Sample Heating

Thermionics offers a variety of heating options to fit your application. A selection of UHV (Ultra High Vacuum) and oxygen or chemical vapor environment heaters can be adapted to the SMR sample mount.

Sample Heating

Thermionics offers a variety of heating options to fit your application. A selection of UHV (Ultra High Vacuum) and oxygen or chemical vapor environment heaters can be adapted to the SMR sample mount.

Radiant Resistive Heater – HR Series

  • Temperatures up to 1,000°C depending upon application
  • 1″ O.D. sample
  • Maintains electrical isolation
  • With all necessary feedthroughs, atmosphere side connectors, internal wiring, temperature thermocouple, and spare filaments
  • Requires LPS-800 power supply

Nude Filament Heater – HRN Series

  • Temperatures up to 1,200°C depending upon application
  • 1″ O.D. sample
  • Maintains electrical isolation
  • With all necessary feedthroughs, atmosphere side connectors, internal wiring, temperature thermocouples, and spare filaments
  • Requires LPS-800 power supply

Electron Beam Enhanced Resistive Heater – ERH Series

  • UHV heating to >1400 C
  • Temperature stability <1 degree @ 1200 C
  • 0.6″ O.D. sample size
  • Exceptionally Rapid sample heating and cooling
  • Plug in heater design for easy removal / exchange
  • Can be used with a variety of sample platen styles
  • Customization options
  • O2 option for use in oxygen enriched environment up to 1x10e-5 Torr.
  • Low power filament (approx. 40 watts)
  • Suitable for 500 VDC biasing
  • With all necessary atmosphere side connectors, internal wiring, temperature thermocouples and spare filaments
  • Requires EPS-500 power supply

EPS-500 Heater Power Supply

  • 120 and 240 volt versions
  • Three modes of operation:
    • MANUAL, full manual control of both filament current and High Voltage.
    • AUTO FILAMENT, full PID automatic control of filament current with manual H.V. adjust
    • AUTO H.V., full PID automatic control of H.V. with manual filament adjust
  • Two temperature indicators (three with multi control input option)
    • Type K, thermocouple input for temperature indication and control
    • Type C, Optical Pyrometer, and multi input options available
  • Provides up to 200 mA emission current (higher output models available)
  • Filament current, Bias Voltage and emission current meters
  • Ramp and Soak capability
  • Multiple program storage options

 

ERH Heater Product Information Download

Electron Beam Heater – HEB Series

  • Temperatures up to 2,000°C depending upon application
  • 0.6″ O.D. sample
  • Electrically-grounded sample plate
  • With all necessary feedthroughs, atmosphere side connectors, internal wiring, temperature thermocouples, and spare filaments
  • Requires EPS-3000 power supply

Radiant Quartz Lamp Heater* – SHQ Series

  • Maximum temperature: 700°C continuous heating with 1,000°C peak
  • For 2″ O.D. (standard) maximum sample size (optional sizes to 5″ O.D.)
  • Best temperature uniformity: 1″ O.D.
  • Electrically-isolated sample
  • Includes dual bakeable electrical feedthroughs, re-entrant metal seal dual cooling feedthrough, temperature thermocouples, and all necessary atmosphere side connectors
  • Requires LPS-800 or LPS-1500 power supply

Options

Gas Shower Ring Option

  • For chemical vapor (CV) applications
  • Extends thermal shield above sample plane
  • Single gas shower ring, stainless steel construction
  • Gas ring clamped to heat shield

Shutter Assembly Option

  • For evaporation or sputter applications

Heating and Cooling Accessories

ACS-CR Copper Rope

  • Approximately 1/8″ O.D.
  • OFE copper
  • Suitable for UHV cooling transfer
  • Available in custom lengths

ACS-TS Tantalum Screws

  • Manufactured from tantalum
  • 0-80 screw size
  • 3/16″ tip to head base
  • Filister head

SMRHR-HS Heater Spares Kit

  • Two replacement tungsten filaments
  • Replacement ceramic insulators

Call or email with your requirements and for current pricing.

800.962.2310 / sales@thermionics.com