Goniometers & Gearboxes
A goniometer head permits precision sample positioning and alignment motion at the sample location. Installation of a goniometer head enables. rotations, translations and flip movements supplied with various accuracies. Sample faces can be held on axis, allowing a single sample site to be investigated during a change of angle. Virtual axis goniometers allow unobstructed surface access for glancing angle studies. Many of our gearboxes are designed to rotate the sample continuously during deposition, ablation or for other growth processing requirements.
All goniometer and precision gearboxes are suitable for UHV use, and are manufactured with stainless steel construction, anti-backlash spring-loaded gearing and can be fitted with heating, cooling and sample transfer options. Please see our download section below for examples we have designed and delivered.
We have found most applications are unique and usually part of a larger UHV configuration. As such we request you download and complete our manipulator worksheet and email it to sales@thermionics.com.
We will get back to you within 24 hours to begin the design of your manipulator solution.
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GB-7-1 Goniometer Heater
Azimuthal and Polar Rotation
- Up to 1.5” O.D. sample (other sizes
- available, consult factory)
- High resolution azimuthal rotation
- Requires coaxial rotary-rotary drive
- Open azimuthal axis for non-rotating heater
- All ball bearing drive, adjustable anti-backlash gearing
- Adjustable to zero sample offset
Polar
- ± 180° limited when cooling utilities are delivered from the base flange, using a clear axis rotary feedthrough such as the WOA for polar rotation
- 360° continuous when utilities are delivered by support tube and top hat mounted to an RNN series differentially pumped rotary platform for polar rotation
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GB-16 Virtual Axis Goniometer Head
Polar Rotation, Azimuthal Rotation, Flip:
- Virtual axis sample mount
- Up to 0.9” O.D. samples
- All ball bearing drive
- Dynamic anti-backlash bevel and spur gears deliver precision control
Specifications:
Polar:
- 360° continuous with clear axis rotary drive such as the WOA or ANN differentially pumped rotary platform
- ± 180° when heating and cooling utilities are delivered from the base flange
Applications:
- Non-destructive depth profiling
- Ion scattering
- Angle resolved electron or ion spectroscopy (XPS, Auger)
- Photo electron diffraction
Azimuthal:
- 180° rotation of sample
Flip:
- +95°/-5° from the axis orthogonal to the polar axis
- Actuated with precision micrometer-linear feedthrough such as the FLMM linear feedthrough with 1” linear movement
Virtual Axis Sample Positioning:
- The precision polar rotation, azimuthal rotation and flip motions move the sample about the virtual axis of the sample plane without line-of-sight interference. Virtual axis allows glancing angle studies without gearbox shadow.
GB-16/AZ Dimensions:
- Resolution <0.018° <0.025° 0.01°
- Repeatability <0.012° <0.006°
- Backlash <0.040° <0.084° <0.01°
- Range 360+° ±47° 360+°
STLC sample transfer systems are manufactured and protected under one or more of the following patents: 5,705,128
Options
Sample Transfer
- STLC Series (turn-to-lock—3-70)
- SMR (direct mount, no sample transfer— 3-49)
Heating
- /HR (radiant resistive, 1,000°C—3-50)
- /HAN (nude filament. radiant resistive, 1,200°C—3-50)
- /PBN (pyrolytic boron nitride, above
1, 200°C—3-51
- May require gearbox cooling depending upon application
Cooling
- /CLNI (indirect, copper rope—3-53)
- /CEI (ceramic electrical isolation—3-53)
Non-Magnetic
- /NM (beryllium copper bearings, bronze gears, titanium construction—3-58)
Polar
- 360° continuous with clear axis rotary drive such as the RNN series differentially pumped rotary platform
- ± 180° when heating and cooling utilities are delivered from the base flange
Sample Offset
• Zero sample offset-samples’ polar and azimuthal rotation and flip motion are all on the sample plane
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GB-17-.8
Specifications
Flip
- Flip axis is aligned orthogonal to the polar axis
- 360° capability actuated by rotary feedthrough such as the FRM or using a dual rotary drive such as the FRRC
- ± 130° limited when heating option is added
- ±90° limited when cooling option is added
GB-17-.8 Goniometer Head
Azimuthal, Polar Rotation with Flip
- Up to 0.8” O.D. (standard) sample (optional 1.5” O.D. available) (other sizes available, consult factory)
- Requires tri-axial rotary-rotary-rotary drive
- Dynamic anti-backlash spur gears
- All ball bearing drive
- Zero sample offset
Azimuthal
- 360° continuous with clear axis rotary drive such as the WOA or by using a dual rotary drive such as the FRRC
- ±90° limited with the addition of cooling
Sample Transfer
- STLC Series (turn-to-lock—3-70)
- SMR (direct mount, no sample transfer— 3-49)
Heating
- /HR (radiant resistive, 1,000°C—3-50)
- /HRN (nude filament, radiant resistive, 1,200°C—3-50)
- /PBN (pyrolytic boron nitride, above 1,200°C—3-51)
- May require gearbox cooling depending upon application
Non-Magnetic
- /NM (beryllium copper bearings, bronze gears, titanium construction—3-58)
Bias
- /EBS (electrical bias of sample)
Options
Cooling
- /CLNI (indirect, copper rope—3-53)
- /CEI (ceramic electrical isolation—3-53)
Typical Activation Components
- Azim Polar 1 Polar 2 Flip
- STLC sample transfer systems are manufactured and protected under one or more of the following patents: 5,705,128
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GB-30-2/SHQ/STLC Precision Gearbox
Head with Oxygen Environment Heater and Sample Transfer
Motorized Continuous Polar Rotation
- Provides continuous rotation during deposition
- Complete sample drive-includes all heating, feedthroughs, flanges and connectors
- For 2” O.D. (standard) maximum sample (optional sizes to 5” O.D.)
- Includes motorized rotary feedthrough and controller
- Quartz lamp heater for oxygen or chemical vapor environments
- Utilizes custom top hat motor drive
- Water-cooled gear drive for heater assembly
- All ball bearing drive
- Edge clip turn-to-lock sample transfer dock
- Sample face center on polar axis
- Electrically-isolated sample
Polar
- ±360° continuous with heating and gearbox cooling
Heater
- /SHQ quartz lamp heater 1,000 watt (standard), temperature to 700°C continuous, 1,000° C peak
- Requires 110 VAC, 8 A variable power supply with proper isolation and overload protection such as the SPS-232/A sample power supply
Specifications
Sample Rotation Speed
- 4.5-88 rpm using the FRM-SC integral speed-control rotary drive feedthrough with manual knob and motor controller
Gearbox Cooling
- /CWGB water cooling to back of heater to protect heater and gear chain
Sample Transfer
- STLC Series edge clip sample transfer dock, platens, and fork
Electrical Isolation
- /CEI (ceramic electrical isolation)
Sample Transfer
- SMR (direct mount, no sample transfer included—3-49)
Heating
- /PBN (pyrolytic boron nitride, above 1,200°C—3-51)
Options
Sample Cooling
- Consult factory for options (also see 3-53)
Gas Shower
- /GS (gas shower ring to sample during rotation—3-51)
Shutter
- /SA (shutter assembly moves shutter between sample and deposition source— 3-51)
Bias
- /EBS (electrical bias of sample)
Typical Activation Components
- Azim Polar 1 Polar 2 Flip
- STLC sample transfer systems are manufactured and protected under one or more of the following patents: 5,705,128
Azimuthal
- +/- 0.1 ° about the azimuthal axis of the target. This capability can be used to sweep the ablated plume across the substrate.
Typical Vacuum Chamber