Evaporation Source
Series: HC
6kW Rod-Fed e-Gun™
High Capacity electron beam evaporation source:
Thermionics introduces 6 kW Rod-Fed e-Gun for better coating performance. The design protects the emitter from damage and shorting during installation and service. The improved water-cooling system enhances heat transfer, which increases rate stability and prevents damage to the e-beam source.
Features:
- 6kW e-Gun source
- 8″ O.D. CF
- 1″ O.D. Rod-fed material for continuous evaporation, manual or motorized
- Completely shielded emitter
- Fully UHV compatible
Specifications:
| Operating pressure | Below 5 x 10-5 Torr is desirable for best operation |
| Beam voltage | 6kV to 10kV |
| Beam current | 0-750 mA continuously variable |
| Maximum power | 6kW |
| Cooling water | 1 gpm |
| Pressure differential | 25 psi minimum |
| Maximum bakeout temperature | 230°C |
| Crucible volume | 1″ diameter rod; 6″ standard length |
| e-Gun size | 1″ diameter x 6″ height |
Ordering Information
Description |
Model Number |
| Rod-Fed e-Gun only |
HCRF-06100 |
| Rod-Fed e-gun with all utility, electrical and mechanical feedthroughs mounted on a 8″ diameter CF type flange |
HCRF-06100/FM800 |