e-Gun™
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RC Series e-Gun™ High Voltage Insulator
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RC Series e-Gun™ Replacement Emitter Assembly
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RC Series e-Gun™, Cup
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RC Series Emitter Mounting Bracket
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RC Series Filament
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RC Series Filament Clamp
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RCF Series 3 kW Single Crucible e-Gun™
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RCL Series 3 kW Multiple Crucible Linear e-Gun™
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RCR Series 3 kW Multiple Crucible Rotary e-Gun™
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RCR Series, Rotary Crucibles, 3 kW
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RCRF Series 3 kW Rod-Fed e-Gun™
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Replacement Magnet, RC Series
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RC Series Fasteners
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Replacement Top Plate Dipole; for use on RC Series e-Guns™
Frequently Asked Questions: E-Beam Guns
Below, we answered common questions about e-beam gun components, applications, and selection to help you find the right solution for your needs. If you have other questions about e-Guns™, please reach out to an expert on the Thermionics team.
What are electronic beam guns used for?
Electron beam sources are essential for high-precision applications such as thin-film deposition and material processing. Their ability to operate in UHV environments ensures repeatable pure thin films for advanced scientific and industrial processes.
Which e-beam gun do I need?
Choosing the right e-beam source depends on your application’s requirements. For multi-material processing, our multi-pocket e-Guns™ are the best fit. If precision and simplicity are key, explore our single-pocket models. Need help deciding? View our Decision Tree or consult with one of our experts.
What are the main parts of an e-beam gun?
- E-beam Gun Emitter: E-beam emitters generate electrons emitted from a filament necessary for Electron Beam Gun Emitter Assemblies, Rebuild Kits & Parts | Thermionics material processing.
- E-beam Crucible Liner: E-beam gun crucible liners hold the material to be evaporated, ensuring material purity and preventing contamination.
- E-beam Gun Sweep Controller: E-beam gun sweep controllers manage the precise positioning and movement of the electron beam across the target material for uniform heating and deposition.
- E-beam Gun Filaments: The filaments serve as the source of emitted electrons formed into a beam by a split cathode assembly.
- E-beam Gun Solid State Power Supply: A critical e-beam accessory, the power supply provides the necessary energy to operate the e-beam gun with stable and consistent performance.
- E-beam Gun Magnets: The magnets focus the magnetic field and direct the electron beam accurately onto the target material.
What’s the difference between an e-beam gun and plasma or laser?
E-beam guns excel in precision evaporation and material processing, particularly in UHV settings, with a focused beam of high-energy electrons. Plasma and laser technologies rely on different energy delivery mechanisms, with lasers emitting light photons and plasma generating streams of charged particles.
Find the Right E-Beam Gun for Your Work
Discover the perfect e-beam solution for your unique needs. View our Decision Tree PDF for guidance, or contact us to speak with an expert e-beam gun manufacturer from Thermionics.


