Combo-Vac Series
All Combo-Vacs consist of the ion pump, cryoshroud, and sublimation pump assembly together with the appropriate cooling mechanism, control units, cables, internal heaters, 6 spare Ti sublimation filaments, and 2 UHV copper gaskets. Bolt the Combo-Vac to your system in any position, rough it down, and it’s ready for operation.
COV-500
The model COV-500 is the smallest combination pump offered by Thermionics. It has an 8” O.D., 6” I.D., UHV flanged pumping port. A reducing flange can be used to interface the pump with a manifold or with small individual devices. The pump operates in any position and is easily disassembled for cleaning and/or replacement of elements. This pump uses a water-cooled shroud.
COV-750
The model COV-750 offers an increase in speed and throughput for two reasons. First, there are 4 noble pump elements available to handle a larger throughput of non-getterable gases. Second, a liquid nitrogen cryoshroud is added. The lower temperature of the cryoshroud as a deposition surface improves the intrinsic speed of the pump. As is the case for all the Combo-Vacs, it is simple to operate and is field-proven. It can be used in tube processing, vacuum deposition systems, ion accelerators, and surface research.
- High speed, filament-type titanium sublimator/baffle assembly works at a constant current setting for reliable repetitive operation. Four separate, spiral titanium alloy filaments are incorpo-rated in the sublimator assembly to allow continuous pumping over a 120-hour period. Cycling the operation extends sublimator assembly life proportionally. Replaceable noble ion pumps with demountable high-voltage feedthrough.
- Can be supplied with diode, hydrogen diode, or triode elements in a range of sizes. Please contact us for custom details.
- Pumping port(s) are fitted with metal gasketed flange and are blanked off for bakeout and shipment.
- Separate power supplied for selective operation of sublimator and noble ion pump(s).
- Stainless steel construction.
- Internal bakeout heaters.
- Mounting brackets are attached to pump body for assembly and support.
- Liquid nitrogen/water shroud standard.
- Ideal for vacuum applications where many different gases must be pumped.
- Combo-Vacs integrate three standard components in one-unit lor selective pumping: a noble ion pump, a cooling unit, and a titanium sublimator.
- Combo-Vacs operate in any position.
COV-1000
The COV- 1000 is the pump of choice when the non-getterable gas load 1s larger than the COV-750 can comfortably handle.
As with the other Combo-Vacs. It is shipped complete with all the components needed to get your system operational. You simply remove the blank-off fIange and attach the Combo-Vac to your system. The control units are designed for rack mounting and are supplied with the high voltage and high current cables which attach to the pump. Filaments are already mounted in the sublimator assembly. Rough the system down, add LN2 to the cryoshroud (or use TLI model LNC-400 liquid nitrogen level controller; see Section 6, page 6-12), and turn on the control units. The final adjustment made at operating pressure, is to adjust the sublimator interval so that the sublimator turns on after the ores sure has risen 60 to 100% over its previous low value.
COV-2000
The COV-2000 offers additional throughput because the ion pump’s capacity is double that of the COV-1000. That means additional speed for non-getterable gases. The overall system speed is increased by use of larger fIange and shorter pump neck.