Evaporation Source
Series: RC
3 kW Compact Source e-Gun™
Thermionics introduces a redesigned 3 kW Compact e-Gun for better coating performance. The new design protects the emitter from damage and shorting during installation and service. The improved water-cooling system enhances heat transfer, which increases rate stability and prevents damage to the e-beam source. The Compact e-Gun is designed for easy installation into MBEsystems.
Features 3kW e-Gun source:
- Fits into a 4.5 CF type port
- 2.24cc or 3.31cc crucible
- Fully UHV compatible