Operating Pressure- 50 to 150 psi
Thermionics introduces pneumatic actuated rotary vacuum e-Gun (ebeam) bottom mounted feedthrough.
- Bottom Mounted Molybdenum Source Shutter, Pneumatic
- (adjustable shutter height)
- Molybdenum (99.95% purity) source shutter, electro-pneumatic /EBRSC-P-MO-X
- Tantalum (99.95% purity) source shutter, electro-pneumatic /EBRSC-P-TA-X
- 316 SST source shutter, electro-pneumatic /EBRSC-P-SST-X
- Stainless steel bellows sealed
- Stainless steel rotary shaft
- Adjustable shutter plate height
- Valve-to-actuator Cu plumbing installed
- ¼” O.D. shaft
- 1.33” O.D. CF mounting flange or 2.75” CF flange
- Manufactured to specified length
- Pneumatically actuated, 0°-90° with adjustable end stops
- /ACV-24, 24 VDC air control valve