Evaporation Source
Series: Hanks
Hanks HM2 Rotary Pocket e-Gun™
Rotary, Multiple Crucible e-Gun™
Model Number |
Power |
Crucible No. |
Crucible Volume |
| R0607-4 | 6 kW | 4 | 7cc |
| R0610-4 | 6 kW | 4 | 10cc |
| R0615-4 | 6 kW | 4 | 15cc |
| R1010-4 | 10 kW | 4 | 10cc |
| R1015-4 | 10 kW | 4 | 15cc |
| R1025-4 | 10 kW | 4 | 25cc |
Modular Magnets
The unique modular magnet concept is incorporated in the rotary pocket Hanks HM2 e-Gun™ design. This concept makes possible a very compact unit (see outline drawing). All of the Hanks HM2 unique features are incorporated in this model.
Hyper-Unimelt Sweep (Optimum Control on Low or High Rates)
High frequency sweep (0-200 Hz) provides the user with total flexibility in the operation of the e-Gun™. By a twist of the knobs on the X-Y sweep controller, the beam can be varied in size to suit the material being evaporated. This is very beneficial for optical coatings and other materials, where beam size plays an important role in optimum control from 1-2 Å to very high deposition rates.
Specifications
Power Output |
6 kW | 10 kW |
| 7.5 kV | 10 kV | |
| 0 to 800 mA | 0 to 1.0 A | |
Crucible Volume |
7/10/15 cc | 7/10/15/25 cc |
Filament |
12 VAC 60A | |
Electron Beam |
270˚ deflection | |
Evaporation Rates |
1 gm/min at 10 kW
3.6 microns at 25 cm |
|
Beam Spot Size |
.25” circular (approximate) (beam can be adjusted and located electrically with beam sweep controller) | |
Crucible |
OFE copper | |
Bakeout Temperature |
120˚C (250˚F) | |
Water |
3.0 gpm (filtered) at 70 psi | |
Minimum Water Tube Size |
3/8” dia (6/10 kW) | |
Pressure Differential |
50 psi minimum | |
X and Y Sweep |
Hyper-Unimelt sweep (0 to above 200 Hz) | |