe
■ Allows greater space about traveling flange
■ Add 1.5″ to “B” dimension
Base Flange
Change from 2.75″ O.D. to:
■ /B-3.3 3.3″ O.D.
with /EB option
■ /B-4.5 4.5″ O.D. (includes/EB option)
■ /8-6 6″ O.D. (includes /EB option)
■ /B-8 8″ O.D. (includes /EB option)
Traveling Flange
Change to:
■ /T-3.3 3.3″ O.D. (includes /EB option)
■ /T-4.5 4.5″ O.D. (includes /EB option)
/MS Stepping or /MY Synchronous
Motor Drive
See page 2-79
Other Options
Polar rotation
Rotary seals (LINK)
Rotary feedthroughs (LINK)
Reducer feedthrough hats (LINK)
Tilts (LINK)
Sample motion (LINK)
Mounting (LINK)
Heating (LINK)
Cooling (LINK)
FBT Series Precision Translators
FBT series translators provide single axis (Z only) motion. They are based on the FB-100 series manipulator Z drive. These units offer unparalleled mechanical support for customer payloads. They are available with bellows I.D. sot 2″, 2.5″, 3″ and 4″, with larger I.D.’s available. Standard base and traveling flange sizes are 6″ O.D., with tapped or clearance holes, as required. Other flange diameters available. Options include 3-lead screw version for extra-heavy payloads (to 200 lbs) and 1 0″ 0. D. base flange for horizontal mounting. The Z drive is an Acme screw with a precision 4: 1 gearbox. The stage position is indicated to 0.001″ divisions.
FBT Series Specifications
Z Axis
■ 2″ to 36+” Z travel. 4:1 worm Acme gearbox drive, 0.050″/turn (20 turns/inch), 0.001″ divisions, pre-loaded lead screw and worm shaft, position lock
Base Flange
■ 4.5″, 6″ (standard), 8” or 10” O.D. base flange
Traveling Flange
■ 4.5″. 6″ (standard), or 8″ O.D. traveling flange
Features
■ Super rigid 5-sided box construction
■ Hardened stainless steel bearings and guide rods throughout
■ All bearings adjustable
■ Wide spacing (7″ to 9″) on all guide rods
■ Wide spacing (6”) of bearings on rods
■ Maximum bakeout temperature: 200°C
Motion Specifications
Z axis resolution < 0.0002″ (0.005 mm)
repeatability < 0.0005″ (0.013 mm)
backlash < 0.0008″ (0.020 mm)
Ordering Information -Single-Axis Ultra High Vacuum Precision Translators
with 2″ of Z travel
| Bellows I.D. |
Dimensions C min* |
Model Number |
| 2” | 3.06” | FBT-102-2 |
| 2.5” | 3.06” | FBT-102.5-2 |
| 3” | 3.06” | FBT-103-2 |
| 4” | 3.06” | FBT-104-2 |
| 6” | Contact Us | FBT-106-2** |
| 8” | Contact Us | FBT-108-2** |
Larger diameter bellows upon request
• NOTE- This equipment has the shortest possible minimum flange-to-flange “C min” dimension This distance can be changed by a large number of possible options. The C min dimension shown is only for the exact model listed.
Please consult the factory for further information.
** NOTE Requires /3LS option
Options
/3LS 3-Lead Screw
■ 3 Acme screw support to traveling flange
■ Used for increased payload requirements
■ Used for long Z stroke application
Z drive anti-backlash coupling available on all drives
/LP Lifting Package
■ Stainless steel lifting eyes
■ Custom sling assembly
■ Suitable for up to 200 lb systems
/LH Lifting Handles
■ Stainless steel lifting handles
/MS Stepping or /MY Synchronous
Motor Drive
See page 2-79
Other Options
Polar rotation
Rotary seals (LINK)
Rotary feedthroughs (LINK)
Reducer feedthrough hats (LINK)
Tilts (LINK)
Sample motion (LINK)
Mounting (LINK)
Heating (LINK)
Cooling (LINK)
FBT Layout
ECT Jacking Stages
ECT series translators provide a single axis (Z only) motion. This series provides short strokes of Z travel with a wide range of bellows 1.0. All units employ two or three lead screws and two or three precision-ground stainless steel guide rods. These units offer excellent mechanical support. They are well suited to applications involving equipment insertion and withdrawal from investigative points where space is restricted. These jacking stages are all metal and bakeable. Adjustable preset stops are optional.
The ECT series is designed to handle customer payloads up to 45 lbs standard, in a vertical orientation with the center of gravity on-axis. Horizontal mounting and cantilever loads can be handled on many units. Please consult the factory for your particular application.
The stages are available with bellows I.D.s from 1.39″ through 6″ standard, with larger 1.O.s available.
ECT Series Specifications
■ 2″ to 6″ Z travel. worm Acme gearbox drive,pre-loaded lead screw and worm shaft,position lock
■ /2LS 2-Lead Screw
2.75″ or 4.5″ 0 .0. base flange detail
2.75″ or 4.5″ O.D. traveling flange detail, tapped
■ /3LS 3-Lead Screw
4.5″, 6″ or ff’ 0 .0. base flange detail
4.5″, 6″ or 8″ O.D. traveling flange detail, tapped
■ Hardened stainless steel guide rods throughout
■ Bronze bushings
■ Maximum bakeout temperature: 200°C
■ Without position indicator
Motion Specifications
Z-axis resolution < 0.001″ (0.025 mm)
With /Pl option readable to 0.01″
ECT/2LS Layout
ECT/3LS Layout
Options
/STOP Adjustable Preset Stop
■ Adjustable Acme screw stop with set screw lock
/PI Position Indicator
■ Scale and pointer
Ordering Information – Single-Axis Ultra High Vacuum Precision Translators
with 2″ of Z travel
| Bellows I.D. | Lead Screws | Flange Detail | Max. Z Travel Available | Model Number |
| 1.39″ | /2LS | 2.75″ | 6 | ECT-1.39-2/2LS-2.75 |
| 1.87″ | /2LS | 2.75″ | 6 | ECT-1.87-2/2LS-2.75 |
| 2.50″ | /2LS | 4.50″ | 6 | ECT-2.5-2/2LS-4.5 |
| 3.00″ | /3LS | 6.00″ | 6 | ECT-3-2/3LS-6 |
| /3LS | 8.00″ | 6 | ECT-3-2/3LS-8 | |
| 4.00″ | /3LS | 6.00″ | 6 | ECT-4-2/3LS-6 |
| /3LS | 8.00″ | 6 | ECT-4-2/3LS-8 | |
| 5.00″ | /3LS | 8.00″ | 6 | ECT-5-2/3LS-8 |
| 6.00″ | /3LS | 8.00″ | 6 | ECT-6-2/3LS-8 |
XY Stages With Bellows
XY stages use the standard manipulator XY platforms to provide precise 2-axis positioning. The stages are available in four sizes. All include bellows. Stages are available with I.D.s from 1.39″ to 6.3″ (see below). Stage construction is of 6061 series aluminum (300 series stainless steel available). All feature pre-loaded micrometer-to-stage coupling and all stainless-steel guide rails and bearings (the EC and EB series use hardened carbon steel cross-rollers). Larger units incorporate fully adjustable bearings. Maximum bakeout temperature: 200°C. \
Motion Specifications
ECXY Series
X & Y Axes
resolution < 0.000 1″ (0.0025 mm)
repeatability < 0.00015″ (0.0038 mm)
backlash < 0.00015″ (0.0038 mm)
EMXY Series
X & Y Axes
resolution < 0.0001″ (0.0025 mm)
repeatability < 0.0001″ (0.0025 mm)
backlash < 0 .00015″ (0.0038 mm)
FBXY Series
X & Y Axes
resolution < 0.0001″ (0.0025mm)
repeatability < 0.0001″ (0.0025mm)
backlash < 0.00015″ (0.0038mm)
EBXY Series
X & Y Axes
resolution < 0.0001″ (0.0025mm)
repeatability < 0.0001″ (0.0025mm)
backlash < 0.00015″ (0.0038mm)
Base Flange
ECXVB and EMXVB
■ 2.75″ O.D. base flange. tapped, on 1.39″ I.D. bellows unit
■ 4.5″ O.D. base flange, tapped, on 1.87″ I.D. bellows unit
FBXVB
■ 6″ O.D. (standard) base flange. tapped
Other flange sizes available
EBXVB
■ 8″ O.D. (standard) base flange, tapped
Other flange sizes available
Traveling Flange
ECXYB and EMXYB
■ 2.75” O.D. traveling flange, tapped
FBXYB
■ 6″ O.D. (standard) traveling flange, tapped
Other flange sizes available
Features
■ Removable micrometers for bakeout
■ Allstainless-steel guide rods and bearings
■ Pre-loaded micrometer-to-stage coupling
■ Large units incorporate fully adjustable bearings
■ Maximum bakeout temperature: 200°C
Options
/HMP Horizontal Mounting Package
for ECXYB, EMXYB, FBXYB and
EBXYB Units
■ Larger (up to 10″ O.D.) base flange, as required, flange face O.D. as per customer requirements
■ Oversized guide rods, as required
■ Modified travel limit
■ Two force spring assemblies, custom force level based on customer payload
XY Stage with Bellows
|
Z I.D. |
XY Range |
Mat |
Dimensions |
XY Rods |
Model Number |
|
|
B |
C |
|||||
|
1.39″ |
±0.5” |
Al |
— |
4.70″ |
— |
ECXYB-1.39-1 |
|
1.39″ |
±0.5” |
Al |
— |
3.18″ |
3/8″ |
EMXYB-1.39-A 1 |
|
1.39″ |
±0.5” |
SS |
— |
3.18″ |
3/8″ |
EMXV\YB-1.39-S-1 |
|
1.87″ |
±0.5” |
Al |
— |
4.20″ |
3/8″ |
EMXYB-1.87-2A-1 |
|
1.87″ |
±0.5” |
SS |
— |
4.20″ |
3/8″ |
EMXVYB-1.87-2S-1 |
|
2.00″ |
±0.5” |
Al |
10” |
3.69″ |
1/2″ |
FBXYB-2.0-A1 |
|
2.50″ |
±0.5” |
Al |
10” |
4.09″ |
1/2″ |
FBXYB-2.5-A1 |
|
2.50″ |
±1″ |
Al |
10” |
4.89″ |
1/2″ |
FBXYB-2.5-A2 |
|
3.00″ |
±0.5” |
Al |
10” |
4.20″ |
1/2″ |
FBXYB-3.0-A1 |
|
3.00″ |
±1″ |
Al |
10” |
5 08″ |
1/2″ |
FBXYB-3.0-A2 |
|
4.00″ |
±0.5” |
Al |
10” |
4.81″ |
1/2″ |
FBXYB-4.0-A1 |
|
4.00″ |
±1″ |
Al |
10.25” |
5.78″ |
5/8″ |
FBXYB-4.0-A2 |
|
5.00″ |
±1″ |
Al |
— |
— |
— |
EBXYB-5.0-A2 |
|
6.30″ |
±1″ |
Al |
— |
— |
— |
EBXYB-6.3-A2 |
ECXYB Layout
EMXYB Layout
EBXYB Layout
FBXYB Layout
Tilt Systems
Tilt stages allow a precise angle alignment to be established (and repeated) between two flanges. When the base flange of a tilt stage is attached to the chamber flange (or traveling stage of a positioning device) and a probe is attached to the tilting flange, probe angle and tip position can be changed.
Tilts can also be used as an inexpensive method to align docking systems and actuate sample transfers. The TLT series was designed for that purpose and is constructed for cantilever (horizontal) loads. TLT tilt stages are available in single and dual-axis units.
GBLM-1.5 Precision Tilt Stage
■ Dual micrometer adjust
■ 1.5″ I.D.
■ 2.75″ O.D. base flange, clearance holes
■ 2.75″ O.D. tilting flange, tapped
■ Demountable with independent, formed, stainless steel bellows
■ Stainless-steel ball-bearing pivots
■ Bakeable to 200°c fully assembled
■ Up to± 7° tilt range (NOTE: When used with an XYZ manipulator. the actual angular range available for the tilt stage is limited by manipulator bellows ID., axial probe O. D., and the flange-to-flange distance of Z range position)
■ Dual angle lock
TLT-1.5-1 Single Axis Tilt Stage
■ 1.5″ I.D. formed bellows
■ 2.75″ O.D. flanges, tapped
■ Knob adjust on one axis
■ ±5° tilt range
■ Roller bearing pivots suitable for horizontal mounting (cantilever) of payloads
■ Maximum bakeout temperature: 200°C
TLT-1.5-2 Dual-Axis Tilt Stage
■ 1.5″ I.D. formed bellows
■ 2.75″ O.D. flanges, tapped
■ Knob adjust on two axes
■ ±5° tilt range
■ Roller bearing pivots suitable for horizontal mounting (cantilever) of payloads such as FLLRE and RPLR transfer units (consult factory for application)
■ Maximum bakeout temperature: 200°C
GBLM-1.5
![]()
TLTM-4.0-1
TLTM-2.5-2
TLTM-4.0-1 Single Axis Tilt Stage
■ Micrometer adjust, bakeable
■ 4.0″ I.D. formed bellows
■ 6″ O.D. flange faces, tapped, 8″ flange
■ ±5° tilt range
■ Roller bearing pivots
■ Maximum bakeout temperature: 200°C
TL TW-1.5-2 Dual-Axis Tilt Stage
■ Wrench adjust on two axes (3-point adjustment)
■ 1.5″ I.D. formed bellows
■ 2.75″ O.D. flanges, tapped
■ ±4° tilt range
■ Suitable for horizontal mounting (cantilever) of payloads
■ Maximum bakeout temperature: 200°C
TLTM-2.5-2 Dual-Axis Tilt Stage
■ Micrometer adjust
■ Heavy built for mounting manipulator on top
■ 2.5″ ID. formed bellows
■ 6″ base flange with clearance holes
■ 6″ top flange, tapped
■ ±5° tilt range
■ Suitable for vertical or horizontal (cantilever) payloads
Options
/B-6 Base Flange
■ For all TLT series
■ Replaces 2.75″ O.D. base with 6” O.D.
■ Allows throughhole mounting
/HMPT Horizontal Mounting Package
■ Adds counter spring to tilt
■ Relieves load on micrometers
/MA Micrometer Adjust
TLT-1.5-1
TLTW-1.5-2
TLT-1.5-2
TLT-1.52/B-6/MA
VXT Series Virtual Axis Tilting/Positioning Assembly
The VXT series precision tilt was developed to hold and position larger excitation sources or special detector systems.
Typical applications include positioning of larger electron guns, UV or X-ray sources, as in ESCA-XPS applications or RHEED studies. The extreme flexibility of positioning allows for concise targeting.
This device provides five independent degrees of freedom. The critical freedom is the ability to “pivot” the source/detector about the target. with a point on the target surface becoming a focal point or “virtual axis” point of the motion of the VXT.
The arc radius guides are custom-made to suit specific target-to-flange distance requirements.
The stepping motor option can provide automated arc-scan motion.
The VXT is particularly suitable for payloads up to 35 lbs in vertical operation.
When using an X-ray slit source or a polarized excitation source. a differentially pumped rotary seal can be mounted to the VXT and the source on top. This configuration allows the source to be rotated about the polar axis and then scanned about the virtual axis focus point.
VXT Specifications
■ 4.5″ 0 .0. mounting flange face, tapped
■ 2. 75″ O.D. traveling flange, tapped
■ 1.87″ 1.0. stainless steel welded bellows
■ Virtual axis to mounting flange face: Per
customer requirements
■ Angle ranges:
A Arc focal point aim | ±2°
B Gun aim (2 axes, 3 pt. adj.) | ±2°
C Arc plane rotation | ±15°
D Gunarc | ±3°(based on 12″ radius)
Scale graduations 0.1°
Resolution Better than 0.01°
Adjustment Knob, approx. 6turns/degree
Other flanging, bellows available
Options
/MS Custom Stepping Motor
■ Superior Electric stepping motor
MO62-FC09E motor
200 steps/revolution
100 oz-in holding torque
■ Ball screw drive
Adjustable backlash
0.001″ travel/full step
Approx. 0.005°/step
■ Ball-bearing motor pivots
VXT-1.87/MS Layout
VXT-1.87/MS (Shown with RHEED gun)
RNN Series Differentially Pumped Rotary Seals
Differentially pumped rotary seals (RNNs) provide 360° of continuous rotary freedom through the vacuum wall of a UHV system. The RNN has two stages of differential pumping isolated by graphite-impregnated, expanded, Teflon seals on special sealing surfaces. A pre-loaded ball bearing set accurately controls the rotating stage position. This allows the unit to be successfully used with manipulators and other precision positioning devices.
RNNs are available with worm drive fine adjust option. This allows for easier and more accurate angle adjustment. RNNs are also available with anti-backlash stepping or synchronous motor drive.
RNNs with up to 12″ I.D. are listed. Larger I.D.s have been built with excellent performance. Please consult factory for special applications.
RNN Series Specifications
■ Models with clear inside diameters of 1.53″ to 10″ standard (see table). Larger sizes on request. All units are bakeable to 150°C
■ Stationery and rotation flanges, tapped
■ Flange face-to-flange face distance approximately that of two Con Flat-type flanges of the corresponding size
■ 2 stage differentially pumped
■ Base pressures in 10·11 Torr range
■ 0-360° scale with Vernier, standard
Typical Performance Specifications
for RNN-400 and larger models
Resolution < 0.004′
Repeatability < 0.008″
Backlash < 0.035°
Options
■ Fine adjust worm drive
■ Digital read-out on fine adjust
0.1 ° read-out, mechanical, non-resettable
■ Anti-backlash stepping motor drive
0.018° per full step (0.0225°/full step on RNN-150/MS)
With manual knob
■ Custom pump-out tube lengths and crankshaft lengths on /FA units available
Readability Specifications
Standard scale 1.0°
Mechanical counter 0.1°
Micro stepped motor drive required for maximum resolution
Payloads
The standard maximum payloads are indicated below. Larger loads may be handled under specific applications. Please consult the factory for custom applications.
■ The center of gravity of the payload is within “X” of the polar axis of the unit, where X is equal to 10% of the RNN I.D.
■ The center of gravity of the payload is within “Y” distance of the rotating flange on the horizontally mounted units. where Y is the flange l.D.
■ The overall maximum size “A” of the payload outside vacuum is:
Vertical operation 7 x flange O.D.
Horizontal operation 5 x flange O.D.
Inverted operation 7 x flange O.D.
Maximum Payload “W”
|
Model No. |
Vertical |
Horizontal |
Inverted |
|
|
RNN-150 |
54 lbs |
30 lbs |
45 lbs |
|
|
RNN-250 |
90 lbs |
38 lbs |
70 lbs |
|
|
RNN-400 |
144 lbs |
66 lbs |
110 lbs |
|
|
RNN-600 |
180 lbs |
84 lbs |
140 lbs |
|
|
RNN-800 |
200 lbs |
91 lbs |
160 lbs |
|
|
RNN-1000 |
370 lbs |
160 lbs |
280 lbs |
|
|
RNN-1200 |
430 lbs |
200 lbs |
350 lbs |
Payload Location
Differentially Pumped Rotary Seals (includes a removable adjustment wrench) Dimensions in inches
| I.D | Flange O.D. | A | B | C | D | E | F | G | H | Model No. |
| 1.53 | 2.75 | 4.50 | 2.99 | 1.0 | 3.18 | 2.75 | .49 | .13 | 60˚ | RNN-150 |
| 1.53 | 2.75/6* | 6.00 | 2.99 | 1.34 | 3.33 | 2.75 | .15 | .13 | 45˚ | RNN-150/6 |
| 2.53 | 4.5 | 5.75 | 3.64 | 1.36 | 3.58 | 4.50 | .49 | .03 | 45˚ | RNN-250 |
| 2.53 | 4.5/6* | 6.00 | 3.64 | 1.52 | 3.71 | 4.50 | .33 | .03 | 45˚ | RNN-250/6 |
| 4.03 | 6 | 7.75 | 4.57 | 1.68 | 4.34 | 6.02 | .37 | .06 | 45˚ | RNN-400 |
| 6.03 | 8 | 10.25 | 6.16 | 1.74 | 5.70 | 8.00 | .42 | .13 | 54˚ | RNN-600 |
| 8.00 | 10 | 12.05 | 7.03 | 1.94 | 6.70 | 10.00 | .42 | .13 | 45˚ | RNN-800 |
| 10.00 | 13.25 | 15.75 | 8.81 | 2.37 | 8.50 | 13.28 | .29 | .13 | 24˚ | RNN-1000 |
| 12.00 | 14 | 20.00 | — | 2.25 | — | — | — | — | — | RNN-1200 |
Differentially Pumped Rotary Seals with Fine Adjust**
| I.D | Flange O.D. | A | B | C | D | E | F | G | H | I | Drive Ratio | Model No. |
| 1.53 | 2.75 | 5.13 | 3.38 | 1.00 | 4.95 | 2.75 | 0.49 | 0.37 | 60˚ | 3 | 80:1 | RNN-150/FA |
| 1.53 | 2.75/6* | 6.00 | 3.84 | 1.34 | 5.32 | 2.75 | 0.15 | 0.37 | 45˚ | 3 | 100:1 | RNN-150/6/FA |
| 2.53 | 4.5 | 6.38 | 4.20 | 1.36 | 6.11 | 4.50 | 0.49 | 0.41 | 45˚ | 3 | 100:1 | RNN-250/FA |
| 2.53 | 4.5/6* | 6.38 | 4.20 | 1.52 | 6.11 | 4.50 | 0.33 | 0.41 | 45˚ | 3 | 100:1 | RNN-250/6/FA |
| 4.03 | 6 | 8.50 | 8.25 | 1.68 | 9.28 | 6.02 | 0.37 | 0.54 | 45˚ | 4 | 100:1 | RNN-400/FA |
| 6.03 | 8 | 10.25 | 8.50 | 1.74 | 9.93 | 8.00 | 0.42 | 1.10 | 54˚ | 5 | 100:1 | RNN-600/FA |
| 8.00 | 10 | 12.75 | 9.56 | 1.94 | 11.50 | 10.00 | 0.42 | 1.10 | 45˚ | 5 | 100:1 | RNN-800/FA |
| 10.00 | 13.25 | 17.00 | 11.86 | 2.37 | 17.25 | 13.28 | 0.29 | 0.91 | 24˚ | 7 | 100:1 | RNN-1000/FA |
| 12.00 | 14 | — | — | — | — | — | — | — | — | — | — | RNN-1200/FA |
Differentially Pumped Rotary Seals with Anti-Backlash /MS Stepping or /MY Synchronous Motor Drive***
| I.D | Flange O.D. | A | B | C | D | E | F | G | H | I | Drive Ratio | Model No. |
| 1.53 | 2.75 | 5.13 | 10.00 | 1.00 | 9.97 | 2.75 | 0.49 | 0.74 | 60˚ | 3.39 | 80:1 | RNN-150/MS or /MY |
| 1.53 | 2.75/6* | 6.00 | 10.00 | 1.34 | 9.97 | 2.75 | 0.15 | 0.74 | 45˚ | 3.39 | 100:1 | RNN-150/6/MS or /MY |
| 2.53 | 4.5 | 6.38 | 10.10 | 1.36 | 8.30 | 4.50 | 0.49 | 0.41 | 45˚ | 3.39 | 100:1 | RNN-250/MS or /MY |
| 2.53 | 4.5/6* | 6.38 | 10.10 | 1.52 | 8.30 | 4.50 | 0.33 | 0.41 | 45˚ | 3.39 | 100:1 | RNN-250/6/MS or /MY |
| 4.03 | 6 | 8.50 | 9.77 | 1.68 | 11.69 | 6.02 | 0.37 | 0.54 | 45˚ | 3.39 | 100:1 | RNN-400/MS or /MY |
| 6.03 | 8 | 10.25 | 10.13 | 1.74 | 11.69 | 8.00 | 0.42 | 1.10 | 54˚ | 3.39 | 100:1 | RNN-600/MS or /MY |
| 8.00 | 10 | 12.75 | 11.39 | 1.94 | 11.69 | 10.00 | 0.42 | 1.10 | 45˚ | 3.39 | 100:1 | RNN-800/MS or /MY |
| 10.00 | 13.25 | — | — | — | — | — | — | — | — | — | — | RNN-1000/MS or /MY |
| 12.00 | 14 | — | — | — | — | — | — | — | — | — | — | RNN-1200/MS or /MY |
| 18.00 | 24 | — | — | — | — | — | — | — | — | — | — | RNN-1800/MS |
| 24.00 | 34 | — | — | — | — | — | — | — | — | — | — | RNN-2400/MS |
Options
/MC Mechanical Counter
■ Add digital read-out to fine adjust or motor drive unit
■ 0.1° read-out, mechanical, non-resettable
■ Viewable from the side
■ The solution to difficulty caused by equipment mounted to platform obstructing view of a degree scale
When /MC option is selected the Vernier scale is not included.
/MFD Valve Manifold System
■ Allows first stage pump to evacuate second stage pump
■ Includes:
Two 1.33″ O.D. flange nipples, modified 1.33″ O.D. hardware
BVV-025 bakeable valve (see page 3-28)
Flexible metal plumbing
■ Assembled on RNN platform
/TC Thermocouple Access Tubes
■ Allows access to measure vacuum levels at each differentially pumped zone
/EFA High-Resolution Fine Adjust
■ RNN-150 only (includes digital read-out)
■ 0.01° resolution
■ <0.1° backlash
RNN
RNN-400/FA to RNN-1000/FA
