Description
This System Contains All of The Following:
Item No. |
Qty |
Description |
| C/S-1000 x 675 | 1 | Custom/Special 10″ CF flange to 6.75″ O.D. CF flange zero length reducing flange:
*(4.00″ I.D. thru bore) *Electropolish finish *Engineering and Design |
| 111368-140119 | 4 | Custom/special 40cc Mo (min. purity of 99.95%) crucible liner for |
| 111368-1409578 | 2 | Custom/special 40cc Mo (min. purity of 99.95%) crucible liner for |
| C/S-EL-400 | 1 | Custom/Special 90° pumping elbow:
*2X 6″ O.D. rotatable CF flanges, thru holes *2X 2.75″ O.D. CF flanges, thru holes *Electropolish finish *Engineering and Design |
| C/S-DEP-FRM | 1 | Custom/Special deposition frame:
*304 SST construction *Corrosion-Resistant Caster Swivel with 3″ Diameter Polyurethane Wheel *Swivel Leveling Mount Corrosion-Resistant, 303 Stainless Steel *Removable electronics rack *SST sheet metal bottom shelf *Electropolish finish *Engineering and Design |
| C/S-DEP-CHBR-10 | 1 | Custom/Special Deposition Chamber:
*10″ O.D. chamber body *Electropolish finish *Engineering and Design |
| VRS-275 | 1 | Viewport shutter, manually actuated 2.75″ CF double sided flange Shutter covers > 80% of standard viewport |
| ZPV-150 | 1 | Zero Length Glass Viewport:
*1-1/2 inch *2-3/4 inch CF Flange *7056 glass |
| QAD-800-T | 1 | Quick Access door, welds to 6″ O.D. tube 8″ O.D. door captured Viton™ gasket with gasket pumpout swing-away clamp design
with hand operated knob. |
| TLG4000-100-21(600400)-1200 | 1 | Gate Valve, 4″ I.D. x 6″ O.D. CF port flanges, metal seal bonnet,
manual actuator |
| PS-PACKAGE | 1 | Pumping Stack Package:
-Pfeiffer Turbo HiPace 300 Package DN 100 CF-F: *Mains cable; connection cable; air cooling; USB stick (software TurboViewer)
-Protection screen for DN 100 CF-F
-HiScroll 6 Oilfree Scroll-Vakuumpump DN 25 ISO-KF: *100-240V, 50/60Hz, 1-ph *Dry and oil-free scroll vacuum pump *Pumping speed: 6.1 m³ / h *Ultimate pressure without gas ballast: 3 x 10e-2 hPa *Ultimate pressure with gas ballast stage 1: 7 x 10e-2 hPa *Ultimate pressure with gas ballast stage 1: 4 x 10e-1 hPa *Best for use in quiet environments such as in the laboratory *Low vibrations and compact design *Low operating costs thanks to the highest quality, short maintenance times and long maintenance intervals *Connection flange (inlet): DN 25 ISO-KF *Connection flange (outlet): DN 25 ISO-KF *Mains connection: World voltage 50 / 60Hz: 100 – 240 V + – 10% *Industry 4.0 capable: Operation with other intelligent products such as turbopumps via RS-485 *Safe operation with built-in check valve *Performance as required: stable pumping speed and short cycle times *Sustainable: 15% higher efficiency of the drive system, less heat generation and less cooling demand *BC800 drive electronics *Active intelligent air cooling *Level 1 gas ballast: 8,000 sccm *Level 2 gas ballast: 11,000 sccm *Noise level: <48dB (A) *Leakage rate: <5 x 10e-7 Pa m³ / h
-Digital Pirani Cold Cathode gauge DN 40 CF-F: *Measurement range: 5E-9 – 1E3 hPa *Accuracy: 100 – 1000 hPa: ± 50 % *Accuracy: 10 – 100 hPa: ± 30 % *Accuracy: 2 · 10-3 – 10 hPa: ± 10 % *Accuracy: 1 · 10-8 – 2 · 10-3 hPa: ± 25 % *Repeatability: 1 · 10-2 – 10 hPa: ± 2 % *Repeatability: 1 · 10-8 – 1 · 10-2 hPa: ± 7 % *Supply: Voltage: 24 V DC *Interfaces: RS-485 *High protection level for industrial applications *Seal: Metal
-DigiLine Display and control unit for two digital gauges 95-265 V AC, 50/60 Hz: *LCD graphic display with backlight *Gauge connector: RS-485 / Pfeiffer protocol *M12, 5pole female with 24 V DC power supply *two configurable relay set points *Can be used as table top or as rack mount unit *Interface cable M12m / M12m length: 3 m |
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