XYZ MINI SERIES

Compact XYZ Manipulators for Precision Alignment in Confined UHV Environments

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XYZ MINI Series

Configuration   XYZ-B133C-T133T-.75-.50-.50-1

Compact XYZ Manipulators for Precision Alignment in Confined UHV Environments

The XYZ MINI Series manipulators provide precision three-axis adjustment in an ultra-compact footprint, making them ideal for applications where space is at a premium. Specifically designed for small UHV chambers and precise alignment tasks, these manipulators deliver fine positioning control with ±0.25″ travel in X and Y and 1.0″ travel in Z, all with high-resolution micrometers offering 0.001″ divisions.

Engineered for stability and repeatable accuracy, the MINI Series features a 0.75″ I.D. stainless steel edge-welded bellows and utilizes 1.33″ O.D. CF flanges for both base and travel connections. Smooth, precise adjustments are made possible via small micrometers on all three axes, providing exceptional sensitivity for delicate alignment operations.

Features

  • Ultra-compact, lightweight design for limited space environments
  • Precision ±0.25″ X and Y adjustment with 0.001″ micrometer resolution
  • Precision 1.0″ Z adjustment with 0.001″ micrometer resolution
  • 1.33″ O.D. CF base flange (clearance) and travel flange (tapped)
  • 0.75″ I.D. stainless steel edge-welded bellows
  • All-metal construction; stainless steel exposed to vacuum
  • Bakeable construction for UHV compatibility

The XYZ MINI Series provides reliable, repeatable precision where traditional manipulators may be too large.