EMX Series
EMX series XYZ manipulators accommodate 2.53″ and 4.00″ I.D. bellows, up-to 36″ stroke and up to 65 pounds of payload capacity.
Features
- Hardened X & Y cross roller guides
- 0.500″ O.D. hardened stainless steel Z guide rods
- Hardened stainless steel linear bearings
- X micrometer location interchangeable
- Aluminum stage construction
- Stainless steel only material exposed to vacuum
- Maximum bakeout temperature: 200°C
Specifications
Base Flange O.D. |
Bellows
I. D. |
Travel
Flange |
Z Travel |
Model No. (2″ Z example) |
4.5″ | 2.5″ | 2.75″ | 2-36″ | EMX-B450C-T275T-2.5-1-1-2 |
4.5″ | 2.5″ | 4.5″ | 2-36″ | EMX-B450C-T450T-2.5-1-1-2 |
4.5″ | 3.0″ | 2.75″ | 2-36″ | EMX-B450C-T275T-3.0-1-1-2 |
4.5″ | 3.0″ | 4.5″ | 2-36″ | EMX-B450C-T450T-3.0-1-1-2 |
6″ | 2.5″ | 2.75″ | 2-36″ | EMX-B600C-T275T-2.5-1-1-2 |
6″ | 2.5″ | 4.5″ | 2-36″ | EMX-B600C-T450T-2.5-1-1-2 |
6″ | 3.0″ | 2.75″ | 2-36″ | EMX-B600C-T275T-3.0-1-1-2 |
6″ | 3.0″ | 4.5″ | 2-36″ | EMX-B600C-T450T-3.0-1-1-2 |
8″ | 2.5″ | 2.75″ | 2-36″ | EMX-B800C-T275T-2.5-1-1-2 |
8″ | 2.5″ | 4.5″ | 2-36″ | EMX-B800C-T450T-2.5-1-1-2 |
8″ | 3.0″ | 2.75″ | 2-36″ | EMX-B800C-T275T-3.0-1-1-2 |
8″ | 3.0″ | 4.5″ | 2-36″ | EMX-B800C-T450T-3.0-1-1-2 |
Precision
Axis | Micrometer Graduation |
Resolution | Repeatability | Backlash | Adjustment |
X-Y | 0.001″ | <0.001″ | <0.00015″ | <0.00015″ | Standard Micrometer |
Z | 0.0005″ | <0.0005″ | 0.0005″ | 0.0007″ | Knob Adjust |
X-Y | 0.0001″ | <0.0001″ | <0.00015″ | <0.00015″ | Optional Large Micrometer |
Configuration | EMX-B450C-T450T, EMX-B450C-T450TM, EMX-B450T-T450T, EMX-B450TM-T450TM |
---|---|
Bellows | 2.00, 2.50, 3.00 |
Stroke XY | 1(±1/2), 2(±1) |
Stroke Z | 2, 4, 6, 8, 10, 12, 14, 16, 18, 20, 22, 24, 26, 28, 30, 32, 34, 36 |
Drive | Manual, MS-LS |
Options | HMP, None |
X & Y Axes
- ±0.5″ X and Y travel, circular pattern, preloaded micrometer-to-stage coupling, 0.001″ micrometer divisions
- ±0.5″ X and Y travel – Large micrometers with 0.0001″ divisions optional
- ±1″ X and Y travel available as an optional in standard and large micrometer sizes
- Micrometers bakeable to 200°C
Z Axis
- 2″ -36″ acme Z travel, 0.100″/turn knob adjust
Options
6″ Base Flange with 5 Mini-Ports
Model No: -B600MC
- Change base flange to 6.0″ O.D. with 5 mini-ports
- This option may only be ordered with the 1.39″ I.D. bellows
Motorization
- Stepping or Synchronous Motor Drive options available