Evaporation Source
Series: HCL
High Capacity (HC Series) Linear Multiple Crucible Linear e-Gun™
The HCL series linear e-Gun™ is an all metal-sealed e-Gun. Available in 3, 4, 5 plus crucible versions, the source allows sequential deposition of up to 5 plus materials. Standard mounting is on a 12″ O.D. CF flange and includes auto indexer and all mechanical and electrical connections. Mounting on a 10″ O.D CF flange on 15cc and smaller.
UHV Compatible
- Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.
- 270° Beam Deflection
- The filament is completely hidden to ensure maximum protection from shorting caused by stray particles.
- Easy Filament Replacement
- A filament alignment tool maintains critical filament tolerances during emitter assembly allowing quick and accurate filament replacement.
- Permanent Magnet Beam Positioning
- The primary beam position is controlled by a permanent magnet; electromagnets are used only for precise positioning and beam sweep.
Specifications
- Maximum Power 15 kW
- Emission Voltage -6 to -15 kV
- Emission Current 0 to 1 A
- Filament 700 W
- E-Beam Deflection 270°
- Beam Spot Size Approximately .25″ diameter tight beam
- Evaporation Rate 1 gram/min @ 10 kW, 36,000 Å/min Al @ 10″ (250 mm) source-to-substrate distance
- Water 3 gpm, 25 psi pressure differential
- Crucible Material OFE copper
- Bakeout Temperature 230°C
Crucible volume options:
- 7cc, 15cc, 25cc, 40cc, and 75cc.
- Custom HCL series crucible sizes and configurations available upon request.
Example models here:
| Part Number | Description |
| HCL-1025-3/XXX | 10kW HC series three (3) pocket e-Gun™ 25 cc crucible |
| HCL-1025-4/XXX | 10 kW HC series four (4) pocket e-Gun™ 25 cc crucible |
| HCL-1025-5/XXX | 10kW HC series five (5) pocket e-Gun™ 25 cc crucible |
| HCL-1040-3/XXX | 10kW HC series three (3) pocket e-Gun™ 40 cc crucible |
| HCL-1040-4/XXX | 10kW HC series four (4) pocket e-Gun™ 40 cc crucible |
| HCL-1040-5/XXX | 10kW HC series five (5) pocket e-Gun™ 40 cc crucible |
| HCL-1575-3/XXX | 15kW HC series three (3) pocket e-Gun™ 75 cc crucible |
| HCL-1575-4/XXX | 15kW HC series four (4) pocket e-Gun™ 75 cc crucible |
| HCL-1575-5/XXX | 15kW HC series five (5) pocket e-Gun™ 75 cc crucible |