e-Gun™

Electron beam guns, or e-Guns™, are high-precision instruments that emit electrons using thermal energy or field emission mechanisms designed for use in High Vacuum (HV) and Ultra High Vacuum (UHV) applications. Thermionics engineers e-Guns™ that combine durability, efficiency and reliability to support your most advanced applications, including codeposition material processing. 

Leveraging e-beam technology allows industries to achieve precise evaporation rates, enabling innovations in semiconductor manufacturing, aerospace and energy storage. Whether for research or industrial production, our technology empowers innovation with accuracy.

  • e-Gun™ - Multi-Pocket

    e-Gun™ - Multi-Pocket (11)

    Our e-Gun™ multi-pocket systems offer unmatched versatility for UHV applications requiring multiple material sources. Designed for efficient material indexing, these units maximize deposition precision while reducing downtime, and are ideal for aerospace, optics and advanced research applications.

  • e-Gun™ - Single Pocket

    e-Gun™ - Single Pocket (10)

    Our single-pocket e-Guns™ are engineered for simplicity and accurate electron control, and are ideal for semiconductor fabrication and energy storage solutions. Featuring adjustable beam spot sizes and seamless emitter replacement, these systems provide high-purity material evaporation and ensure consistent results in UHV environments.

  • e-Gun™ Accessories

    e-Gun™ Accessories (124)

    Optimize your e-Gun™ performance with our range of high-quality accessories. From emitter replacements to crucible liners and magnets, we offer everything you need to optimize and maintain your electron beam system for long-term reliability.

  • Power Supplies and Accessories

    Power Supplies and Accessories (11)

    Thermionics Solid State power supplies are designed to deliver stable, high-efficient performance for your e-Gun™ systems. Featuring advanced control options and reliable power management, our solutions ensure consistent uninterrupted performance in demanding applications.

  • Resistive Evaporation Source

    Resistive Evaporation Source (1)

    Designed for material evaporation, resistive evaporation sources offer thermal control, and are ideal for advanced applications requiring versatility.

  • Sweep Controllers

    Sweep Controllers (3)

    Sweep controllers precisely control the electron beam’s movement across the target material for  conditioning uniform evaporation, improved deposition consistency and reduced material waste. They provide programmable beam patterns and real-time adjustments in UHV environments, and are ideal for thin-film deposition, semiconductor fabrication and advanced coating applications.

Frequently Asked Questions: E-Beam Guns

Below, we answered common questions about e-beam gun components, applications, and selection to help you find the right solution for your needs. If you have other questions about e-Guns™, please reach out to an expert on the Thermionics team.

What are electronic beam guns used for?

Electron beam sources are essential for high-precision applications such as thin-film deposition and material processing. Their ability to operate in UHV environments ensures repeatable pure thin films for advanced scientific and industrial processes.

Which e-beam gun do I need?

Choosing the right e-beam source depends on your application’s requirements. For multi-material processing, our multi-pocket e-Guns™ are the best fit. If precision and simplicity are key, explore our single-pocket models. Need help deciding? View our Decision Tree or consult with one of our experts.

What are the main parts of an e-beam gun?

What’s the difference between an e-beam gun and plasma or laser?

E-beam guns excel in precision evaporation and material processing, particularly in UHV settings, with a focused beam of high-energy electrons. Plasma and laser technologies rely on different energy delivery mechanisms, with lasers emitting light photons and plasma generating streams of charged particles.


Find the Right E-Beam Gun for Your Work

Discover the perfect e-beam solution for your unique needs. View our Decision Tree PDF for guidance, or contact us to speak with an expert e-beam gun manufacturer from Thermionics. 

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