Sample Heating
Thermionics offers a variety of heating options to fit your application. A selection of UHV (Ultra High Vacuum) and oxygen or chemical vapor environment heaters can be adapted to the SMR sample mount.
Electron Beam Enhanced Resistive Heater – ERH Series
- UHV heating to >1400 C
- Temperature stability <1 degree @ 1200 C
- 0.6″ O.D. sample size
- Exceptionally Rapid sample heating and cooling
- Plug in heater design for easy removal / exchange
- Can be used with a variety of sample platen styles
- Customization options
- O2 option for use in oxygen enriched environment up to 1x10e-5 Torr.
- Low power filament (approx. 40 watts)
- Suitable for 500 VDC biasing
- With all necessary atmosphere side connectors, internal wiring, temperature thermocouples and spare filaments
- Requires EPS-500 power supply
Options
Gas Shower Ring Option
- For chemical vapor (CV) applications
- Extends thermal shield above sample plane
- Single gas shower ring, stainless steel construction
- Gas ring clamped to heat shield
Shutter Assembly Option
- For evaporation or sputter applications
Heating and Cooling Accessories
ACS-CR Copper Rope
- Approximately 1/8″ O.D.
- OFE copper
- Suitable for UHV cooling transfer
- Available in custom lengths
ACS-TS Tantalum Screws
- Manufactured from tantalum
- 0-80 screw size
- 3/16″ tip to head base
- Filister head
SMRHR-HS Heater Spares Kit
- Two replacement tungsten filaments
- Replacement ceramic insulators