Evaporation Source
Series: Hanks
Hanks HM² Multi-Pocket e-Gun™
Our High-Efficiency Hanks HM² e-Guns™ provide patented and award winning modular magnet beam focusing system with enhanced beam collimation, eliminating beam curl. Our innovative Hanks HM² Hydra design consists of one (1) or two (2) compact array(s) of crucibles and emitters which translate linearly with respect to each other to provide for the co-deposition of up-to six different materials simultaneously.
HM² e-Guns™ are also 2/3 the size of standard e-Guns and 350% more efficient magnetically.
Features:
- Optimized emitter and sweep coil assemblies
- Eliminations of pole pieces – vertically mounted magnets results in less magnetic flux
- 0-200 Hz sweep, repeatable, uniform evaporation, no “tunneling” and source material eruptions
- Precise and stable evaporation rates as low as 1-2 A/sec
- 35% smaller than traditional evaporation sources with equivalent volume, evaporation rate and power capacity
- Available in HV [2×10-9 Torr] and UHV [2×10-11 Torr]
- Ideal for sequential or co-evaporation
- Power Supplies, Crucible Liners and other Accessories available
Models:
-
Single
— 7 cc to 156 cc single crucible / 1 emitter – 6-20 kW -
Single Rotary
— 7 cc to 25 cc – 4 crucible / 1 emitter – 6 & 10 kW -
Twin™
— 10 cc, 15 cc, 40 cc – 2 crucible / 2 emitter – 10 & 15 kW -
Triad™
— 10 cc, 15 cc, 40 cc – 3 crucible / 3 emitter – 6 & 10 kW -
Quadra
— 10 cc, 15 cc, 40 cc – 4 crucible / 4 emitter – 6 & 10 kW -
Hydra-1™
— Single array of 5 crucibles / 1-3 emitters (see Hydra description below for more details) -
Hydra-2™
— Dual array of 5 crucibles / 1-3 emitters, totaling 10 crucibles / 2-6 emitters (see Hydra description below for more details)
Hanks HM² e-Guns are manufactured and protected under one or more of the following patents: 4,835,789; 4,891,821; 4,947,404
Hanks HM² Hydra e-Gun™
Our innovative Hanks HM² Hydra design consists of one (1) or two (2) compact array(s) of crucibles and emitters which translate linearly with respect to each other to provide for the co-deposition of up-to six different materials simultaneously.
The Hydra configuration’s efficient utilization of space allows for four (4) different combinations of six crucibles and up to forty-two permutations of two-metal combinations, are available for co-deposition in a single vacuum pumpdown.
The Hydra eliminates adjacent source interactions without complex beam directions and bulky field shunting components. Thus, the co-evaporation design allows close source proximity for uniform coating and material interaction. Additionally, individual water cooling for each source prevents steam build-up and the inclusion of separate sweep coils for each source and promotes the total independence of the operation parameters of each source from the adjacent source.
Hydra-1 & 2 Specifications
| Feature | 10 kW Model | 15 kW Model |
| Maximum Power | 10 kW | 15 kW |
| Crucible volume | 10/15 cc | 40 cc |
| Emission voltage | 10 kV | 10 kV |
| Emission current | 0 to 1.0 A | 0 to 1.5 A |
| Filament | 700 W | 700 W |
| E-beam deflection | 220° | 220° |
| Beam spot size | .25″ diameter | .25″ diameter |
| Evaporation rate (for aluminum) | 1 gm/min at 10 kW 3.6 microns at 25 cm | 1.5 gm/min at 15 kW 50,000 Å min |
| X and Y sweep | Hyper-Unimelt Sweep (0-200 Hz) | Hyper-Unimelt sweep (0-200 Hz) |
| Water | 3.0 gpm/crucible, common return (up to 30 gpm) | 3.0 gpm/crucible, common return (up to 30 gpm) |
| Crucible material | OFE copper | OFE copper |
| Bakeout temp | 230°C (446°F) | 230°C (446°F) |
| e-Gun size–single array | 6.25″ x 5.5″ x 15″ | 6.25″ x 5.75″ x 15″ |
| e-Gun size–double array | 6.25″ x 11″ x 15″ | 6.25″ x 11.5″ x 15″ |
Power Supplies
For 10 kW model: 10kW+ e-Gun™ Power Supply For 15 kW model: 12kW e-Gun™ Power Supply