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SVA-CONTR, SVA power supply controller
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Introduction The Thermionics Laboratory e-GunTM, an electron beam evaporation source, is used to produce uniform high-purity films and optical coatings. The compact design and ease of maintenance make it useful in practically all vacuum systems and for many varied applications. It has been used to evaporate refractory and dielectric materials, as well as the more common conductive and semi-conductor
Application Note: Evaporating Aluminum in an e-Gun™ source Aluminum (Al) is highly reactive when molten. Al will react with all liner materials. Al also getters Oxygen to form oxide layers if any oxygen is present during deposition. Aluminum Oxide (Al2O3) has a much higher melting point and vapor pressure when compared to Al (2,045C M.P., 1550C V.P. for Al2O3
Application Note: Evaporating Gold (Au) in an e-Gun™ source For Gold, the best liners are Coated Graphite and Intermetallic (Ti doped BN). You should not sweep during coating. You can sweep during material conditioning, but once the material is fully melted, just place the beam in the center of the pocket. This will give the best stability. You can
NAME SYMBOL MELTING POINT 0˚C DENSITY g/cc 10^-8 TORR 10^-6 TORR 10^-4 TORR LINER NOTES N=INDEX OF REFRACTION Aluminum Al 660 2.70 677 821 1010 BN, CG Alloys and wets May fill volume 70% (1) Aluminum Carbide Al4C3 1400 2.36 800 N=2.7 (3) Aluminum Floride AlF3 1257 Subl. 3.07 410 Subl. 490 Subl. 700 Subl. G, W, MO N=1.38
The ground system is a very important aspect of the installation of the electron beam equipment. The vacuum tank and the power supply must be connected to a good earth ground. Under normal conditions, a good earth ground will consist of a ¾ inch diameter copper-clad rod driven into the floor at the vacuum tank location. It should be
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