HCL e-Gun™ Motorized Z Series Crucible Pocket Indexing

Evaporation Source
Series: HCL

Thermionics introduces our high capacity linear e-Gun™ incorporating a Z Series Translator, crucible indexer. It is cost-effective and inexpensive, compared to other motion control systems.

HCL e-Gun™

Motorized Z Series Crucible Pocket Indexing

Features

  • Simple control characteristics
  • Reliability is high and stable
  • Range of speed control (motorized versions)
  • Long motor life
  • Computer PC controlled
  • Smaller actuator profile allows for additional source flange utilities
  • Scale for visual crucible position

 

Specifications 

Operating Pressure Below 5×10-5 Torr is desirable for best operation
Power Rating 6.10 or 15 kW
Filament 12 VAC 60A
Maximum Power 15 kW
Cooling Water 2gpm
Pressure Differential 25 psi minimum
Max. Bakeout Temp. 200° C
Crucible Volume 7, 10, 15, 25, 40 or 75 cc

 

Ordering Info

 Motor Stepper

Description Model No.
7 cc HCL series e-Gun, 6 kW, 3, 4, 5, or 6+ pockets HCL-0607-X-ZST-MS
10 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1010-X-ZST-MS
15 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1015-X-ZST-MS
25 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1025-X-ZST-MS
40 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1040-X-ZST-MS
75 cc HCL series e-Gun, 15 kW, 3, 4, 5, or 6+ pockets HCL-1575-X-ZST-MS

 

Manual

Description Model No.
7 cc HCL series e-Gun, 6 kW, 3, 4, 5, or 6+ pockets HCL-0607-X-ZST-M
10 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1010-X-ZST-M
15 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1015-X-ZST-M
25 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1025-X-ZST-M
40 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets HCL-1040-X-ZST-M
75 cc HCL series e-Gun, 15 kW, 3, 4, 5, or 6+ pockets HCL-1575-X-ZST-M