Evaporation Source
Series: HCCS
Compact Source 10 cc e-Gun™
Our HCCS series compact source protects the emitter and H.V. F/T’s from damage and shorting during installation and service. The H2O cooling system enhances heat transfer, thus increases rate stability and prevents damage to the e-beam source. This compact source is designed for easy installation.
HCCS 10 cc pictured:
Features:
- 10 kW (-6kV to -10kV max) e-Gun source
- Completely shielded emitter and H.V. F/T’s
- High Vacuum (HV) and Ultra High Vacuum (UHV) compatible
- Low outgassing
- High purity evaporation for thin films and other high-precision deposition applications.
- No beam sweep, designed for metallic materials
- Source shutter (pneumatic or manual) and HV feedthroughs
- Compact Source can be transformed into a 1″ dia. rod-fed source