Hanks HM2 Hydra, Dynamic Source e-Gun™

Evaporation Source
Series: Hanks

Our High-Efficiency Hanks HM² e-Guns™ provide patented and award winning modular magnet beam focusing system with enhanced beam collimation, eliminating beam curl.

HM² e-Guns™ are also 2/3 the size of standard e-Guns and 350% more efficient magnetically.

 

Evaporation Source
Series: Hanks

Hanks HM² Multi-Pocket e-Gun™

Our High-Efficiency Hanks HM² e-Guns™ provide patented and award winning modular magnet beam focusing system with enhanced beam collimation, eliminating beam curl. Our innovative Hanks HM² Hydra design consists of one (1) or two (2) compact array(s) of crucibles and emitters which translate linearly with respect to each other to provide for the co-deposition of up-to six different materials simultaneously.

HM² e-Guns™ are also 2/3 the size of standard e-Guns and 350% more efficient magnetically.

Features:

  • Optimized emitter and sweep coil assemblies
  • Eliminations of pole pieces – vertically mounted magnets results in less magnetic flux
  • 0-200 Hz sweep, repeatable, uniform evaporation, no “tunneling” and source material eruptions
  • Precise and stable evaporation rates as low as 1-2 A/sec
  • 35% smaller than traditional evaporation sources with equivalent volume, evaporation rate and power capacity
  •  Available in HV [2×10-9 Torr] and UHV [2×10-11 Torr]
  • Ideal for sequential or co-evaporation
  • Power Supplies, Crucible Liners and other Accessories available

Models:

  • Single

     — 7 cc to 156 cc single crucible / 1 emitter – 6-20 kW
  • Single Rotary

     — 7 cc to 25 cc – 4 crucible / 1 emitter – 6 & 10 kW
  • Twin™

     — 10 cc, 15 cc, 40 cc – 2 crucible / 2 emitter – 10 & 15 kW
  • Triad™ 

    — 10 cc, 15 cc, 40 cc – 3 crucible / 3 emitter – 6 & 10 kW
  • Quadra

    — 10 cc, 15 cc, 40 cc – 4 crucible / 4 emitter – 6 & 10 kW
  • Hydra-1™

     — Single array of 5 crucibles / 1-3 emitters (see Hydra description below for more details)
  • Hydra-2™

     — Dual array of 5 crucibles / 1-3 emitters, totaling 10 crucibles / 2-6 emitters (see Hydra description below for more details)

Hanks HM² e-Guns are manufactured and protected under one or more of the following patents: 4,835,789; 4,891,821; 4,947,404

Hanks HM² Hydra e-Gun™

Our innovative Hanks HM² Hydra design consists of one (1) or two (2) compact array(s) of crucibles and emitters which translate linearly with respect to each other to provide for the co-deposition of up-to six different materials simultaneously.

The Hydra configuration’s efficient utilization of space allows for four (4) different combinations of six crucibles and up to forty-two permutations of two-metal combinations, are available for co-deposition in a single vacuum pumpdown.

The Hydra eliminates adjacent source interactions without complex beam directions and bulky field shunting components. Thus, the co-evaporation design allows close source proximity for uniform coating and material interaction. Additionally, individual water cooling for each source prevents steam build-up and the inclusion of separate sweep coils for each source and promotes the total independence of the operation parameters of each source from the adjacent source.

 

Hydra-1 & 2 Specifications

Feature 10 kW Model 15 kW Model
Maximum Power 10 kW 15 kW
Crucible volume 10/15 cc 40 cc
Emission voltage 10 kV 10 kV
Emission current 0 to 1.0 A 0 to 1.5 A
Filament 700 W 700 W
E-beam deflection 220° 220°
Beam spot size .25″ diameter .25″ diameter
Evaporation rate (for aluminum) 1 gm/min at 10 kW 3.6 microns at 25 cm 1.5 gm/min at 15 kW 50,000 Å min
X and Y sweep Hyper-Unimelt Sweep (0-200 Hz) Hyper-Unimelt sweep (0-200 Hz)
Water 3.0 gpm/crucible, common return (up to 30 gpm) 3.0 gpm/crucible, common return (up to 30 gpm)
Crucible material OFE copper OFE copper
Bakeout temp 230°C (446°F) 230°C (446°F)
e-Gun size–single array 6.25″ x 5.5″ x 15″ 6.25″ x 5.75″ x 15″
e-Gun size–double array 6.25″ x 11″ x 15″ 6.25″ x 11.5″ x 15″

 

Power Supplies

For 10 kW model: 6kW+ e-Gun™ Power Supply For 15 kW model: 12kW e-Gun™ Power Supply

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