Description

High Capacity Multiple Crucible Linear e-Guns™

The HCL series linear e-Gun™ is an all metal-sealed e-Gun. Available in 3, 4, 5 plus crucible versions, the source allows sequential deposition of up to 5 plus materials. Standard mounting is on a 12″ O.D. CF flange and includes auto indexer and all mechanical and electrical connections. Mounting on a 10″ O.D CF flange on 15cc and smaller.

UHV Compatible

• Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.
• 270° Beam Deflection
• The filament is completely hidden to ensure maximum protection from shorting caused by stray particles.
• Easy Filament Replacement
• A filament alignment tool maintains critical filament tolerances during emitter assembly allowing quick and accurate filament replacement.
• Permanent Magnet Beam Positioning
• The primary beam position is controlled by a permanent magnet; electromagnets are used only for precise positioning and beam sweep.

Specifications

• Maximum Power 15 kW
• Emission Voltage -6 to -15 kV
• Emission Current 0 to 1 A
• Filament 700 W
• E-Beam Deflection 270°
• Beam Spot Size Approximately .25″ diameter tight beam
• Evaporation Rate 1 gram/min @ 10 kW, 36,000 Å/min Al @ 10″ (250 mm) source-to-substrate distance
• Water 3 gpm, 25 psi pressure differential
• Crucible Material OFE copper
• Bakeout Temperature 230°C

Crucible volume options:

• 7cc, 15cc, 25cc, 40cc, and 75cc.
• Custom HCL series crucible sizes and configurations available upon request.

Example models here:

 Product Manual

View Manual
 

 e-Gun and Auxiliary Magnet Replacement Procedure

View Procedure