ICR Series 15kW e-Gun™
The Thermionics ICR e-Gun™ is available with capacity up to 1500cc in a carousel configuration as pictured here or as a multi-pocket e-Gun™ with up to 10 each 75cc crucibles.
Features
- True XY sweep with full crucible coverage
- Proprietary anti-beam curl shield for longer more productive runs.
- Rugged drive mechanism to prevent jamming
- Plug-in emitter module
- Enhanced high-stability cooling
- Built in cross-contamination shielding (multi-pocket version)
- Easy access (without disassembly) to magnetic adjustments
- Optional increased run-time features: differential pumping, gas bleed and dual filaments
Specifications
- Operating pressure: Below 5 x 10-5 Torr is desirable for best operation
- Beam voltage: 10,000 VDC
- Beam current: 0-1500 mA continuously variable
- Maximum power: 15 kW
- Cooling water: 3.5 gpm
- Pressure differential: 25 psi minimum
- Maximum bakeout temperature: 130°C
- Crucible volume: Up to 1500cc Carousel or up to 10 x 75cc multipocket