Thermionics introduces pneumatic actuated linear vacuum e-Gun (ebeam) feedthrough
Operating Pressure- 50 to 150 psi
- Molybdenum (99.95% purity) source shutter, electro-pneumatic /EBSC-P-MO-X
- Tantalum (99.95% purity) source shutter, electro-pneumatic /EBSC-P-TA-X
- 316 SST source shutter, electro-pneumatic /EBSC-P-SST-X
- Stainless steel bellows sealed
- Stainless steel linear shaft bearing
- Stainless steel rod and cylinder with bumpers, both ends
- Performance: <180 msec from coil energize to finish of 4” travel with 80 psi
- With flow controls, both directions
- Control voltage 24 VDC standard
- Valve-to-actuator Cu plumbing installed
- ¼” O.D. shaft
- 1.33” O.D. CF mounting flange or 2.75” CF flange
- 1”, 2”, 3”, 4”, 5”, 6” plus strokes available
- Manufactured to specified length