Custom Vacuum Chambers
Thermionics designs and manufactures custom vacuum chambers for ultra-high vacuum (UHV) and extreme-high vacuum (XHV) applications where standard chamber configurations are not enough. Built to customer specifications, our chambers are engineered for demanding environments including thin film deposition, electron beam systems, semiconductor processing, research laboratories, particle accelerators, and advanced materials development.
Whether your application requires specialized port configurations, custom flange layouts, large-volume process chambers, or integration with electron beam sources, manipulators, viewports, feedthroughs, and other vacuum components, Thermionics provides complete chamber solutions designed for performance, reliability, and long service life.
Our chambers are manufactured using high-quality stainless steel and precision fabrication processes to ensure leak-tight performance, vacuum integrity, and excellent thermal stability through repeated bake-out cycles. Each design is developed to meet your specific vacuum, mechanical, and process requirements while maintaining compatibility with existing systems and instrumentation.
From prototype development to full production systems, Thermionics works closely with customers to deliver custom vacuum chambers that support the most challenging UHV and XHV applications. Please contact our engineering team to discuss your chamber requirements. Thermionics’ existing UHV/XHV product lines emphasize leak-tight performance, precision sealing, and compatibility with demanding research and industrial environments, which aligns with the same design philosophy used for custom chamber builds.
- Custom chamber designs for UHV and XHV applications
- Stainless steel construction for high vacuum integrity and low outgassing
- Precision fabrication and helium leak-tested performance
- Custom port locations, flange configurations, and internal geometries
- Integration with e-Gun™, manipulators, feedthroughs, viewports, and accessories
- Designed for high-temperature bake-outs and long-term reliability
- Compatible with CF, ISO, and PyraFlat™ flange systems
- Prototype through production manufacturing support