Evaporation Source
Series: HCF
HCF Series 6 kW+ e-Guns™
The HCF series e-Gun™ is a single crucible all metal-sealed high-capacity e-Gun. Available in three standard mounting configurations: PyraFlat or CF type flanges, a 1″ diameter bolt-type mount, or with no mounting flange.
270° Beam Deflection
The high capacity series of e-Guns incorporates a proven 270° electron beam deflection system. The filament is hidden below and out of the line-of-sight of the crucible. This prevents ion erosion and provides maximum protection from shorting caused by stray particles or condensate.
Long Life Emitter Assembly
The 270° electron beam deflection design has been enhanced with a new and improved emitter assembly.
Easy Filament Replacement
The emitter assembly design makes removal or replacement of the filament fast and easy. A filament alignment tool maintains critical filament tolerances, allowing quick and accurate filament replacement.
Permanent Magnet Beam Positioning
Primary beam position is controlled by a permanent magnet. Electromagnets are used for precise positioning and beam sweep.
UHV Compatible
Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.
Specifications
| Feature | Specifications |
| Maximum Power | 10 kW |
| Emission Voltage | -6 to -10 kV |
| Emission Current | 0 to 1 A |
| Filament | 700 W |
| E-Beam Deflection | 270° |
| Beam Spot Size | .25″ diameter, tight beam |
| Evaporation Rate | 1 gram/min @ 10 kW, 36,000 Å/min Al @ 10″ (250 mm) source-to-substrate distance |
| X and Y Sweep | Longitudinal and lateral control up to 200 Hz when operated with Thermionics sweep controller |
| Water | 3 gpm, 20°C, 50 psi pressure differential |
| Crucible Material | OFE copper |
| Bakeout Temperature | 230°C (446°F) |
Mounting Configurations
Each e-Gun is available in three standard mounting configurations:
- e-Gun mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
- e-Gun with a 1″ diameter bolt-type mount, which mounts through a 1″ diameter hole, and is sealed by a compression O-ring
- e-Gun alone with no mounting flange
Please specify the mounting configuration at the time the order is placed; the costs may not include the bolt-type or flange-type mount.
Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.
Ordering Information
| Model No. | Description |
|---|---|
| HCF1007 | 7 cc single crucible |
| HCF1015 | 15 cc single crucible |
| HCF1025 | 25 cc single crucible |
| HCF1040 | 40 cc single crucible |
Options
EMITTER ASSEMBLIES
| Model No. | Description |
|---|---|
| 112128-SD | Standard |
| 112128-HD | Heavy-duty |
| 112128-DE | Dual filament |
SPARE PARTS KIT
| Model No. | Description |
|---|---|
| HC/ERK-SD | Standard |
| HC/ERK-HD | Heavy-duty |
| HC/ERK-DE | Dual filament |