Viewport shutters are used to shield the internal surface of a viewport from coating materials and particulate deposition during vacuum processing, helping to preserve viewport clarity and extend service life. Thermionics’ VPS Series shutters are built for ultra-high vacuum (UHV) performance, robust operation, and flexible integration into vacuum systems.
Key Features
- Rotary-actuated shutter with 90° swing for full open/close operation behind standard vacuum viewports.
- FRMC-133-25 rotary feedthrough included — positive mechanical control with no stray magnetic fields and excellent vacuum integrity.
- All-metal sealed construction with stainless-steel ball bearings for long-term UHV performance.
- Lockable in the open or closed position for process-controlled operation.
- Shutter cover plate protects >80% of standard viewport area, minimizing deposition on glass.
- Mounts between chamber and viewport, isolating the viewport from deposition sources.
Typical Applications
- Shielding viewports during thin film deposition, coating, and sputtering processes.
- Protecting optical sight glasses in vacuum chambers to maintain visibility and reduce cleaning cycles.
Materials & Performance
- Body / shutter material: 304 stainless steel (CF compatible)
- Vacuum capability: UHV performance when properly installed.
- Actuation: Rotary feedthrough driven (standard); pneumatic actuation available
- Available in manual and pneumatic configurations: Pneumatic version includes adjustable stop, standard flow regulator, and solenoid operation up to 100 psi max.
- Max bake temperature: 250°C (manual); 150°C (pneumatic)
- Operating Temperature: Operating temperature: 120°C – 150°C
- Pressure Range: Pressure range: 1×10⁻¹¹ Torr