HCR Series Rotary e-Gun™

Evaporation Source
Series: HCR

The HCR series Rotary e-Gun™ is an all metal-sealed e-Gun™ available in 3 to 8 crucible versions allowing sequential deposition of up to 8 plus materials. Standard mounting is on a 12″ O.D. CF flange and includes auto indexer and all mechanical and electrical connections.

Evaporation Source
Series: HCR
Rotary e-Gun™

The HCR series Rotary e-Gun™ is an all metal-sealed e-Gun available in 3 to 8 crucible versions allowing sequential deposition of up to 8 plus materials. Standard mounting is on a 12″ O.D. CF flange and includes auto indexer and all mechanical and electrical connections.

Features

  • 3 to 8 crucibles available
  • 270° beam deflection
  • Multiple crucibles, rotary design
  • Interchangeable crucible assemblies
  • Long life emitter assembly
  • Easy filament replacement
  • Permanent magnet beam positioning
  • Integral sweep coils
  • Available with bottom or side drive

Specifications

Feature Specifications
Maximum Power 10 kW
Emission Voltage -6 to -10 kV
Emission Current 0 to 1 A
Filament 700 W
E-Beam Deflection 270°
Beam Spot Size .25″ diameter, tight beam
Evaporation Rate 1 gram/min @ 10 kW
36,000 Å/min Al @ 10″ (250 mm) source-to-substrate distance
X and Y Sweep Longitudinal and lateral control up to 200 Hz when operated with Thermionics sweep controller
Water 3 gpm, 20°C, 50 psi pressure differential
Crucible Material OFE copper
Bakeout Temperature 120°C (250°F)

Mounting Configurations

Each e-Gun™ is available in three standard mounting configurations:

  1. e-Gun™ mounted on a PyraFlat or ConFlat metal-seal type flange, which uses a standard OFE copper gasket
  2. e-Gun™ with a 1″ diameter bolt-type mount, which mounts through a 1″ diameter hole, and is sealed by a compression O-ring
  3. e-Gun™ alone with no mounting flange

Please specify the mounting configuration at the time the order is placed; the costs may not include the bolt-type or flange-type mount.

Other mounting flanges, configurations and geometries are routinely supplied, please call the factory for further information.

 

STEP-FILES

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