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Evaporating Gold in an e-Gun™ source

Application Note: Evaporating Gold (Au) in an e-Gun™ source For Gold, the best liners are Coated Graphite and Intermetallic (Ti doped BN). You should not sweep during coating. You can sweep during material conditioning, but once the material is fully melted, just place the beam in the center of the pocket. This will give the […]


Introduction The Thermionics Laboratory e-GunTM, an electron beam evaporation source, is used to produce uniform high-purity films and optical coatings. The compact design and ease of maintenance make it useful in practically all vacuum systems and for many varied applications. It has been used to evaporate refractory and dielectric materials, as well as the more […]

Evaporation Table

NAME SYMBOL MELTING POINT 0˚C DENSITY g/cc 10^-8 TORR 10^-6 TORR 10^-4 TORR LINER NOTES N=INDEX OF REFRACTION Aluminum Al 660 2.70 677 821 1010 BN, CG Alloys and wets May fill volume 70%  (1) Aluminum Carbide Al4C3 1400 2.36  800 N=2.7 (3) Aluminum Floride AlF3 1257 Subl. 3.07 410 Subl. 490 Subl. 700 Subl. […]

Ground System for e-Guns™

The ground system is a very important aspect of the installation of the electron beam equipment. The vacuum tank and the power supply must be connected to a good earth ground. Under normal conditions, a good earth ground will consist of a ¾ inch diameter copper-clad rod driven into the floor at the vacuum tank […]

Evaporating Aluminum in an e-Gun™ source

Application Note: Evaporating Aluminum in an e-Gun™ source Aluminum (Al) is highly reactive when molten. Al will react with all liner materials. Al also getters Oxygen to form oxide layers if any oxygen is present during deposition. Aluminum Oxide (Al2O3) has a much higher melting point and vapor pressure when compared to Al (2,045C M.P., […]


Rotary Motion Feedthroughs Thermionics Northwest manufactures a full line of metal sealed rotary motion feedthroughs. These feedthroughs are designed and manufactured to the highest standard of quality and care in the industry. Our design is conservative, utilizing the same principles as those of our precision feedthrough line. We use welded bellows and all ball bearing […]


Thermionics Northwest manufactures the broadest line of UHV positioning equipment currently available. Our goal is to provide researchers with the high-quality equipment needed in their endeavors by incorporating the greatest functional value at the lowest cost. Thermionics’ Commitment – PRODUCT WARRANTY View Warranty   Design Philosophy Our equipment is designed with a modular framework. This permits […]

Ion Pumps

Theory of Operation Sputter ion pumps operate by ionizing gas within a magnetically confined cold cathode discharge. The events that combine to enable pumping of gases under vacuum are: Entrapment of electrons in orbit by a magnetic field. Ionization of gas by collision with electrons. Sputtering of titanium by ion bombardment. Titanium gettering of active […]