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HCCS Series Compact Source

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HCCS Series Compact 10 cc e-Gun™ Source

Our HCCS series compact source protects the emitter and H.V. F/T’s from damage and shorting during installation and service.  The H2O cooling system enhances heat transfer, thus increases rate stability and prevents damage to the e-beam source.  This compact source is designed for easy installation.

HCCS 10 cc pictured:


  • 10 kW (-6kV to -10kV max) e-Gun source
  • Completely shielded emitter and H.V. F/T’s
  • High Vacuum (HV) and Ultra High Vacuum (UHV) compatible
  • Low outgassing
  • High purity evaporation for thin films and other high-precision deposition applications.
  • No beam sweep, designed for metallic materials
  • Source shutter (pneumatic or manual) and HV feedthroughs
  • Compact Source can be transformed into a 1″ dia. rod-fed source

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