Evaporation Source
Series: HCR
Rotary e-Gun™
The HCR series Rotary e-Gun™ is available in 3 to 8 crucible versions allowing sequential deposition of up to 8 plus materials. Standard mounting is on a 12″ O.D. CF flange and includes auto indexer and all mechanical and electrical connections.
Features
- 3 to 8 crucibles available
- 270° beam deflection
- Multiple crucibles, rotary design
- Interchangeable crucible assemblies
- Long life emitter assembly
- Easy filament replacement
- Permanent magnet beam positioning
- Integral sweep coils
- Available with bottom or side drive
Specifications
| Feature | Specifications |
| Maximum Power | 10 kW |
| Emission Voltage | -6 to -10 kV |
| Emission Current | 0 to 1 A |
| Filament | 700 W |
| E-Beam Deflection | 270° |
| Beam Spot Size | .25″ diameter, tight beam |
| Evaporation Rate | 1 gram/min @ 10 kW 36,000 Å/min Al @ 10″ (250 mm) source-to-substrate distance |
| X and Y Sweep | Longitudinal and lateral control up to 200 Hz when operated with Thermionics sweep controller |
| Water | 3 gpm, 20°C, 50 psi pressure differential |
| Crucible Material | OFE copper |
| Bakeout Temperature | 120°C (250°F) |
Mounting Configurations
Each e-Gun™ is available in three standard mounting configurations:
- e-Gun™ mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
- e-Gun™ with a 1″ diameter bolt-type mount, which mounts through a 1″ diameter hole, and is sealed by a compression O-ring
- e-Gun™ alone with no mounting flange
Please specify the mounting configuration at the time the order is placed; the costs may not include the bolt-type or flange-type mount.
Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.